DE69616098T2 - Polyetherketonzusammensetzungen und Träger zur Bearbeitung und Behandlung von Halbleiterscheiben - Google Patents

Polyetherketonzusammensetzungen und Träger zur Bearbeitung und Behandlung von Halbleiterscheiben

Info

Publication number
DE69616098T2
DE69616098T2 DE69616098T DE69616098T DE69616098T2 DE 69616098 T2 DE69616098 T2 DE 69616098T2 DE 69616098 T DE69616098 T DE 69616098T DE 69616098 T DE69616098 T DE 69616098T DE 69616098 T2 DE69616098 T2 DE 69616098T2
Authority
DE
Germany
Prior art keywords
carriers
processing
semiconductor wafers
polyether ketone
treating semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69616098T
Other languages
English (en)
Other versions
DE69616098D1 (de
Inventor
Tadayasu Kobayashi
Kuniaki Asai
Hideo Nomura
Mitsuo Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Publication of DE69616098D1 publication Critical patent/DE69616098D1/de
Application granted granted Critical
Publication of DE69616098T2 publication Critical patent/DE69616098T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L71/00—Compositions of polyethers obtained by reactions forming an ether link in the main chain; Compositions of derivatives of such polymers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L67/00—Compositions of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Compositions of derivatives of such polymers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE69616098T 1995-01-20 1996-01-17 Polyetherketonzusammensetzungen und Träger zur Bearbeitung und Behandlung von Halbleiterscheiben Expired - Lifetime DE69616098T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP710795 1995-01-20

Publications (2)

Publication Number Publication Date
DE69616098D1 DE69616098D1 (de) 2001-11-29
DE69616098T2 true DE69616098T2 (de) 2002-07-11

Family

ID=11656872

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69616098T Expired - Lifetime DE69616098T2 (de) 1995-01-20 1996-01-17 Polyetherketonzusammensetzungen und Träger zur Bearbeitung und Behandlung von Halbleiterscheiben

Country Status (6)

