KR100203577B1 - 광로조절장치와 그 제조방법 - Google Patents

광로조절장치와 그 제조방법 Download PDF

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Publication number
KR100203577B1
KR100203577B1 KR1019940034972A KR19940034972A KR100203577B1 KR 100203577 B1 KR100203577 B1 KR 100203577B1 KR 1019940034972 A KR1019940034972 A KR 1019940034972A KR 19940034972 A KR19940034972 A KR 19940034972A KR 100203577 B1 KR100203577 B1 KR 100203577B1
Authority
KR
South Korea
Prior art keywords
electrode
deformed portion
lower electrode
electrically connected
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019940034972A
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English (en)
Korean (ko)
Other versions
KR960028118A (ko
Inventor
민용기
Original Assignee
배순훈
대우전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 배순훈, 대우전자주식회사 filed Critical 배순훈
Priority to KR1019940034972A priority Critical patent/KR100203577B1/ko
Priority to MYPI95003523A priority patent/MY113094A/en
Priority to TW084112258A priority patent/TW305945B/zh
Priority to RU97112466/09A priority patent/RU2156487C2/ru
Priority to PCT/KR1995/000153 priority patent/WO1996019896A1/en
Priority to CA002208089A priority patent/CA2208089A1/en
Priority to HU9800814A priority patent/HU221359B1/hu
Priority to AU38820/95A priority patent/AU703795B2/en
Priority to PL95320827A priority patent/PL178495B1/pl
Priority to CZ971882A priority patent/CZ188297A3/cs
Priority to JP51967796A priority patent/JP3523881B2/ja
Priority to CN95196838A priority patent/CN1070330C/zh
Priority to BR9510206A priority patent/BR9510206A/pt
Priority to DE69521283T priority patent/DE69521283T2/de
Priority to EP95118378A priority patent/EP0718658B1/en
Priority to ARP950100283A priority patent/AR000913A1/es
Priority to US08/565,713 priority patent/US5706121A/en
Priority to PE1995286536A priority patent/PE55296A1/es
Publication of KR960028118A publication Critical patent/KR960028118A/ko
Priority to MXPA/A/1997/004519A priority patent/MXPA97004519A/xx
Application granted granted Critical
Publication of KR100203577B1 publication Critical patent/KR100203577B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Bipolar Transistors (AREA)
  • Electroluminescent Light Sources (AREA)
  • Laminated Bodies (AREA)
  • Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
KR1019940034972A 1994-12-19 1994-12-19 광로조절장치와 그 제조방법 Expired - Fee Related KR100203577B1 (ko)

Priority Applications (19)

Application Number Priority Date Filing Date Title
KR1019940034972A KR100203577B1 (ko) 1994-12-19 1994-12-19 광로조절장치와 그 제조방법
TW084112258A TW305945B (https=) 1994-12-19 1995-11-18
MYPI95003523A MY113094A (en) 1994-12-19 1995-11-18 Low temperature formed thin film actuated mirrow array
EP95118378A EP0718658B1 (en) 1994-12-19 1995-11-22 Low temperature formed thin film actuated mirror array
CA002208089A CA2208089A1 (en) 1994-12-19 1995-11-22 Low temperature formed thin film actuated mirror array
HU9800814A HU221359B1 (en) 1994-12-19 1995-11-22 Low temperature formed thin film actuated mirror array
AU38820/95A AU703795B2 (en) 1994-12-19 1995-11-22 Low temperature formed thin film actuated mirror array
PL95320827A PL178495B1 (pl) 1994-12-19 1995-11-22 Układ zwierciadeł cienkowarstwowych ruchomych i sposób wytwarzania w niskiej temperaturze układu zwierciadeł cienkowarstwowych ruchomych
CZ971882A CZ188297A3 (cs) 1994-12-19 1995-11-22 Seskupení ovládaných zrcadel tenkého filmu, vytvářené při nízkých teplotách a způsob jeho výroby
JP51967796A JP3523881B2 (ja) 1994-12-19 1995-11-22 低温度形成の薄膜アクチュエーテッドミラーアレイ及びその製造方法
RU97112466/09A RU2156487C2 (ru) 1994-12-19 1995-11-22 Матрица тонкопленочных возбуждаемых зеркал и способ ее изготовления
BR9510206A BR9510206A (pt) 1994-12-19 1995-11-22 Conjunto de espelhos acionados de filme fino formado em baixa temperatura
DE69521283T DE69521283T2 (de) 1994-12-19 1995-11-22 Bei niedriger Temperatur hergestellte Matrix aus verstellbaren Dünnfilm-Spiegeln
PCT/KR1995/000153 WO1996019896A1 (en) 1994-12-19 1995-11-22 Low temperature formed thin film actuated mirror array
CN95196838A CN1070330C (zh) 1994-12-19 1995-11-22 较低温度下形成的薄膜致动反射镜阵列
ARP950100283A AR000913A1 (es) 1994-12-19 1995-11-23 Conjunto de m x n espejos accionados de pelicula delgada y metodo para la fabricacion del mismo.
US08/565,713 US5706121A (en) 1994-12-19 1995-11-30 Low temperature formed thin film actuated mirror array
PE1995286536A PE55296A1 (es) 1994-12-19 1995-12-06 Conjunto de espejos accionados de pelicula delgada formado a baja temperatura
MXPA/A/1997/004519A MXPA97004519A (en) 1994-12-19 1997-06-18 Formation of mirrors accessed by peliculelelade formed to low temperat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940034972A KR100203577B1 (ko) 1994-12-19 1994-12-19 광로조절장치와 그 제조방법

