JPWO2024142328A5 - - Google Patents

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Publication number
JPWO2024142328A5
JPWO2024142328A5 JP2024567103A JP2024567103A JPWO2024142328A5 JP WO2024142328 A5 JPWO2024142328 A5 JP WO2024142328A5 JP 2024567103 A JP2024567103 A JP 2024567103A JP 2024567103 A JP2024567103 A JP 2024567103A JP WO2024142328 A5 JPWO2024142328 A5 JP WO2024142328A5
Authority
JP
Japan
Prior art keywords
substrate
laser
optical system
starting substrate
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024567103A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024142328A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/048404 external-priority patent/WO2024142328A1/ja
Publication of JPWO2024142328A1 publication Critical patent/JPWO2024142328A1/ja
Publication of JPWO2024142328A5 publication Critical patent/JPWO2024142328A5/ja
Pending legal-status Critical Current

Links

JP2024567103A 2022-12-27 2022-12-27 Pending JPWO2024142328A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/048404 WO2024142328A1 (ja) 2022-12-27 2022-12-27 移送装置及び移送方法

Publications (2)

Publication Number Publication Date
JPWO2024142328A1 JPWO2024142328A1 (https=) 2024-07-04
JPWO2024142328A5 true JPWO2024142328A5 (https=) 2025-08-26

Family

ID=91716821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024567103A Pending JPWO2024142328A1 (https=) 2022-12-27 2022-12-27

Country Status (6)

Country Link
JP (1) JPWO2024142328A1 (https=)
KR (1) KR20250128973A (https=)
CN (1) CN120418937A (https=)
DE (1) DE112022008132T5 (https=)
TW (1) TW202427663A (https=)
WO (1) WO2024142328A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7744770B2 (en) * 2004-06-23 2010-06-29 Sony Corporation Device transfer method
JP2018060993A (ja) * 2016-09-29 2018-04-12 東レエンジニアリング株式会社 転写方法、実装方法、転写装置、及び実装装置
KR102475755B1 (ko) 2019-10-02 2022-12-09 에이피시스템 주식회사 칩 전사 방법 및 장치
WO2021193135A1 (ja) * 2020-03-23 2021-09-30 東レエンジニアリング株式会社 実装方法、実装装置、および転写装置
EP4375002A4 (en) 2021-07-20 2025-07-09 Shinetsu Chemical Co SCANNING-TYPE REDUCTION PROJECTION OPTICAL SYSTEM AND LASER MACHINING APPARATUS USING SAME

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