JPWO2021064816A5 - - Google Patents
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- JPWO2021064816A5 JPWO2021064816A5 JP2021550771A JP2021550771A JPWO2021064816A5 JP WO2021064816 A5 JPWO2021064816 A5 JP WO2021064816A5 JP 2021550771 A JP2021550771 A JP 2021550771A JP 2021550771 A JP2021550771 A JP 2021550771A JP WO2021064816 A5 JPWO2021064816 A5 JP WO2021064816A5
- Authority
- JP
- Japan
- Prior art keywords
- base substrate
- alignment layer
- content
- substrate according
- atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/038598 WO2021064816A1 (ja) | 2019-09-30 | 2019-09-30 | 下地基板及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021064816A1 JPWO2021064816A1 (https=) | 2021-04-08 |
| JPWO2021064816A5 true JPWO2021064816A5 (https=) | 2022-06-09 |
| JP7320070B2 JP7320070B2 (ja) | 2023-08-02 |
Family
ID=75337797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021550771A Active JP7320070B2 (ja) | 2019-09-30 | 2019-09-30 | 下地基板及びその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7320070B2 (https=) |
| WO (1) | WO2021064816A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117976521B (zh) * | 2024-03-28 | 2024-06-04 | 天津工业大学 | 一种亚稳相氧化镓膜异质外延生长方法及装置 |
| WO2025203519A1 (ja) * | 2024-03-28 | 2025-10-02 | 日本碍子株式会社 | 半導体膜、複合膜、及び半導体膜付き下地基板 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3079509B2 (ja) * | 1992-03-11 | 2000-08-21 | 日立建機株式会社 | 薄膜積層結晶体およびその製造方法 |
| AU2007306494B2 (en) * | 2006-10-10 | 2012-05-31 | Oerlikon Trading Ag, Truebbach | Layer system having at least one mixed crystal layer of a polyoxide |
| JP5343224B1 (ja) | 2012-09-28 | 2013-11-13 | Ｒｏｃａ株式会社 | 半導体装置および結晶 |
-
2019
- 2019-09-30 JP JP2021550771A patent/JP7320070B2/ja active Active
- 2019-09-30 WO PCT/JP2019/038598 patent/WO2021064816A1/ja not_active Ceased
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