KR100395039B1 - 폴리에테르케톤수지조성물 및 반도체웨이퍼의 가공 및 처리용캐리어 - Google Patents

폴리에테르케톤수지조성물 및 반도체웨이퍼의 가공 및 처리용캐리어 Download PDF

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Publication number
KR100395039B1
KR100395039B1 KR1019960001063A KR19960001063A KR100395039B1 KR 100395039 B1 KR100395039 B1 KR 100395039B1 KR 1019960001063 A KR1019960001063 A KR 1019960001063A KR 19960001063 A KR19960001063 A KR 19960001063A KR 100395039 B1 KR100395039 B1 KR 100395039B1
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South Korea
Prior art keywords
polyether ketone
resin composition
ketone resin
processing
carrier
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Expired - Fee Related
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KR1019960001063A
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English (en)
Korean (ko)
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KR960029406A (ko
Inventor
히데오 노무라
다다야스 고바야시
미쓰오 마에다
구니아키 아사이
Original Assignee
스미또모 가가꾸 고교 가부시끼가이샤
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Publication of KR960029406A publication Critical patent/KR960029406A/ko
Application granted granted Critical
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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L71/00—Compositions of polyethers obtained by reactions forming an ether link in the main chain; Compositions of derivatives of such polymers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L67/00—Compositions of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Compositions of derivatives of such polymers

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1019960001063A 1995-01-20 1996-01-19 폴리에테르케톤수지조성물 및 반도체웨이퍼의 가공 및 처리용캐리어 Expired - Fee Related KR100395039B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP710795 1995-01-20
JP95-007107 1995-01-20

Publications (2)

Publication Number Publication Date
KR960029406A KR960029406A (ko) 1996-08-17
KR100395039B1 true KR100395039B1 (ko) 2004-04-29

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960001063A Expired - Fee Related KR100395039B1 (ko) 1995-01-20 1996-01-19 폴리에테르케톤수지조성물 및 반도체웨이퍼의 가공 및 처리용캐리어

Country Status (6)

Country Link
US (1) US5681888A (enExample)
EP (1) EP0722985B1 (enExample)
KR (1) KR100395039B1 (enExample)
CN (1) CN1138603A (enExample)
DE (1) DE69616098T2 (enExample)
TW (1) TW318857B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100702348B1 (ko) * 1999-05-13 2007-04-04 스미또모 가가꾸 가부시키가이샤 액정 폴리에스테르 수지 조성물 및 성형품

