CN1158167C - 用于修整晶片表面的含有氟化物剂的磨料制品 - Google Patents

用于修整晶片表面的含有氟化物剂的磨料制品 Download PDF

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Publication number
CN1158167C
CN1158167C CNB988108461A CN98810846A CN1158167C CN 1158167 C CN1158167 C CN 1158167C CN B988108461 A CNB988108461 A CN B988108461A CN 98810846 A CN98810846 A CN 98810846A CN 1158167 C CN1158167 C CN 1158167C
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CN
China
Prior art keywords
abrasive
fluoride
fixed abrasive
wafer
backing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB988108461A
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English (en)
Chinese (zh)
Other versions
CN1278201A (zh
Inventor
R��������˹��÷˹
R·梅斯纳
C·R·凯塞尔
I���¶�
G·G·I·穆尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of CN1278201A publication Critical patent/CN1278201A/zh
Application granted granted Critical
Publication of CN1158167C publication Critical patent/CN1158167C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B24D3/32—Resins or natural or synthetic macromolecular compounds for porous or cellular structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y10T428/2438—Coated
    • Y10T428/24388—Silicon containing coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31—Surface property or characteristic of web, sheet or block
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Moulding By Coating Moulds (AREA)
CNB988108461A 1997-09-19 1998-01-23 用于修整晶片表面的含有氟化物剂的磨料制品 Expired - Lifetime CN1158167C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/933,870 1997-09-19
US08/933,870 US6121143A (en) 1997-09-19 1997-09-19 Abrasive articles comprising a fluorochemical agent for wafer surface modification

Publications (2)

Publication Number Publication Date
CN1278201A CN1278201A (zh) 2000-12-27
CN1158167C true CN1158167C (zh) 2004-07-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNB988108461A Expired - Lifetime CN1158167C (zh) 1997-09-19 1998-01-23 用于修整晶片表面的含有氟化物剂的磨料制品

Country Status (10)

Country Link
US (1) US6121143A (enExample)
EP (1) EP1015175B1 (enExample)
JP (1) JP4344083B2 (enExample)
KR (1) KR100491452B1 (enExample)
CN (1) CN1158167C (enExample)
AU (1) AU6248998A (enExample)
DE (1) DE69824747T2 (enExample)
MY (1) MY126569A (enExample)
TW (1) TW480280B (enExample)
WO (1) WO1999015311A1 (enExample)

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Publication number Priority date Publication date Assignee Title
CN104114327A (zh) * 2011-12-30 2014-10-22 圣戈本陶瓷及塑料股份有限公司 复合成型研磨颗粒及其形成方法
TWI839864B (zh) * 2021-09-29 2024-04-21 美商恩特葛瑞斯股份有限公司 化學機械平坦化墊修整器總成

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WO1999015311A1 (en) 1999-04-01
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MY126569A (en) 2006-10-31
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US6121143A (en) 2000-09-19
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