CZ188297A3 - Seskupení ovládaných zrcadel tenkého filmu, vytvářené při nízkých teplotách a způsob jeho výroby - Google Patents
Seskupení ovládaných zrcadel tenkého filmu, vytvářené při nízkých teplotách a způsob jeho výroby Download PDFInfo
- Publication number
- CZ188297A3 CZ188297A3 CZ971882A CZ188297A CZ188297A3 CZ 188297 A3 CZ188297 A3 CZ 188297A3 CZ 971882 A CZ971882 A CZ 971882A CZ 188297 A CZ188297 A CZ 188297A CZ 188297 A3 CZ188297 A3 CZ 188297A3
- Authority
- CZ
- Czechia
- Prior art keywords
- thin film
- layer
- electrode
- electrodispersing
- light reflecting
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 158
- 238000000034 method Methods 0.000 title claims description 29
- 239000011159 matrix material Substances 0.000 claims abstract description 21
- 239000000463 material Substances 0.000 claims description 37
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 230000003287 optical effect Effects 0.000 claims description 18
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 11
- 230000010287 polarization Effects 0.000 claims description 6
- 238000000059 patterning Methods 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 239000011787 zinc oxide Substances 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 102
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- 238000013532 laser treatment Methods 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- OYLRFHLPEAGKJU-UHFFFAOYSA-N phosphane silicic acid Chemical compound P.[Si](O)(O)(O)O OYLRFHLPEAGKJU-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- -1 polyamide Chemical compound 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000009718 spray deposition Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/904—Micromirror
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Optical Elements Other Than Lenses (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Bipolar Transistors (AREA)
- Electroluminescent Light Sources (AREA)
- Laminated Bodies (AREA)
- Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019940034972A KR100203577B1 (ko) | 1994-12-19 | 1994-12-19 | 광로조절장치와 그 제조방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CZ188297A3 true CZ188297A3 (cs) | 1998-03-18 |
Family
ID=19402117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CZ971882A CZ188297A3 (cs) | 1994-12-19 | 1995-11-22 | Seskupení ovládaných zrcadel tenkého filmu, vytvářené při nízkých teplotách a způsob jeho výroby |
Country Status (18)
| Country | Link |
|---|---|
| US (1) | US5706121A (https=) |
| EP (1) | EP0718658B1 (https=) |
| JP (1) | JP3523881B2 (https=) |
| KR (1) | KR100203577B1 (https=) |
| CN (1) | CN1070330C (https=) |
| AR (1) | AR000913A1 (https=) |
| AU (1) | AU703795B2 (https=) |
| BR (1) | BR9510206A (https=) |
| CA (1) | CA2208089A1 (https=) |
| CZ (1) | CZ188297A3 (https=) |
| DE (1) | DE69521283T2 (https=) |
| HU (1) | HU221359B1 (https=) |
| MY (1) | MY113094A (https=) |
| PE (1) | PE55296A1 (https=) |
| PL (1) | PL178495B1 (https=) |
| RU (1) | RU2156487C2 (https=) |
| TW (1) | TW305945B (https=) |
| WO (1) | WO1996019896A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5991064A (en) * | 1996-06-29 | 1999-11-23 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array and a method for the manufacture thereof |
| GB9625512D0 (en) * | 1996-12-09 | 1997-01-29 | Crosfield Electronics Ltd | Radiation beam scanning apparatus and method |
| RU2187212C2 (ru) * | 1997-05-27 | 2002-08-10 | Дэу Электроникс Ко., Лтд. | Способ изготовления матрицы управляемых тонкопленочных зеркал |
| US20060152830A1 (en) * | 2005-01-12 | 2006-07-13 | John Farah | Polyimide deformable mirror |
| AU2007290983A1 (en) * | 2006-08-31 | 2008-03-06 | Dynea Oy | Novel hybrid binder with natural compounds for low emission products |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3544201A (en) * | 1968-01-02 | 1970-12-01 | Gen Telephone & Elect | Optical beam deflector |
| EP0046873A1 (en) * | 1980-09-02 | 1982-03-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
| US4615595A (en) * | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
| US4793699A (en) * | 1985-04-19 | 1988-12-27 | Canon Kabushiki Kaisha | Projection apparatus provided with an electro-mechanical transducer element |
| US5172262A (en) * | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
| JPS63117671A (ja) * | 1986-10-31 | 1988-05-21 | Minolta Camera Co Ltd | バイモルフ駆動素子 |
| JPH088777B2 (ja) * | 1986-11-05 | 1996-01-29 | 三菱電機株式会社 | インバ−タ装置の制御回路 |
| US5126836A (en) * | 1989-11-01 | 1992-06-30 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
| US5185660A (en) * | 1989-11-01 | 1993-02-09 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
| GB2239101B (en) * | 1989-11-17 | 1993-09-22 | Marconi Gec Ltd | Optical device |
