KR100392264B1 - 반도체집적회로장치의제조방법 - Google Patents

반도체집적회로장치의제조방법 Download PDF

Info

Publication number
KR100392264B1
KR100392264B1 KR1019950041623A KR19950041623A KR100392264B1 KR 100392264 B1 KR100392264 B1 KR 100392264B1 KR 1019950041623 A KR1019950041623 A KR 1019950041623A KR 19950041623 A KR19950041623 A KR 19950041623A KR 100392264 B1 KR100392264 B1 KR 100392264B1
Authority
KR
South Korea
Prior art keywords
mold
die
resin
vent
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019950041623A
Other languages
English (en)
Korean (ko)
Other versions
KR960019622A (ko
Inventor
시미즈츠요시
고오즈겐지
다바타가츠히로
나카니시마사키
나미키가가츠시게
마츠나가요시히로
나카지마유타카
Original Assignee
히타치 도오쿄오 에레쿠토로니쿠스 가부시키가이샤
가부시끼가이샤 히다치 세이사꾸쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10183395A external-priority patent/JPH08294919A/ja
Priority claimed from JP22424595A external-priority patent/JPH08192438A/ja
Application filed by 히타치 도오쿄오 에레쿠토로니쿠스 가부시키가이샤, 가부시끼가이샤 히다치 세이사꾸쇼 filed Critical 히타치 도오쿄오 에레쿠토로니쿠스 가부시키가이샤
Publication of KR960019622A publication Critical patent/KR960019622A/ko
Application granted granted Critical
Publication of KR100392264B1 publication Critical patent/KR100392264B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14639—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • B29C45/14655—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/01—Manufacture or treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17—Component parts, details or accessories; Auxiliary operations
    • B29C45/26—Moulds
    • B29C45/34—Moulds having venting means
    • B29C45/345—Moulds having venting means using a porous mould wall or a part thereof, e.g. made of sintered metal
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/01—Manufacture or treatment
    • H10W74/016—Manufacture or treatment using moulds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14639—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • B29C45/14655—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
    • B29C2045/14663—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame the mould cavity walls being lined with a film, e.g. release film
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/874—On different surfaces
    • H10W72/884—Die-attach connectors and bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/736—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
KR1019950041623A 1994-11-17 1995-11-16 반도체집적회로장치의제조방법 Expired - Fee Related KR100392264B1 (ko)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP28327894 1994-11-17
JP28327794 1994-11-17
JP94-283277 1994-11-17
JP94-283278 1994-11-17
JP95-101833 1995-04-26
JP10183395A JPH08294919A (ja) 1995-04-26 1995-04-26 モールド方法およびモールド装置
JP22424595A JPH08192438A (ja) 1994-11-17 1995-08-31 半導体集積回路装置の製造方法およびそれに用いるモールド装置
JP95-224245 1995-08-31

Publications (2)

Publication Number Publication Date
KR960019622A KR960019622A (ko) 1996-06-17
KR100392264B1 true KR100392264B1 (ko) 2003-11-20

Family

ID=27468957

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950041623A Expired - Fee Related KR100392264B1 (ko) 1994-11-17 1995-11-16 반도체집적회로장치의제조방법

Country Status (3)

