JP2017525840A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2017525840A5 JP2017525840A5 JP2016572630A JP2016572630A JP2017525840A5 JP 2017525840 A5 JP2017525840 A5 JP 2017525840A5 JP 2016572630 A JP2016572630 A JP 2016572630A JP 2016572630 A JP2016572630 A JP 2016572630A JP 2017525840 A5 JP2017525840 A5 JP 2017525840A5
- Authority
- JP
- Japan
- Prior art keywords
- precursor composition
- liquid precursor
- film
- metal
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2014-0072274 | 2014-06-13 | ||
| KR20140072274 | 2014-06-13 | ||
| PCT/KR2015/005945 WO2015190871A1 (en) | 2014-06-13 | 2015-06-12 | Liquid precursor compositions, preparation methods thereof, and methods for forming layer using the composition |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017525840A JP2017525840A (ja) | 2017-09-07 |
| JP2017525840A5 true JP2017525840A5 (https=) | 2018-07-19 |
| JP6635950B2 JP6635950B2 (ja) | 2020-01-29 |
Family
ID=54833872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016572630A Active JP6635950B2 (ja) | 2014-06-13 | 2015-06-12 | 液体前駆体組成物、その製造方法、及び前記組成物を利用した膜の形成方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US10014089B2 (https=) |
| JP (1) | JP6635950B2 (https=) |
| KR (2) | KR101936162B1 (https=) |
| CN (1) | CN106460169B (https=) |
| TW (1) | TWI682051B (https=) |
| WO (1) | WO2015190871A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102487441B1 (ko) * | 2014-09-14 | 2023-01-12 | 엔테그리스, 아이엔씨. | 구리 및 유전체 상의 코발트 침착 선택성 |
| TWI736631B (zh) * | 2016-06-06 | 2021-08-21 | 韋恩州立大學 | 二氮雜二烯錯合物與胺類的反應 |
| US11078224B2 (en) * | 2017-04-07 | 2021-08-03 | Applied Materials, Inc. | Precursors for the atomic layer deposition of transition metals and methods of use |
| KR102103346B1 (ko) * | 2017-11-15 | 2020-04-22 | 에스케이트리켐 주식회사 | 박막 증착용 전구체 용액 및 이를 이용한 박막 형성 방법. |
| KR102123331B1 (ko) * | 2018-12-19 | 2020-06-17 | 주식회사 한솔케미칼 | 코발트 전구체, 이의 제조방법 및 이를 이용한 박막의 제조방법 |
| WO2022211218A1 (ko) | 2021-04-02 | 2022-10-06 | 한국과학기술원 | 액체금속 전구체 용액, 이를 이용한 금속막 제조방법 및 이를 포함하는 전자소자 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006000823A1 (de) * | 2006-01-05 | 2007-07-12 | H. C. Starck Gmbh & Co. Kg | Wolfram- und Molybdän-Verbindungen und ihre Verwendung für die Chemical Vapour Deposition (CVD) |
| US8636845B2 (en) * | 2008-06-25 | 2014-01-28 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Metal heterocyclic compounds for deposition of thin films |
| US8485738B2 (en) * | 2009-07-31 | 2013-07-16 | Hewlett-Packard Development Company, L.P. | Optical fiber connector |
| US9255327B2 (en) * | 2010-08-24 | 2016-02-09 | Wayne State University | Thermally stable volatile precursors |
| US9822446B2 (en) * | 2010-08-24 | 2017-11-21 | Wayne State University | Thermally stable volatile precursors |
| US9353437B2 (en) * | 2010-11-17 | 2016-05-31 | Up Chemical Co., Ltd. | Diazadiene-based metal compound, method for preparing same and method for forming a thin film using same |
| US20140235054A1 (en) | 2011-09-27 | 2014-08-21 | L'Air Liquide, Société Änonyme pour I'Etude et I'Exploitation des Procédés Georges Glaude | Tungsten diazabutadiene precursors, their synthesis, and their use for tungsten containing film depositions |