Country Link
US (1) US5681888A (de)
EP (1) EP0722985B1 (de)
KR (1) KR100395039B1 (de)
CN (1) CN1138603A (de)
DE (1) DE69616098T2 (de)
TW (1) TW318857B (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6194524B1 (en) * 1996-04-11 2001-02-27 Sumitomo Chemical Company, Limited Thermoplastic resin composition
US5863963A (en) * 1996-08-29 1999-01-26 Xerox Corporation Halomethylated high performance curable polymers
US5849809A (en) 1996-08-29 1998-12-15 Xerox Corporation Hydroxyalkylated high performance curable polymers
US5889077A (en) * 1996-08-29 1999-03-30 Xerox Corporation Process for direct substitution of high performance polymers with unsaturated ester groups
US5945253A (en) * 1996-08-29 1999-08-31 Xerox Corporation High performance curable polymers and processes for the preparation thereof
US6007877A (en) 1996-08-29 1999-12-28 Xerox Corporation Aqueous developable high performance photosensitive curable aromatic ether polymers
US5958995A (en) 1996-08-29 1999-09-28 Xerox Corporation Blends containing photosensitive high performance aromatic ether curable polymers
US5939206A (en) * 1996-08-29 1999-08-17 Xerox Corporation Stabilized porous, electrically conductive substrates
US6124372A (en) * 1996-08-29 2000-09-26 Xerox Corporation High performance polymer compositions having photosensitivity-imparting substituents and thermal sensitivity-imparting substituents
US5994425A (en) * 1996-08-29 1999-11-30 Xerox Corporation Curable compositions containing photosensitive high performance aromatic ether polymers
JP3387766B2 (ja) * 1997-02-03 2003-03-17 住友化学工業株式会社 液晶ポリエステル樹脂組成物
JP3282584B2 (ja) * 1998-06-02 2002-05-13 信越ポリマー株式会社 精密部材用収納容器
JP2003513109A (ja) * 1998-11-24 2003-04-08 カンプベル，リチャード，ダブリュ． 高められた温度で使用するために特に適合された静電気散逸性プラスチック
US6108077A (en) * 1998-12-08 2000-08-22 Nanometrics Incorporated Sample support with a non-reflecting sample supporting surface
US6139920A (en) * 1998-12-21 2000-10-31 Xerox Corporation Photoresist compositions
TW491879B (en) * 1999-05-13 2002-06-21 Sumitomo Chemical Co Liquid crystal polyester resin composition and molded article
US20050181212A1 (en) * 2004-02-17 2005-08-18 General Electric Company Composite articles having diffusion barriers and devices incorporating the same
GB0322598D0 (en) 2003-09-26 2003-10-29 Victrex Mfg Ltd Polymeric material
GB0506937D0 (en) 2005-04-06 2005-05-11 Victrex Mfg Ltd Polymeric materials
CN106574185A (zh) 2014-08-21 2017-04-19 提克纳有限责任公司 聚芳基醚酮组合物
WO2016028614A1 (en) 2014-08-21 2016-02-25 Ticona Llc Composition containing a polyaryletherketone and low naphthenic liquid crystalline polymer
KR101664926B1 (ko) * 2014-11-19 2016-10-11 주식회사 효성 폴리에스테르가 포함된 폴리케톤 조성물
US11352480B2 (en) 2016-03-18 2022-06-07 Ticona Llc Polyaryletherketone composition
US11118053B2 (en) 2018-03-09 2021-09-14 Ticona Llc Polyaryletherketone/polyarylene sulfide composition
CN108774379A (zh) * 2018-04-27 2018-11-09 太仓市磁力驱动泵有限公司 一种基于碳纤维长丝改性聚醚醚酮增强的磁力泵金属复合隔离套及其制备方法
CN112154188B (zh) * 2018-05-22 2021-10-15 大金工业株式会社 树脂组合物
CN109438916A (zh) * 2018-10-25 2019-03-08 宜宾天原集团股份有限公司 一种耐热抗静电聚醚醚酮复合材料及其制备方法
EP3795637A1 (de) * 2019-09-23 2021-03-24 Solvay Specialty Polymers USA, LLC. Polyaryletherketon-polymer-zusammensetzungen und zugehörige artikel
CN114728555A (zh) * 2019-11-27 2022-07-08 横滨橡胶株式会社 充气轮胎

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0638413B2 (ja) * 1984-01-12 1994-05-18 三井東圧化学株式会社 ウェハ処理用容器
DE3572835D1 (en) * 1984-06-29 1989-10-12 Amoco Corp Blends of a poly(aryl ether ketone) and a polyarylate
JPS62129347A (ja) * 1985-11-29 1987-06-11 Sumitomo Chem Co Ltd 耐薬品性の改良された熱可塑性樹脂組成物
EP0275295A4 (de) * 1986-07-21 1990-02-21 Amoco Corp Gemische, die fllüssigkristalline polyester enthalten.
JPS63301258A (ja) * 1987-05-29 1988-12-08 Otsuka Chem Co Ltd スクロ−ル型圧縮機部材用樹脂組成物及びスクロ−ル型圧縮機部品の製造方法
US5006402A (en) * 1989-04-28 1991-04-09 The University Of Akron Wholly aromatic polyester fiber-reinforced high performance thermoplastic and process for preparing same
EP0513655A3 (en) * 1991-05-13 1993-01-20 Hoechst Aktiengesellschaft Alloys of polyaryletherketones and liquid crystalline polyesters

Also Published As

Publication number Publication date
TW318857B (de) 1997-11-01
CN1138603A (zh) 1996-12-25
KR960029406A (ko) 1996-08-17
EP0722985B1 (de) 2001-10-24
EP0722985A3 (de) 1997-11-12
DE69616098D1 (de) 2001-11-29
KR100395039B1 (ko) 2004-04-29
US5681888A (en) 1997-10-28
EP0722985A2 (de) 1996-07-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SUMITOMO CHEMICAL CO. LTD., TOKIO/TOKYO, JP