Country Link
EP (1) EP0713248A3 (https=)
KR (1) KR100392264B1 (https=)
TW (1) TW302527B (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY114454A (en) * 1996-03-14 2002-10-31 Towa Corp Method of sealing electronic component with molded resin
SG65615A1 (en) * 1996-07-25 1999-06-22 Advanced Systems Automation Pt Bga moulding assembly for encapsulating bga substrates of varying thickness
JP3017485B2 (ja) * 1998-01-23 2000-03-06 アピックヤマダ株式会社 半導体装置の樹脂封止方法及び樹脂封止装置
EP0979718A1 (de) * 1998-08-06 2000-02-16 Franz Sterner Verfahren zum Herstellen von Spritzgussteilen und Spritzgussform zur Durchführung des Verfahrens
NL1011392C2 (nl) * 1999-02-25 2000-08-28 3P Licensing Bv Inrichting voor het omhullen van elektronische componenten en daarvoor bestemde matrijs.
JP2005001239A (ja) 2003-06-12 2005-01-06 Towa Corp 樹脂成形型用材料及び樹脂成形型
JP4518808B2 (ja) * 2004-02-09 2010-08-04 Ｔｏｗａ株式会社 導電性多孔質材料、その材料からなる樹脂成形型、及びその材料の製造方法
JP3996138B2 (ja) * 2004-03-26 2007-10-24 Ｔｏｗａ株式会社 低密着性材料及び樹脂成形型
JP2008504159A (ja) * 2004-06-28 2008-02-14 ザ エクス ワン カンパニー 気体透過性金型
JP2006131429A (ja) * 2004-11-02 2006-05-25 Towa Corp 低密着性材料及び樹脂成形型
DE102005020427A1 (de) * 2005-04-29 2006-11-09 Infineon Technologies Ag Verfahren und Gießformwerkzeug zur Herstellung einer Schutzschicht an integrierten Bauelementen
US10780498B2 (en) * 2018-08-22 2020-09-22 General Electric Company Porous tools and methods of making the same
US10969594B2 (en) * 2018-11-30 2021-04-06 Snap Inc. Low pressure molded article and method for making same
CN110978435B (zh) * 2019-12-19 2025-01-28 惠州市吉邦精密技术有限公司 一种自动射蜡模具设备
US11318642B2 (en) * 2019-12-20 2022-05-03 Eaton Intelligent Power Limited Permeable wall encapsulation mold
CN116001201B (zh) * 2022-12-05 2025-01-14 大能(南通)机电有限公司 一种可调节温度的机电一体化模具及其使用方法
CN116666229B (zh) * 2023-08-02 2024-06-07 碳芯微电子科技(深圳)有限公司 一种芯片框及其加工方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1779104A1 (de) * 1968-07-06 1971-08-19 Continental Gummi Werke Ag Verfahren und Vorrichtung zum Herstellen von Gummi- oder Kunststoffartikeln
JPS6237119A (ja) * 1985-08-10 1987-02-18 Fujitsu Ltd モ−ルド金型およびモ−ルド方法
JPS62135330A (ja) * 1985-12-09 1987-06-18 Rohm Co Ltd トランスフア−成形方法
JPS62173228A (ja) * 1986-01-27 1987-07-30 Rohm Co Ltd トランスフア−成形方法
JPH04129713A (ja) * 1990-09-20 1992-04-30 Matsushita Electric Works Ltd 真空成形用金型装置
JPH04307213A (ja) * 1991-04-05 1992-10-29 Seiko Epson Corp トランスファーモールド型及びトランスファーモールド装置
JPH0574827A (ja) * 1991-09-13 1993-03-26 Fujitsu Miyagi Electron:Kk 半導体装置の製造装置
JPH06344389A (ja) * 1993-06-03 1994-12-20 Fujitsu Miyagi Electron:Kk モールド金型
NL9400119A (nl) * 1994-01-27 1995-09-01 3P Licensing Bv Werkwijze voor het met een hardende kunststof omhullen van een electronische component, electronische componenten met kunststofomhulling verkregen door middel van deze werkwijze en matrijs voor het uitvoeren der werkwijze.

Also Published As

Publication number Publication date
EP0713248A2 (en) 1996-05-22
TW302527B (https=) 1997-04-11
EP0713248A3 (en) 1997-04-23
KR960019622A (ko) 1996-06-17

Similar Documents

Publication Publication Date Title
KR100392264B1 (ko) 반도체집적회로장치의제조방법
JP4326786B2 (ja) 樹脂封止装置
JP4519398B2 (ja) 樹脂封止方法及び半導体装置の製造方法
US6630374B2 (en) Resin sealing method and resin sealing apparatus
DE102007039230A1 (de) Verfahren zum Bilden von Gehäusen für lichtemittierende Halbleitervorrichtungen durch Spritzgießen eines flüssigen Kunststoffs und gegossene lichtemittierende Halbleitervorrichtungsstreifen
US6438826B2 (en) Electronic component, method of sealing electronic component with resin, and apparatus therefor
JP2002009096A (ja) 樹脂封止方法及び樹脂封止装置
JP2003243435A (ja) 半導体集積回路装置の製造方法
JP4336502B2 (ja) 電子部品の樹脂封止成形方法及び装置
JP3423912B2 (ja) 電子部品、電子部品の樹脂封止方法、及び樹脂封止装置
JP2002036270A (ja) 樹脂封止方法及び樹脂封止装置
JPH08192438A (ja) 半導体集積回路装置の製造方法およびそれに用いるモールド装置
JP3456983B2 (ja) リードフレームおよび樹脂封止型半導体装置の製造方法
JP2004146556A (ja) 樹脂封止方法、樹脂封止装置、及び樹脂シート
US20040214371A1 (en) System and method for conventional molding using a new design potblock
JP3581816B2 (ja) フリップチップの樹脂注入方法
TWI482251B (zh) Lead frame and method of manufacturing
KR100304680B1 (ko) 반도체장치및그제조방법
JPH09262876A (ja) 成型方法及び半導体集積回路装置用パッケージの成型方法並びに成型装置
JP2002118130A (ja) マトリクスパッケージの樹脂封止方法
JPH08294919A (ja) モールド方法およびモールド装置
KR20090006096A (ko) 전자 부품의 수지 밀봉 성형 방법 및 전자 부품의 수지 밀봉 성형 장치
JP2684920B2 (ja) 半導体装置の樹脂封止金型及び製造方法
JPH11188761A (ja) カード基材の成形用金型、それを用いたカード基材製造方法、およびカード基材
JP2694293B2 (ja) 高圧縮成形樹脂タブレットの成形方法

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20080623

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20090710

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20090710

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000