| WO2013046157A1 (en) * | 2011-09-27 | 2013-04-04 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Nickel bis diazabutadiene precursors, their synthesis, and their use for nickel containing film depositions |
| KR101822884B1 (ko) | 2013-05-24 | 2018-01-29 | 주식회사 유피케미칼 | 텅스텐 화합물을 이용한 텅스텐-함유 막의 증착 방법 및 상기 텅스텐 화합물을 포함하는 텅스텐-함유 막 증착용 전구체 조성물 |
| US9067958B2 (en) * | 2013-10-14 | 2015-06-30 | Intel Corporation | Scalable and high yield synthesis of transition metal bis-diazabutadienes |
| US9236292B2 (en) * | 2013-12-18 | 2016-01-12 | Intel Corporation | Selective area deposition of metal films by atomic layer deposition (ALD) and chemical vapor deposition (CVD) |
-
2015
- 2015-06-12 KR KR1020167012801A patent/KR101936162B1/ko active Active
- 2015-06-12 JP JP2016572630A patent/JP6635950B2/ja active Active
- 2015-06-12 KR KR1020167001280A patent/KR20160017094A/ko not_active Withdrawn
- 2015-06-12 WO PCT/KR2015/005945 patent/WO2015190871A1/en not_active Ceased
- 2015-06-12 CN CN201580031286.2A patent/CN106460169B/zh active Active
- 2015-06-15 TW TW104119200A patent/TWI682051B/zh active
-
2016
- 2016-06-30 US US15/199,705 patent/US10014089B2/en active Active
-
2018
- 2018-06-07 US US16/002,304 patent/US10763001B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2017525840A5 (https=) | ||
| CN106029679B (zh) | 新环二硅氮烷衍生物、其制备方法以及使用其的含硅薄膜 | |
| JP2020501373A5 (https=) | ||
| TW201002855A (en) | Preparation of lanthanide-containing precursors and deposition of lanthanide-containing films | |
| JP2015159306A5 (https=) | ||
| JP6635950B2 (ja) | 液体前駆体組成物、その製造方法、及び前記組成物を利用した膜の形成方法 | |
| KR102763981B1 (ko) | 몰리브데늄 전구체 화합물, 이의 제조방법, 및 이를 이용한 몰리브데늄-함유 막의 증착 방법 | |
| JP2012006858A (ja) | 化学蒸着用の有機ルテニウム化合物及び該有機ルテニウム化合物を用いた化学蒸着方法 | |
| EP3348667A1 (en) | Chemical vapor deposition feedstock comprising organic ruthenium compound and chemical vapor deposition method using said chemical vapor deposition feedstock | |
| KR20170026426A (ko) | 신규한 트리실릴아민 유도체, 이의 제조방법 및 이를 이용한 실리콘 함유 박막 | |
| TWI579397B (zh) | 製造含鎳薄膜的方法 | |
| IL275283B1 (en) | Process for the generation of metal-containing films | |
| JP2014037390A (ja) | ルテニウム錯体からなる化学蒸着原料及びその製造方法並びに化学蒸着方法 | |
| JP2019502023A5 (https=) | ||
| JP2017511308A (ja) | 有機ゲルマニウムアミン化合物、及びそれを利用した薄膜蒸着方法 | |
| JP2018536771A (ja) | 金属膜の生成方法 | |
| JP5156120B1 (ja) | 有機白金化合物からなる化学蒸着用原料及び該化学蒸着用原料を用いた化学蒸着法 | |
| JP6332682B2 (ja) | ヒドロシラン化合物の製造方法 | |
| Ming et al. | Synthesis, crystal structures, luminescence properties of two metal coordination polymers derived from 5-substituted isophthalate and flexible bis (triazole) ligands | |
| JP7698807B2 (ja) | 第４族金属元素含有前駆体化合物を含む成膜用組成物、及び、それを用いた膜を形成する方法 | |
| CN116529417A (zh) | 新型化合物、包含其的前体组合物和利用其的薄膜的制造方法 | |
| KR20180115382A (ko) | 신규한 텅스텐 전구체 화합물 및 이를 이용한 박막 형성 방법 | |
| TWI761257B (zh) | 有機金屬化合物、含有機金屬化合物之前驅組合物及用其製造薄膜的方法 | |
| KR101965217B1 (ko) | 탄탈럼 화합물, 이의 제조 방법, 이를 포함하는 막 증착용 전구체 조성물, 및 이를 이용하는 막의 증착 방법 | |
| KR102129055B1 (ko) | 지르코늄 아미노알콕사이드계 전구체, 이의 제조방법, 및 이를 이용하여 박막을 형성하는 방법 |