| US5085497A (en) * | 1990-03-16 | 1992-02-04 | Aura Systems, Inc. | Method for fabricating mirror array for optical projection system |
| JP3148946B2 (ja) * | 1991-05-30 | 2001-03-26 | キヤノン株式会社 | 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ |
| US5170283A (en) * | 1991-07-24 | 1992-12-08 | Northrop Corporation | Silicon spatial light modulator |
| US5159225A (en) * | 1991-10-18 | 1992-10-27 | Aura Systems, Inc. | Piezoelectric actuator |
| US5175465A (en) * | 1991-10-18 | 1992-12-29 | Aura Systems, Inc. | Piezoelectric and electrostrictive actuators |
| US5247222A (en) * | 1991-11-04 | 1993-09-21 | Engle Craig D | Constrained shear mode modulator |
| RU2141175C1 (ru) * | 1993-11-09 | 1999-11-10 | Дэу Электроникс Ко., Лтд. | Тонкопленочная приводимая в действие зеркальная матрица для использования в оптической проекционной системе и способ ее изготовления |
| US5481396A (en) * | 1994-02-23 | 1996-01-02 | Aura Systems, Inc. | Thin film actuated mirror array |
-
1994
- 1994-12-19 KR KR1019940034972A patent/KR100203577B1/ko not_active Expired - Fee Related
-
1995
- 1995-11-18 TW TW084112258A patent/TW305945B/zh active
- 1995-11-18 MY MYPI95003523A patent/MY113094A/en unknown
- 1995-11-22 RU RU97112466/09A patent/RU2156487C2/ru not_active IP Right Cessation
- 1995-11-22 WO PCT/KR1995/000153 patent/WO1996019896A1/en not_active Ceased
- 1995-11-22 EP EP95118378A patent/EP0718658B1/en not_active Expired - Lifetime
- 1995-11-22 JP JP51967796A patent/JP3523881B2/ja not_active Expired - Fee Related
- 1995-11-22 CN CN95196838A patent/CN1070330C/zh not_active Expired - Lifetime
- 1995-11-22 HU HU9800814A patent/HU221359B1/hu unknown
- 1995-11-22 BR BR9510206A patent/BR9510206A/pt not_active IP Right Cessation
- 1995-11-22 PL PL95320827A patent/PL178495B1/pl unknown
- 1995-11-22 DE DE69521283T patent/DE69521283T2/de not_active Expired - Lifetime
- 1995-11-22 CZ CZ971882A patent/CZ188297A3/cs unknown
- 1995-11-22 AU AU38820/95A patent/AU703795B2/en not_active Ceased
- 1995-11-22 CA CA002208089A patent/CA2208089A1/en not_active Abandoned
- 1995-11-23 AR ARP950100283A patent/AR000913A1/es unknown
- 1995-11-30 US US08/565,713 patent/US5706121A/en not_active Expired - Lifetime
- 1995-12-06 PE PE1995286536A patent/PE55296A1/es not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10510931A (ja) | 1998-10-20 |
| US5706121A (en) | 1998-01-06 |
| MY113094A (en) | 2001-11-30 |
| EP0718658A1 (en) | 1996-06-26 |
| EP0718658B1 (en) | 2001-06-13 |
| CN1176727A (zh) | 1998-03-18 |
| AU703795B2 (en) | 1999-04-01 |
| MX9704519A (es) | 1997-10-31 |
| PE55296A1 (es) | 1996-12-03 |
| KR100203577B1 (ko) | 1999-06-15 |
| HUT77725A (hu) | 1998-07-28 |
| HU221359B1 (en) | 2002-09-28 |
| CA2208089A1 (en) | 1996-06-27 |
| PL178495B1 (pl) | 2000-05-31 |
| TW305945B (https=) | 1997-05-21 |
| DE69521283T2 (de) | 2001-09-20 |
| CN1070330C (zh) | 2001-08-29 |
| JP3523881B2 (ja) | 2004-04-26 |
| AR000913A1 (es) | 1997-08-27 |
| DE69521283D1 (de) | 2001-07-19 |
| PL320827A1 (en) | 1997-11-10 |
| RU2156487C2 (ru) | 2000-09-20 |
| KR960028118A (ko) | 1996-07-22 |
| BR9510206A (pt) | 1997-11-04 |
| AU3882095A (en) | 1996-07-10 |
| WO1996019896A1 (en) | 1996-06-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1074548C (zh) | 制造具有最佳光效率的致动反射镜阵列的方法 | |
| CZ328097A3 (cs) | Seskupení ovládaných zrcadel tenkého filmu, používané v optických projekčních systémech | |
| AU693125B2 (en) | Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof | |
| AU693119B2 (en) | Thin film actuated mirror array and methods for its manufacture | |
| US5690839A (en) | Method for forming an array of thin film actuated mirrors | |
| CZ287202B6 (en) | Array of actuated mirrors intended particularly for use in optical projection systems and method for the manufacture thereof | |
| US5636070A (en) | Thin film actuated mirror array | |
| CZ148797A3 (en) | System of controlled mirrors with thin layers and process for producing thereof | |
| CN1062664C (zh) | 改进的制造薄膜可致动反射镜阵列的方法 | |
| CZ288251B6 (en) | Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof | |
| WO1998008127A1 (en) | Thin film actuated mirror array for use in an optical projection system | |
| CZ188297A3 (cs) | Seskupení ovládaných zrcadel tenkého filmu, vytvářené při nízkých teplotách a způsob jeho výroby | |
| US5701192A (en) | Thin film actuated mirror array and method of manufacturing the same | |
| CZ304197A3 (cs) | Seskupení ovládaných zrcadel tenkého filmu s dielektrickými vrstvami | |
| MXPA97004519A (en) | Formation of mirrors accessed by peliculelelade formed to low temperat | |
| US5683593A (en) | Method for manufacturing a thin film actuated mirror array | |
| AU717083B2 (en) | Thin film actuated mirror array for use in an optical projection system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PD00 | Pending as of 2000-06-30 in czech republic |