JPWO2021064816A1 - - Google Patents
Info
- Publication number
- JPWO2021064816A1 JPWO2021064816A1 JP2021550771A JP2021550771A JPWO2021064816A1 JP WO2021064816 A1 JPWO2021064816 A1 JP WO2021064816A1 JP 2021550771 A JP2021550771 A JP 2021550771A JP 2021550771 A JP2021550771 A JP 2021550771A JP WO2021064816 A1 JPWO2021064816 A1 JP WO2021064816A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/038598 WO2021064816A1 (ja) | 2019-09-30 | 2019-09-30 | 下地基板及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021064816A1 true JPWO2021064816A1 (https=) | 2021-04-08 |
| JPWO2021064816A5 JPWO2021064816A5 (https=) | 2022-06-09 |
| JP7320070B2 JP7320070B2 (ja) | 2023-08-02 |
Family
ID=75337797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021550771A Active JP7320070B2 (ja) | 2019-09-30 | 2019-09-30 | 下地基板及びその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7320070B2 (https=) |
| WO (1) | WO2021064816A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025203519A1 (ja) * | 2024-03-28 | 2025-10-02 | 日本碍子株式会社 | 半導体膜、複合膜、及び半導体膜付き下地基板 |
| CN117976521B (zh) * | 2024-03-28 | 2024-06-04 | 天津工业大学 | 一种亚稳相氧化镓膜异质外延生长方法及装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05254991A (ja) * | 1992-03-11 | 1993-10-05 | Hitachi Constr Mach Co Ltd | 薄膜積層結晶体およびその製造方法 |
| JP2010506049A (ja) * | 2006-10-10 | 2010-02-25 | エーリコン・トレイディング・アーゲー・トリューバッハ | 少なくとも１つの複酸化物混合結晶皮膜を有する皮膜システム |
| JP2014072463A (ja) * | 2012-09-28 | 2014-04-21 | Roca Kk | 半導体装置および結晶 |
-
2019
- 2019-09-30 WO PCT/JP2019/038598 patent/WO2021064816A1/ja not_active Ceased
- 2019-09-30 JP JP2021550771A patent/JP7320070B2/ja active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05254991A (ja) * | 1992-03-11 | 1993-10-05 | Hitachi Constr Mach Co Ltd | 薄膜積層結晶体およびその製造方法 |
| JP2010506049A (ja) * | 2006-10-10 | 2010-02-25 | エーリコン・トレイディング・アーゲー・トリューバッハ | 少なくとも１つの複酸化物混合結晶皮膜を有する皮膜システム |
| JP2014072463A (ja) * | 2012-09-28 | 2014-04-21 | Roca Kk | 半導体装置および結晶 |
Non-Patent Citations (2)
| Title |
|---|
| JINNO, RIENA, ET AL.: "Reduction in edge dislocation density in corundum-structured α-Ga2O3 layers on sapphire substrates", APPLIED PHYSICS EXPRESS, vol. 9, JPN6018028227, 2016, pages 071101 - 1, ISSN: 0005029596 * |
| 金子健太郎: "コランダム構造酸化ガリウム系混晶薄膜の成長と物性", 京都大学学術情報リポジトリ 学位論文 博士(工学）, vol. 報告番号：甲第１７５７３号, JPN6019045741, 31 January 2014 (2014-01-31), pages 9 - 15, ISSN: 0005029595 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021064816A1 (ja) | 2021-04-08 |
| JP7320070B2 (ja) | 2023-08-02 |
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