JP4344083B2 - ウエハ表面改質用にフルオロケミカル剤を含有する研磨物品 - Google Patents

ウエハ表面改質用にフルオロケミカル剤を含有する研磨物品 Download PDF

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Publication number
JP4344083B2
JP4344083B2 JP2000512666A JP2000512666A JP4344083B2 JP 4344083 B2 JP4344083 B2 JP 4344083B2 JP 2000512666 A JP2000512666 A JP 2000512666A JP 2000512666 A JP2000512666 A JP 2000512666A JP 4344083 B2 JP4344083 B2 JP 4344083B2
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Japan
Prior art keywords
abrasive
fixed abrasive
abrasive article
wafer
article
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2000512666A
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English (en)
Japanese (ja)
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JP2001517558A5 (enExample
JP2001517558A (ja
Inventor
ロバート・メスナー
カール・アール・ケッセル
ジョージ・ジー・アイ・ムーア
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3M Co
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3M Co
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Publication of JP2001517558A5 publication Critical patent/JP2001517558A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B24D3/32—Resins or natural or synthetic macromolecular compounds for porous or cellular structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y10T428/2438—Coated
    • Y10T428/24388—Silicon containing coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31—Surface property or characteristic of web, sheet or block
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Moulding By Coating Moulds (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP2000512666A 1997-09-19 1998-01-23 ウエハ表面改質用にフルオロケミカル剤を含有する研磨物品 Expired - Fee Related JP4344083B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/933,870 US6121143A (en) 1997-09-19 1997-09-19 Abrasive articles comprising a fluorochemical agent for wafer surface modification
US08/933,870 1997-09-19
PCT/US1998/001364 WO1999015311A1 (en) 1997-09-19 1998-01-23 Abrasive articles comprising a fluorochemical agent for wafer surface modification

Publications (3)

Publication Number Publication Date
JP2001517558A JP2001517558A (ja) 2001-10-09
JP2001517558A5 JP2001517558A5 (enExample) 2005-12-22
JP4344083B2 true JP4344083B2 (ja) 2009-10-14

Family

ID=25464634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000512666A Expired - Fee Related JP4344083B2 (ja) 1997-09-19 1998-01-23 ウエハ表面改質用にフルオロケミカル剤を含有する研磨物品

Country Status (10)

Country Link
US (1) US6121143A (enExample)
EP (1) EP1015175B1 (enExample)
JP (1) JP4344083B2 (enExample)
KR (1) KR100491452B1 (enExample)
CN (1) CN1158167C (enExample)
AU (1) AU6248998A (enExample)
DE (1) DE69824747T2 (enExample)
MY (1) MY126569A (enExample)
TW (1) TW480280B (enExample)
WO (1) WO1999015311A1 (enExample)

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DE69824747T2 (de) 2005-07-07
AU6248998A (en) 1999-04-12
TW480280B (en) 2002-03-21
KR20010024145A (ko) 2001-03-26
DE69824747D1 (de) 2004-07-29
EP1015175A1 (en) 2000-07-05
US6121143A (en) 2000-09-19
EP1015175B1 (en) 2004-06-23
KR100491452B1 (ko) 2005-05-25
MY126569A (en) 2006-10-31
JP2001517558A (ja) 2001-10-09
WO1999015311A1 (en) 1999-04-01
CN1158167C (zh) 2004-07-21
CN1278201A (zh) 2000-12-27

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