JPWO2022249397A5 - - Google Patents

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Publication number
JPWO2022249397A5
JPWO2022249397A5 JP2021576486A JP2021576486A JPWO2022249397A5 JP WO2022249397 A5 JPWO2022249397 A5 JP WO2022249397A5 JP 2021576486 A JP2021576486 A JP 2021576486A JP 2021576486 A JP2021576486 A JP 2021576486A JP WO2022249397 A5 JPWO2022249397 A5 JP WO2022249397A5
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Japan
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region
semiconductor device
trench
layer
cell region
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JP2021576486A
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English (en)
Japanese (ja)
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JPWO2022249397A1 (https=
JP7062143B1 (ja
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Priority claimed from PCT/JP2021/020212 external-priority patent/WO2022249397A1/ja
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Publication of JPWO2022249397A1 publication Critical patent/JPWO2022249397A1/ja
Publication of JPWO2022249397A5 publication Critical patent/JPWO2022249397A5/ja
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JP2021576486A 2021-05-27 2021-05-27 半導体装置及び電力変換装置 Active JP7062143B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/020212 WO2022249397A1 (ja) 2021-05-27 2021-05-27 半導体装置及び電力変換装置

Publications (3)

Publication Number Publication Date
JP7062143B1 JP7062143B1 (ja) 2022-05-02
JPWO2022249397A1 JPWO2022249397A1 (https=) 2022-12-01
JPWO2022249397A5 true JPWO2022249397A5 (https=) 2023-05-02

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ID=81452704

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Application Number Title Priority Date Filing Date
JP2021576486A Active JP7062143B1 (ja) 2021-05-27 2021-05-27 半導体装置及び電力変換装置

Country Status (5)

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US (1) US20240194780A1 (https=)
JP (1) JP7062143B1 (https=)
CN (1) CN117355945A (https=)
DE (1) DE112021007715T5 (https=)
WO (1) WO2022249397A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7682970B2 (ja) * 2023-10-05 2025-05-26 株式会社東芝 半導体装置及び製造方法
TWI901330B (zh) * 2024-09-03 2025-10-11 世界先進積體電路股份有限公司 半導體結構及其形成方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4500639B2 (ja) 2004-09-24 2010-07-14 トヨタ自動車株式会社 トレンチゲート型半導体装置およびその製造方法
JP5772842B2 (ja) * 2013-01-31 2015-09-02 株式会社デンソー 炭化珪素半導体装置
CN111712926B (zh) * 2018-02-19 2024-02-02 三菱电机株式会社 碳化硅半导体装置
WO2021014570A1 (ja) * 2019-07-23 2021-01-28 三菱電機株式会社 炭化珪素半導体装置、電力変換装置および炭化珪素半導体装置の製造方法
JP7257927B2 (ja) * 2019-09-19 2023-04-14 三菱電機株式会社 半導体装置

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