JPWO2020235091A5 - - Google Patents

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JPWO2020235091A5
JPWO2020235091A5 JP2021520016A JP2021520016A JPWO2020235091A5 JP WO2020235091 A5 JPWO2020235091 A5 JP WO2020235091A5 JP 2021520016 A JP2021520016 A JP 2021520016A JP 2021520016 A JP2021520016 A JP 2021520016A JP WO2020235091 A5 JPWO2020235091 A5 JP WO2020235091A5
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particle beam
charged particle
image
sample
angle
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JP2021520016A
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Japanese (ja)
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JPWO2020235091A1 (https=
JP7168777B2 (ja
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Priority claimed from PCT/JP2019/020503 external-priority patent/WO2020235091A1/ja
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JP2021520016A 2019-05-23 2019-05-23 荷電粒子線装置及び荷電粒子線装置の制御方法 Active JP7168777B2 (ja)

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Application Number Priority Date Filing Date Title
PCT/JP2019/020503 WO2020235091A1 (ja) 2019-05-23 2019-05-23 荷電粒子線装置及び荷電粒子線装置の制御方法

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JPWO2020235091A1 JPWO2020235091A1 (https=) 2020-11-26
JPWO2020235091A5 true JPWO2020235091A5 (https=) 2022-01-14
JP7168777B2 JP7168777B2 (ja) 2022-11-09

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US (1) US11791131B2 (https=)
JP (1) JP7168777B2 (https=)
WO (1) WO2020235091A1 (https=)

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Publication number Priority date Publication date Assignee Title
WO2020235091A1 (ja) * 2019-05-23 2020-11-26 株式会社日立ハイテク 荷電粒子線装置及び荷電粒子線装置の制御方法
FR3103897B1 (fr) * 2019-12-02 2022-04-01 Safran Dispositif et procédé de mesure des angles d’orientation d’un système d’imagerie x
JP2024134459A (ja) * 2023-03-20 2024-10-03 キオクシア株式会社 電子顕微鏡、及び、結晶評価方法

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JP3422045B2 (ja) * 1993-06-21 2003-06-30 株式会社日立製作所 組成及び格子歪測定用電子顕微鏡及びその観察方法
JPH08106873A (ja) * 1994-10-04 1996-04-23 Hitachi Ltd 電子顕微鏡装置
JP5268324B2 (ja) 2007-10-29 2013-08-21 株式会社日立ハイテクノロジーズ 荷電粒子線顕微装置及び顕微方法
JP5315906B2 (ja) 2008-10-03 2013-10-16 富士通株式会社 電子線装置及びその補正方法、並びに補正用基板
US9103769B2 (en) * 2009-12-15 2015-08-11 The Regents Of The University Of California Apparatus and methods for controlling electron microscope stages
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US9978557B2 (en) * 2016-04-21 2018-05-22 Fei Company System for orienting a sample using a diffraction pattern
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DE102020203580B4 (de) * 2020-03-20 2021-10-07 Carl Zeiss Microscopy Gmbh Verfahren zum Ändern der Raum-Orientierung einer Mikroprobe in einem Mikroskop-System, sowie Computerprogrammprodukt
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