JPWO2021205958A5 - - Google Patents
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- JPWO2021205958A5 JPWO2021205958A5 JP2022514432A JP2022514432A JPWO2021205958A5 JP WO2021205958 A5 JPWO2021205958 A5 JP WO2021205958A5 JP 2022514432 A JP2022514432 A JP 2022514432A JP 2022514432 A JP2022514432 A JP 2022514432A JP WO2021205958 A5 JPWO2021205958 A5 JP WO2021205958A5
- Authority
- JP
- Japan
- Prior art keywords
- atom
- compound
- group
- general formula
- alkyl group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020070708 | 2020-04-10 | ||
| JP2020070708 | 2020-04-10 | ||
| PCT/JP2021/013898 WO2021205958A1 (ja) | 2020-04-10 | 2021-03-31 | アミジナート化合物、その二量体化合物、薄膜形成用原料及び薄膜の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021205958A1 JPWO2021205958A1 (https=) | 2021-10-14 |
| JPWO2021205958A5 true JPWO2021205958A5 (https=) | 2022-12-27 |
| JP7787806B2 JP7787806B2 (ja) | 2025-12-17 |
Family
ID=78023767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022514432A Active JP7787806B2 (ja) | 2020-04-10 | 2021-03-31 | アミジナート化合物、その二量体化合物、薄膜形成用原料及び薄膜の製造方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US12275748B2 (https=) |
| EP (1) | EP4134372A4 (https=) |
| JP (1) | JP7787806B2 (https=) |
| KR (1) | KR20220167299A (https=) |
| CN (1) | CN115380038A (https=) |
| IL (1) | IL297232B1 (https=) |
| TW (1) | TWI873328B (https=) |
| WO (1) | WO2021205958A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20240032935A (ko) * | 2021-07-12 | 2024-03-12 | 가부시키가이샤 아데카 | 코발트 화합물, 박막 형성용 원료, 박막 및 박막의 제조 방법 |
| WO2025132279A1 (en) | 2023-12-18 | 2025-06-26 | Merck Patent Gmbh | Group 13 metal compounds for ald applications |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE60330896D1 (de) * | 2002-11-15 | 2010-02-25 | Harvard College | Atomlagenabscheidung (ald) mit hilfe von metallamidinaten |
| WO2006012052A2 (en) * | 2004-06-25 | 2006-02-02 | Arkema, Inc. | Amidinate ligand containing chemical vapor deposition precursors |
| CN102993050A (zh) * | 2006-06-28 | 2013-03-27 | 哈佛学院院长等 | 四脒基金属(iv)化合物及其在气相沉积中的用途 |
| EP3539973A4 (en) | 2016-11-08 | 2020-05-06 | Adeka Corporation | CONNECTION, STARTING MATERIAL FOR FORMING A THIN LAYER, METHOD FOR PRODUCING IT AND AMIDINE CONNECTION |
-
2021
- 2021-03-31 KR KR1020227038495A patent/KR20220167299A/ko active Pending
- 2021-03-31 WO PCT/JP2021/013898 patent/WO2021205958A1/ja not_active Ceased
- 2021-03-31 IL IL297232A patent/IL297232B1/en unknown
- 2021-03-31 US US17/917,671 patent/US12275748B2/en active Active
- 2021-03-31 EP EP21783689.9A patent/EP4134372A4/en active Pending
- 2021-03-31 CN CN202180027605.8A patent/CN115380038A/zh active Pending
- 2021-03-31 JP JP2022514432A patent/JP7787806B2/ja active Active
- 2021-04-08 TW TW110112649A patent/TWI873328B/zh active
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