JPWO2022054853A5 - - Google Patents
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- Publication number
- JPWO2022054853A5 JPWO2022054853A5 JP2022547634A JP2022547634A JPWO2022054853A5 JP WO2022054853 A5 JPWO2022054853 A5 JP WO2022054853A5 JP 2022547634 A JP2022547634 A JP 2022547634A JP 2022547634 A JP2022547634 A JP 2022547634A JP WO2022054853 A5 JPWO2022054853 A5 JP WO2022054853A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- carbon atoms
- protective film
- film
- substituted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020151888 | 2020-09-10 | ||
| JP2020151888 | 2020-09-10 | ||
| PCT/JP2021/033084 WO2022054853A1 (ja) | 2020-09-10 | 2021-09-09 | 薬液耐性保護膜 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022054853A1 JPWO2022054853A1 (https=) | 2022-03-17 |
| JPWO2022054853A5 true JPWO2022054853A5 (https=) | 2024-07-11 |
| JP7841430B2 JP7841430B2 (ja) | 2026-04-07 |
Family
ID=80631552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022547634A Active JP7841430B2 (ja) | 2020-09-10 | 2021-09-09 | 薬液耐性保護膜 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20230333470A1 (https=) |
| JP (1) | JP7841430B2 (https=) |
| KR (1) | KR20230066359A (https=) |
| CN (1) | CN116057103B (https=) |
| TW (1) | TW202225246A (https=) |
| WO (1) | WO2022054853A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20250016138A (ko) * | 2022-05-24 | 2025-02-03 | 닛산 가가쿠 가부시키가이샤 | 약액내성 보호막 |
| WO2023228661A1 (ja) * | 2022-05-24 | 2023-11-30 | 日産化学株式会社 | 薬液耐性保護膜 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4573050B2 (ja) * | 2006-07-21 | 2010-11-04 | 信越化学工業株式会社 | レジスト下層膜形成材料及びパターン形成方法 |
| JP4721978B2 (ja) * | 2006-08-01 | 2011-07-13 | 信越化学工業株式会社 | レジスト下層膜材料並びにそれを用いたレジスト下層膜基板およびパターン形成方法 |
| WO2008117619A1 (ja) * | 2007-03-26 | 2008-10-02 | Jsr Corporation | 感光性絶縁樹脂組成物 |
| CN107848926B (zh) * | 2015-08-18 | 2021-04-20 | Dic株式会社 | 酚醛清漆型含酚性羟基树脂以及抗蚀膜 |
| JP7196389B2 (ja) * | 2016-08-10 | 2022-12-27 | Jsr株式会社 | 半導体用レジスト下層膜形成組成物、レジスト下層膜、レジスト下層膜の形成方法及びパターニング基板の製造方法 |
| JP6718406B2 (ja) | 2017-03-31 | 2020-07-08 | 信越化学工業株式会社 | レジスト下層膜材料、パターン形成方法、及びレジスト下層膜形成方法 |
| CN110582728B (zh) * | 2017-05-02 | 2023-11-17 | 日产化学株式会社 | 耐受过氧化氢水溶液的保护膜形成用组合物 |
| US12044968B2 (en) * | 2019-01-21 | 2024-07-23 | Nissan Chemical Corporation | Protective film-forming composition having acetal structure and amide structure |
| WO2021200769A1 (ja) * | 2020-03-30 | 2021-10-07 | 日産化学株式会社 | 薬液耐性保護膜 |
-
2021
- 2021-09-09 WO PCT/JP2021/033084 patent/WO2022054853A1/ja not_active Ceased
- 2021-09-09 TW TW110133544A patent/TW202225246A/zh unknown
- 2021-09-09 US US18/025,336 patent/US20230333470A1/en active Pending
- 2021-09-09 KR KR1020237008506A patent/KR20230066359A/ko active Pending
- 2021-09-09 CN CN202180061886.9A patent/CN116057103B/zh active Active
- 2021-09-09 JP JP2022547634A patent/JP7841430B2/ja active Active
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