JP2019502023A5 - - Google Patents
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- Publication number
- JP2019502023A5 JP2019502023A5 JP2018531355A JP2018531355A JP2019502023A5 JP 2019502023 A5 JP2019502023 A5 JP 2019502023A5 JP 2018531355 A JP2018531355 A JP 2018531355A JP 2018531355 A JP2018531355 A JP 2018531355A JP 2019502023 A5 JP2019502023 A5 JP 2019502023A5
- Authority
- JP
- Japan
- Prior art keywords
- transition metal
- precursor
- daughter
- solution
- reactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1562862 | 2015-12-18 | ||
| FR1562862A FR3045673B1 (fr) | 2015-12-18 | 2015-12-18 | Procede de depot d'un revetement par dli-mocvd avec recyclage du compose precurseur |
| PCT/FR2016/053541 WO2017103546A1 (fr) | 2015-12-18 | 2016-12-17 | Procede de depot d'un revetement par dli-mocvd avec recyclage direct du compose precurseur |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019502023A JP2019502023A (ja) | 2019-01-24 |
| JP2019502023A5 true JP2019502023A5 (https=) | 2020-03-19 |
| JP6997711B2 JP6997711B2 (ja) | 2022-02-04 |
Family
ID=55948887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018531355A Active JP6997711B2 (ja) | 2015-12-18 | 2016-12-17 | プリカーサ化合物の再利用を伴うｄｌｉ－ｍｏｃｖｄによる皮膜の成膜方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US20190003048A1 (https=) |
| EP (1) | EP3390686B1 (https=) |
| JP (1) | JP6997711B2 (https=) |
| KR (1) | KR20180089515A (https=) |
| FR (1) | FR3045673B1 (https=) |
| RU (1) | RU2699126C1 (https=) |
| WO (1) | WO2017103546A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3520118B1 (fr) | 2016-09-28 | 2020-08-05 | Commissariat à l'Énergie Atomique et aux Énergies Alternatives | Composant nucléaire avec revetement de cr metastable, procédé de fabrication par dli-mocvd et utilisations contre l'oxydation/hydruration |
| EP3520119B1 (fr) | 2016-09-28 | 2020-07-29 | Commissariat à l'Énergie Atomique et aux Énergies Alternatives | Composant nucléaire composite, procédé de fabrication par dli-mocvd et utilisations contre l'oxydation/hydruration |
| WO2018060642A1 (fr) | 2016-09-28 | 2018-04-05 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Composant nucléaire avec revetement de crc amorphe, procédé de fabrication par dli-mocvd et utilisations contre l'oxydation/hydruration |
| EP3519604B1 (fr) | 2016-09-28 | 2020-07-29 | Commissariat à l'Énergie Atomique et aux Énergies Alternatives | Composant nucléaire a substrat metallique, procédé de fabrication par dli-mocvd et utilisations contre l'oxydation/hydruration |
| US11560625B2 (en) | 2018-01-19 | 2023-01-24 | Entegris, Inc. | Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum precursor |
| EP3847294A4 (en) * | 2018-09-03 | 2022-06-01 | Applied Materials, Inc. | DIRECT LIQUID INJECTION SYSTEM FOR THIN FILM DEPOSITION |
| FR3114588B1 (fr) * | 2020-09-29 | 2023-08-11 | Safran Ceram | Procédé de fabrication d’une barrière environnementale |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1453950A1 (ru) * | 1987-01-07 | 1994-06-30 | А.И. Костылев | Парогазовая смесь для пиролитического нанесения защитных покрытий на основе хрома |
| FR2643071B1 (fr) * | 1989-02-16 | 1993-05-07 | Unirec | Procede de depot en phase vapeur a basse temperature d'un revetement ceramique du type nitrure ou carbonitrure metallique |
| SU1759958A1 (ru) * | 1990-04-19 | 1992-09-07 | Дзержинский филиал Ленинградского научно-исследовательского и конструкторского института химического машиностроения | Способ нанесени пиролитического карбидохромового покрыти на металлические поверхности |
| JPH0412525A (ja) * | 1990-05-02 | 1992-01-17 | Babcock Hitachi Kk | 有機金属化学気相成長装置 |
| DE602004026889D1 (de) * | 2003-09-19 | 2010-06-10 | Akzo Nobel Nv | Metallisierung von substrat(en) durch ein flüssigkeit/ - dampfabscheidungsverfahren |
| KR101388817B1 (ko) * | 2006-03-14 | 2014-04-23 | 프랙스에어 테크놀로지, 인코포레이티드 | 증착 방법을 위한 온도 제어 콜드 트랩 및 그의 용도 |
| FR2904006B1 (fr) * | 2006-07-21 | 2008-10-31 | Toulouse Inst Nat Polytech | Procede de depot de revetements metalliques durs |
| FR2904007B1 (fr) * | 2006-07-21 | 2008-11-21 | Toulouse Inst Nat Polytech | Procede de depot de revetements ceramiques non oxydes. |
| JP5277784B2 (ja) | 2008-08-07 | 2013-08-28 | 東京エレクトロン株式会社 | 原料回収方法、トラップ機構、排気系及びこれを用いた成膜装置 |
| RU2513496C2 (ru) * | 2012-05-31 | 2014-04-20 | Федеральное государственное унитарное предприятие "Научно-производственное объединение "Радиевый институт имени В.Г. Хлопина" | Износостойкое металлическое покрытие на основе хрома и способ его нанесения |
| WO2014074589A1 (en) * | 2012-11-06 | 2014-05-15 | Applied Materials, Inc. | Apparatus for spatial atomic layer deposition with recirculation and methods of use |
| JP6101958B2 (ja) * | 2013-02-13 | 2017-03-29 | 日本パイオニクス株式会社 | アンモニア及び水素の回収方法及び再利用方法 |
| JP2015151564A (ja) * | 2014-02-13 | 2015-08-24 | 東洋製罐グループホールディングス株式会社 | 原子層堆積成膜装置 |
-
2015
- 2015-12-18 FR FR1562862A patent/FR3045673B1/fr active Active
-
2016
- 2016-12-17 EP EP16831495.3A patent/EP3390686B1/fr active Active
- 2016-12-17 US US16/063,405 patent/US20190003048A1/en not_active Abandoned
- 2016-12-17 RU RU2018125304A patent/RU2699126C1/ru not_active IP Right Cessation
- 2016-12-17 JP JP2018531355A patent/JP6997711B2/ja active Active
- 2016-12-17 WO PCT/FR2016/053541 patent/WO2017103546A1/fr not_active Ceased
- 2016-12-17 KR KR1020187020519A patent/KR20180089515A/ko not_active Ceased
-
2019
- 2019-10-31 US US16/669,854 patent/US11142822B2/en active Active
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