KR100449993B1 - 광 디스크 및 그 마스터 디스크 제조장치 - Google Patents

광 디스크 및 그 마스터 디스크 제조장치 Download PDF

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Publication number
KR100449993B1
KR100449993B1 KR10-2001-0067810A KR20010067810A KR100449993B1 KR 100449993 B1 KR100449993 B1 KR 100449993B1 KR 20010067810 A KR20010067810 A KR 20010067810A KR 100449993 B1 KR100449993 B1 KR 100449993B1
Authority
KR
South Korea
Prior art keywords
electron beam
inner diameter
substrate
prepit
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR10-2001-0067810A
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English (en)
Korean (ko)
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KR20020034954A (ko
Inventor
카쯔무라마사히로
Original Assignee
파이오니아 코포레이션
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Filing date
Publication date
Application filed by 파이오니아 코포레이션 filed Critical 파이오니아 코포레이션
Publication of KR20020034954A publication Critical patent/KR20020034954A/ko
Application granted granted Critical
Publication of KR100449993B1 publication Critical patent/KR100449993B1/ko
Anticipated expiration legal-status Critical
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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/007—Arrangement of the information on the record carrier, e.g. form of tracks, actual track shape, e.g. wobbled, or cross-section, e.g. v-shaped; Sequential information structures, e.g. sectoring or header formats within a track
    • G11B7/00736—Auxiliary data, e.g. lead-in, lead-out, Power Calibration Area [PCA], Burst Cutting Area [BCA], control information
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31776—Shaped beam

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
KR10-2001-0067810A 2000-11-01 2001-11-01 광 디스크 및 그 마스터 디스크 제조장치 Expired - Fee Related KR100449993B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000334119A JP2002140840A (ja) 2000-11-01 2000-11-01 光ディスク及びその原盤製造装置
JPJP-P-2000-00334119 2000-11-01

Publications (2)

Publication Number Publication Date
KR20020034954A KR20020034954A (ko) 2002-05-09
KR100449993B1 true KR100449993B1 (ko) 2004-09-30

Family

ID=18810096

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2001-0067810A Expired - Fee Related KR100449993B1 (ko) 2000-11-01 2001-11-01 광 디스크 및 그 마스터 디스크 제조장치

Country Status (7)

Country Link
US (2) US6882615B2 (enExample)
EP (1) EP1204110A3 (enExample)
JP (1) JP2002140840A (enExample)
KR (1) KR100449993B1 (enExample)
CN (1) CN1360305A (enExample)
HK (1) HK1048190A1 (enExample)
TW (1) TW556174B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003249188A (ja) * 2002-02-26 2003-09-05 Jeol Ltd 電子ビーム照射装置及び電子ビーム照射方法
EP1551020B1 (en) * 2002-10-10 2010-11-03 Sony Corporation Method of producing optical disk-use original and method of producing optical disk
CN1711602A (zh) * 2002-11-14 2005-12-21 皇家飞利浦电子股份有限公司 具有用于改进的读出的适配磁畴形状的磁畴扩展rom介质
JP4058367B2 (ja) * 2003-03-24 2008-03-05 Ｔｄｋ株式会社 エネルギー線照射装置
US20060018240A1 (en) * 2004-07-21 2006-01-26 Charles Marshall Digital media created using electron beam technology
US20060018238A1 (en) * 2004-07-21 2006-01-26 Trepl John A Ii Fabrication of digital media using electron beam technology
US20060072428A1 (en) * 2004-09-03 2006-04-06 Charles Marshall Fabrication of digital media using ion beam technology
KR100971461B1 (ko) * 2008-04-11 2010-07-22 충주대학교 산학협력단 2차전지를 이용한 모바일 디지털 오디오 시스템
US8018820B2 (en) * 2008-08-15 2011-09-13 Seagate Technology, Llc Magnetic recording system using e-beam deflection
JP2013131261A (ja) * 2011-12-20 2013-07-04 Sony Corp 露光装置、記録媒体、記録装置、再生装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5602825A (en) * 1994-01-19 1997-02-11 Kabushiki Kaisha Toshiba Optical disk and optical disk apparatus
JPH09274722A (ja) * 1996-04-04 1997-10-21 Pioneer Electron Corp 光ディスクの情報記録装置及び情報記録方法
JPH10326453A (ja) * 1998-04-21 1998-12-08 Pioneer Electron Corp 回転駆動機構
JPH11288527A (ja) * 1998-03-31 1999-10-19 Sony Corp 記録媒体製造用原盤の製造装置及び製造方法
JPH11288535A (ja) * 1998-03-31 1999-10-19 Sony Corp ディスク原盤作成装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4074313A (en) * 1976-06-14 1978-02-14 Rca Corporation Electron beam disc recorder
JPH04137520A (ja) * 1990-09-28 1992-05-12 Hitachi Ltd 電子線描画装置および描画方法
JP2868682B2 (ja) * 1992-05-15 1999-03-10 シャープ株式会社 光ディスク
JP2746098B2 (ja) * 1994-01-19 1998-04-28 日本電気株式会社 電子ビーム描画用アパーチャおよび電子ビーム描画方法
JP2792453B2 (ja) * 1995-01-13 1998-09-03 日本電気株式会社 アパーチャ及びその製造方法
US5764619A (en) * 1995-04-07 1998-06-09 Matsushita Electric Industrial Co., Ltd. Optical recording medium having two separate recording layers
KR19980064133A (ko) * 1996-12-16 1998-10-07 히라이가즈히꼬 광 기록 매체
US5742065A (en) * 1997-01-22 1998-04-21 International Business Machines Corporation Heater for membrane mask in an electron-beam lithography system
JPH10275365A (ja) * 1997-03-28 1998-10-13 Toshiba Corp 情報記憶媒体および情報再生装置
US6343062B1 (en) * 1997-09-26 2002-01-29 Matsushita Electric Industrial Co., Ltd Optical disk device and optical disk for recording and reproducing high-density signals
JP3730782B2 (ja) * 1998-06-29 2006-01-05 パイオニア株式会社 光ディスク原盤記録装置
JP4372867B2 (ja) * 1998-10-23 2009-11-25 パイオニア株式会社 光ディスク及び記録再生装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5602825A (en) * 1994-01-19 1997-02-11 Kabushiki Kaisha Toshiba Optical disk and optical disk apparatus
JPH09274722A (ja) * 1996-04-04 1997-10-21 Pioneer Electron Corp 光ディスクの情報記録装置及び情報記録方法
JPH11288527A (ja) * 1998-03-31 1999-10-19 Sony Corp 記録媒体製造用原盤の製造装置及び製造方法
JPH11288535A (ja) * 1998-03-31 1999-10-19 Sony Corp ディスク原盤作成装置
JPH10326453A (ja) * 1998-04-21 1998-12-08 Pioneer Electron Corp 回転駆動機構

Also Published As

Publication number Publication date
EP1204110A3 (en) 2007-03-07
HK1048190A1 (zh) 2003-03-21
EP1204110A2 (en) 2002-05-08
US6882615B2 (en) 2005-04-19
US7065034B2 (en) 2006-06-20
KR20020034954A (ko) 2002-05-09
US20050201261A1 (en) 2005-09-15
JP2002140840A (ja) 2002-05-17
CN1360305A (zh) 2002-07-24
TW556174B (en) 2003-10-01
US20020057641A1 (en) 2002-05-16

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