JPWO2022097456A5 - - Google Patents
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- JPWO2022097456A5 JPWO2022097456A5 JP2022560697A JP2022560697A JPWO2022097456A5 JP WO2022097456 A5 JPWO2022097456 A5 JP WO2022097456A5 JP 2022560697 A JP2022560697 A JP 2022560697A JP 2022560697 A JP2022560697 A JP 2022560697A JP WO2022097456 A5 JPWO2022097456 A5 JP WO2022097456A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holder
- vapor phase
- peripheral end
- inner peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020186828 | 2020-11-09 | ||
| JP2020186828 | 2020-11-09 | ||
| PCT/JP2021/038355 WO2022097456A1 (ja) | 2020-11-09 | 2021-10-18 | 気相成長装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022097456A1 JPWO2022097456A1 (https=) | 2022-05-12 |
| JPWO2022097456A5 true JPWO2022097456A5 (https=) | 2023-02-15 |
| JP7440660B2 JP7440660B2 (ja) | 2024-02-28 |
Family
ID=81406191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022560697A Active JP7440660B2 (ja) | 2020-11-09 | 2021-10-18 | 気相成長装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20230257904A1 (https=) |
| EP (1) | EP4243054A4 (https=) |
| JP (1) | JP7440660B2 (https=) |
| KR (1) | KR102669071B1 (https=) |
| CN (2) | CN216947286U (https=) |
| TW (1) | TWI796811B (https=) |
| WO (1) | WO2022097456A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT201900015416A1 (it) | 2019-09-03 | 2021-03-03 | St Microelectronics Srl | Apparecchio per la crescita di una fetta di materiale semiconduttore, in particolare di carburo di silicio, e procedimento di fabbricazione associato |
| EP4243054A4 (en) * | 2020-11-09 | 2024-11-13 | NuFlare Technology, Inc. | VAPOR PHASE GROWTH DEVICE |
| IT202000028778A1 (it) * | 2020-11-27 | 2022-05-27 | St Microelectronics Srl | Procedimento di fabbricazione di una fetta di sic con controllo dello stress residuo |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3004846B2 (ja) * | 1993-08-20 | 2000-01-31 | 東芝セラミックス株式会社 | 気相成長装置用サセプタ |
| JPH0758041A (ja) * | 1993-08-20 | 1995-03-03 | Toshiba Ceramics Co Ltd | サセプタ |
| JPH07161648A (ja) * | 1993-12-09 | 1995-06-23 | Toshiba Ceramics Co Ltd | サセプタ |
| JPH0963966A (ja) * | 1995-08-24 | 1997-03-07 | Toshiba Microelectron Corp | 気相成長装置 |
| KR100776515B1 (ko) * | 2000-12-28 | 2007-11-16 | 엘지.필립스 엘시디 주식회사 | 진공증착장치 |
| TWI354320B (en) * | 2006-02-21 | 2011-12-11 | Nuflare Technology Inc | Vopor phase deposition apparatus and support table |
| US8324063B2 (en) * | 2007-11-08 | 2012-12-04 | Sumco Corporation | Epitaxial film growing method, wafer supporting structure and susceptor |
| US9517539B2 (en) * | 2014-08-28 | 2016-12-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer susceptor with improved thermal characteristics |
| JP2018037537A (ja) * | 2016-08-31 | 2018-03-08 | 株式会社ニューフレアテクノロジー | 気相成長装置 |
| JP6740084B2 (ja) * | 2016-10-25 | 2020-08-12 | 株式会社ニューフレアテクノロジー | 気相成長装置、環状ホルダ、及び、気相成長方法 |
| JP6850590B2 (ja) * | 2016-11-17 | 2021-03-31 | 昭和電工株式会社 | 搭載プレート、ウェハ支持台、及び化学気相成長装置 |
| JP6789100B2 (ja) * | 2016-12-27 | 2020-11-25 | 昭和電工株式会社 | サセプタ、気相成長装置及び気相成長方法 |
| EP3678164A4 (en) * | 2017-09-01 | 2021-09-15 | NuFlare Technology, Inc. | STEAM PHASE GROWTH DEVICE AND STEAM PHASE GROWTH METHOD |
| TWI756496B (zh) * | 2017-11-27 | 2022-03-01 | 台灣積體電路製造股份有限公司 | 加熱台以及具有加熱台的設備 |
| EP4243054A4 (en) * | 2020-11-09 | 2024-11-13 | NuFlare Technology, Inc. | VAPOR PHASE GROWTH DEVICE |
-
2021
- 2021-10-18 EP EP21889009.3A patent/EP4243054A4/en active Pending
- 2021-10-18 JP JP2022560697A patent/JP7440660B2/ja active Active
- 2021-10-18 WO PCT/JP2021/038355 patent/WO2022097456A1/ja not_active Ceased
- 2021-10-18 KR KR1020237013987A patent/KR102669071B1/ko active Active
- 2021-10-27 TW TW110139772A patent/TWI796811B/zh active
- 2021-11-09 CN CN202122721446.1U patent/CN216947286U/zh not_active Withdrawn - After Issue
- 2021-11-09 CN CN202111317035.4A patent/CN114457416B/zh active Active
-
2023
- 2023-04-19 US US18/136,461 patent/US20230257904A1/en active Pending
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