Publications (2)

Publication Number Publication Date
KR960028118A KR960028118A (ko) 1996-07-22
KR100203577B1 true KR100203577B1 (ko) 1999-06-15

Family

ID=19402117

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940034972A Expired - Fee Related KR100203577B1 (ko) 1994-12-19 1994-12-19 광로조절장치와 그 제조방법

Country Status (18)

Country Link
US (1) US5706121A (https=)
EP (1) EP0718658B1 (https=)
JP (1) JP3523881B2 (https=)
KR (1) KR100203577B1 (https=)
CN (1) CN1070330C (https=)
AR (1) AR000913A1 (https=)
AU (1) AU703795B2 (https=)
BR (1) BR9510206A (https=)
CA (1) CA2208089A1 (https=)
CZ (1) CZ188297A3 (https=)
DE (1) DE69521283T2 (https=)
HU (1) HU221359B1 (https=)
MY (1) MY113094A (https=)
PE (1) PE55296A1 (https=)
PL (1) PL178495B1 (https=)
RU (1) RU2156487C2 (https=)
TW (1) TW305945B (https=)
WO (1) WO1996019896A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5991064A (en) * 1996-06-29 1999-11-23 Daewoo Electronics Co., Ltd. Thin film actuated mirror array and a method for the manufacture thereof
GB9625512D0 (en) * 1996-12-09 1997-01-29 Crosfield Electronics Ltd Radiation beam scanning apparatus and method
RU2187212C2 (ru) * 1997-05-27 2002-08-10 Дэу Электроникс Ко., Лтд. Способ изготовления матрицы управляемых тонкопленочных зеркал
US20060152830A1 (en) * 2005-01-12 2006-07-13 John Farah Polyimide deformable mirror
AU2007290983A1 (en) * 2006-08-31 2008-03-06 Dynea Oy Novel hybrid binder with natural compounds for low emission products

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3544201A (en) * 1968-01-02 1970-12-01 Gen Telephone & Elect Optical beam deflector
EP0046873A1 (en) * 1980-09-02 1982-03-10 Texas Instruments Incorporated Deformable mirror light modulator
US4615595A (en) * 1984-10-10 1986-10-07 Texas Instruments Incorporated Frame addressed spatial light modulator
US4793699A (en) * 1985-04-19 1988-12-27 Canon Kabushiki Kaisha Projection apparatus provided with an electro-mechanical transducer element
US5172262A (en) * 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
JPS63117671A (ja) * 1986-10-31 1988-05-21 Minolta Camera Co Ltd バイモルフ駆動素子
JPH088777B2 (ja) * 1986-11-05 1996-01-29 三菱電機株式会社 インバ−タ装置の制御回路
US5126836A (en) * 1989-11-01 1992-06-30 Aura Systems, Inc. Actuated mirror optical intensity modulation
US5185660A (en) * 1989-11-01 1993-02-09 Aura Systems, Inc. Actuated mirror optical intensity modulation
GB2239101B (en) * 1989-11-17 1993-09-22 Marconi Gec Ltd Optical device
US5085497A (en) * 1990-03-16 1992-02-04 Aura Systems, Inc. Method for fabricating mirror array for optical projection system
JP3148946B2 (ja) * 1991-05-30 2001-03-26 キヤノン株式会社 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US5159225A (en) * 1991-10-18 1992-10-27 Aura Systems, Inc. Piezoelectric actuator
US5175465A (en) * 1991-10-18 1992-12-29 Aura Systems, Inc. Piezoelectric and electrostrictive actuators
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
RU2141175C1 (ru) * 1993-11-09 1999-11-10 Дэу Электроникс Ко., Лтд. Тонкопленочная приводимая в действие зеркальная матрица для использования в оптической проекционной системе и способ ее изготовления
US5481396A (en) * 1994-02-23 1996-01-02 Aura Systems, Inc. Thin film actuated mirror array

Also Published As

Publication number Publication date
JPH10510931A (ja) 1998-10-20
US5706121A (en) 1998-01-06
MY113094A (en) 2001-11-30
EP0718658A1 (en) 1996-06-26
EP0718658B1 (en) 2001-06-13
CN1176727A (zh) 1998-03-18
AU703795B2 (en) 1999-04-01
MX9704519A (es) 1997-10-31
PE55296A1 (es) 1996-12-03
CZ188297A3 (cs) 1998-03-18
HUT77725A (hu) 1998-07-28
HU221359B1 (en) 2002-09-28
CA2208089A1 (en) 1996-06-27
PL178495B1 (pl) 2000-05-31
TW305945B (https=) 1997-05-21
DE69521283T2 (de) 2001-09-20
CN1070330C (zh) 2001-08-29
JP3523881B2 (ja) 2004-04-26
AR000913A1 (es) 1997-08-27
DE69521283D1 (de) 2001-07-19
PL320827A1 (en) 1997-11-10
RU2156487C2 (ru) 2000-09-20
KR960028118A (ko) 1996-07-22
BR9510206A (pt) 1997-11-04
AU3882095A (en) 1996-07-10
WO1996019896A1 (en) 1996-06-27

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