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EP0801113B1 (en) * 1996-04-11 2004-02-18 Sumitomo Chemical Company, Limited Engineering plastics compositions containing a wholly aromatic polyester
US5945253A (en) 1996-08-29 1999-08-31 Xerox Corporation High performance curable polymers and processes for the preparation thereof
US6007877A (en) * 1996-08-29 1999-12-28 Xerox Corporation Aqueous developable high performance photosensitive curable aromatic ether polymers
US5939206A (en) * 1996-08-29 1999-08-17 Xerox Corporation Stabilized porous, electrically conductive substrates
US5889077A (en) * 1996-08-29 1999-03-30 Xerox Corporation Process for direct substitution of high performance polymers with unsaturated ester groups
US5994425A (en) * 1996-08-29 1999-11-30 Xerox Corporation Curable compositions containing photosensitive high performance aromatic ether polymers
US5863963A (en) * 1996-08-29 1999-01-26 Xerox Corporation Halomethylated high performance curable polymers
US5958995A (en) 1996-08-29 1999-09-28 Xerox Corporation Blends containing photosensitive high performance aromatic ether curable polymers
US6124372A (en) * 1996-08-29 2000-09-26 Xerox Corporation High performance polymer compositions having photosensitivity-imparting substituents and thermal sensitivity-imparting substituents
US5849809A (en) * 1996-08-29 1998-12-15 Xerox Corporation Hydroxyalkylated high performance curable polymers
JP3387766B2 (ja) * 1997-02-03 2003-03-17 住友化学工業株式会社 液晶ポリエステル樹脂組成物
JP3282584B2 (ja) * 1998-06-02 2002-05-13 信越ポリマー株式会社 精密部材用収納容器
JP2003513109A (ja) * 1998-11-24 2003-04-08 カンプベル，リチャード，ダブリュ． 高められた温度で使用するために特に適合された静電気散逸性プラスチック
US6108077A (en) * 1998-12-08 2000-08-22 Nanometrics Incorporated Sample support with a non-reflecting sample supporting surface
US6139920A (en) * 1998-12-21 2000-10-31 Xerox Corporation Photoresist compositions
US20050181212A1 (en) * 2004-02-17 2005-08-18 General Electric Company Composite articles having diffusion barriers and devices incorporating the same
GB0506937D0 (en) 2005-04-06 2005-05-11 Victrex Mfg Ltd Polymeric materials
GB0322598D0 (en) 2003-09-26 2003-10-29 Victrex Mfg Ltd Polymeric material
MX2017002210A (es) 2014-08-21 2017-05-22 Ticona Llc Composicion de poliariletercetona.
CN106574184A (zh) 2014-08-21 2017-04-19 提克纳有限责任公司 包含聚芳基醚酮和低环烷液晶聚合物的组合物
KR101664926B1 (ko) * 2014-11-19 2016-10-11 주식회사 효성 폴리에스테르가 포함된 폴리케톤 조성물
US11352480B2 (en) 2016-03-18 2022-06-07 Ticona Llc Polyaryletherketone composition
US11118053B2 (en) 2018-03-09 2021-09-14 Ticona Llc Polyaryletherketone/polyarylene sulfide composition
CN108774379A (zh) * 2018-04-27 2018-11-09 太仓市磁力驱动泵有限公司 一种基于碳纤维长丝改性聚醚醚酮增强的磁力泵金属复合隔离套及其制备方法
US11168210B2 (en) * 2018-05-22 2021-11-09 Daikin Industries, Ltd. Resin composition
CN109438916A (zh) * 2018-10-25 2019-03-08 宜宾天原集团股份有限公司 一种耐热抗静电聚醚醚酮复合材料及其制备方法
EP3795637A1 (en) * 2019-09-23 2021-03-24 Solvay Specialty Polymers USA, LLC. Polyaryletherketone polymer compositions and corresponding articles
US20220396094A1 (en) * 2019-11-27 2022-12-15 The Yokohama Rubber Co., Ltd. Pneumatic tire
JPWO2021161912A1 (enExample) 2020-02-13 2021-08-19

Family Cites Families (7)

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Publication number Priority date Publication date Assignee Title
JPH0638413B2 (ja) * 1984-01-12 1994-05-18 三井東圧化学株式会社 ウェハ処理用容器
DE3572835D1 (en) * 1984-06-29 1989-10-12 Amoco Corp Blends of a poly(aryl ether ketone) and a polyarylate
JPS62129347A (ja) * 1985-11-29 1987-06-11 Sumitomo Chem Co Ltd 耐薬品性の改良された熱可塑性樹脂組成物
WO1988000605A1 (en) * 1986-07-21 1988-01-28 Amoco Corporation Blends containing liquid crystalline polyesters
JPS63301258A (ja) * 1987-05-29 1988-12-08 Otsuka Chem Co Ltd スクロ−ル型圧縮機部材用樹脂組成物及びスクロ−ル型圧縮機部品の製造方法
US5006402A (en) * 1989-04-28 1991-04-09 The University Of Akron Wholly aromatic polyester fiber-reinforced high performance thermoplastic and process for preparing same
EP0513655A3 (en) * 1991-05-13 1993-01-20 Hoechst Aktiengesellschaft Alloys of polyaryletherketones and liquid crystalline polyesters

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100702348B1 (ko) * 1999-05-13 2007-04-04 스미또모 가가꾸 가부시키가이샤 액정 폴리에스테르 수지 조성물 및 성형품

Also Published As

Publication number Publication date
EP0722985B1 (en) 2001-10-24
TW318857B (enExample) 1997-11-01
US5681888A (en) 1997-10-28
DE69616098D1 (de) 2001-11-29
CN1138603A (zh) 1996-12-25
EP0722985A2 (en) 1996-07-24
DE69616098T2 (de) 2002-07-11
KR960029406A (ko) 1996-08-17
EP0722985A3 (en) 1997-11-12

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