JPWO2024143380A5 - - Google Patents
Info
- Publication number
- JPWO2024143380A5 JPWO2024143380A5 JP2024567871A JP2024567871A JPWO2024143380A5 JP WO2024143380 A5 JPWO2024143380 A5 JP WO2024143380A5 JP 2024567871 A JP2024567871 A JP 2024567871A JP 2024567871 A JP2024567871 A JP 2024567871A JP WO2024143380 A5 JPWO2024143380 A5 JP WO2024143380A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- sic
- semiconductor device
- sic layer
- regions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022212615 | 2022-12-28 | ||
| PCT/JP2023/046701 WO2024143380A1 (ja) | 2022-12-28 | 2023-12-26 | ＳｉＣ半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2024143380A1 JPWO2024143380A1 (https=) | 2024-07-04 |
| JPWO2024143380A5 true JPWO2024143380A5 (https=) | 2025-09-11 |
Family
ID=91717771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024567871A Pending JPWO2024143380A1 (https=) | 2022-12-28 | 2023-12-26 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20250338546A1 (https=) |
| EP (1) | EP4645392A1 (https=) |
| JP (1) | JPWO2024143380A1 (https=) |
| CN (1) | CN120457786A (https=) |
| DE (1) | DE112023004902T5 (https=) |
| WO (1) | WO2024143380A1 (https=) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3634830B2 (ja) * | 2002-09-25 | 2005-03-30 | 株式会社東芝 | 電力用半導体素子 |
| US9768259B2 (en) | 2013-07-26 | 2017-09-19 | Cree, Inc. | Controlled ion implantation into silicon carbide using channeling and devices fabricated using controlled ion implantation into silicon carbide using channeling |
| JP7263178B2 (ja) * | 2019-08-02 | 2023-04-24 | 株式会社東芝 | 半導体装置、インバータ回路、駆動装置、車両、及び、昇降機 |
| JP7472477B2 (ja) * | 2019-12-02 | 2024-04-23 | 富士電機株式会社 | 炭化珪素半導体装置の製造方法および炭化珪素基板の製造方法 |
| JP7625833B2 (ja) * | 2020-11-18 | 2025-02-04 | 富士電機株式会社 | 炭化珪素半導体装置 |
| DE112021006730T5 (de) * | 2021-02-01 | 2023-10-12 | Rohm Co., Ltd. | Sic-halbleiterbauelement |
-
2023
- 2023-12-26 EP EP23912158.5A patent/EP4645392A1/en active Pending
- 2023-12-26 JP JP2024567871A patent/JPWO2024143380A1/ja active Pending
- 2023-12-26 WO PCT/JP2023/046701 patent/WO2024143380A1/ja not_active Ceased
- 2023-12-26 DE DE112023004902.5T patent/DE112023004902T5/de active Pending
- 2023-12-26 CN CN202380089479.8A patent/CN120457786A/zh active Pending
-
2025
- 2025-06-27 US US19/251,831 patent/US20250338546A1/en active Pending
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