JPWO2020102266A5 - - Google Patents

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Publication number
JPWO2020102266A5
JPWO2020102266A5 JP2021526292A JP2021526292A JPWO2020102266A5 JP WO2020102266 A5 JPWO2020102266 A5 JP WO2020102266A5 JP 2021526292 A JP2021526292 A JP 2021526292A JP 2021526292 A JP2021526292 A JP 2021526292A JP WO2020102266 A5 JPWO2020102266 A5 JP WO2020102266A5
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Japan
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light
collection
sample
wave plate
pupil plane
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JP2021526292A
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Japanese (ja)
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JP2022509599A (ja
JP7254177B2 (ja
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Priority claimed from US16/577,089 external-priority patent/US10942135B2/en
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Priority to JP2023031193A priority Critical patent/JP7438424B2/ja
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JP2021526292A 2018-11-14 2019-11-13 粒子検出のためのラジアル偏光子 Active JP7254177B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023031193A JP7438424B2 (ja) 2018-11-14 2023-03-01 粒子検出のためのシステム及び方法

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862767246P 2018-11-14 2018-11-14
US62/767,246 2018-11-14
US16/577,089 US10942135B2 (en) 2018-11-14 2019-09-20 Radial polarizer for particle detection
US16/577,089 2019-09-20
PCT/US2019/061059 WO2020102266A1 (en) 2018-11-14 2019-11-13 Radial polarizer for particle detection

Related Child Applications (1)

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JP2023031193A Division JP7438424B2 (ja) 2018-11-14 2023-03-01 粒子検出のためのシステム及び方法

Publications (3)

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JP2022509599A JP2022509599A (ja) 2022-01-21
JPWO2020102266A5 true JPWO2020102266A5 (zh) 2022-11-18
JP7254177B2 JP7254177B2 (ja) 2023-04-07

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JP2021526292A Active JP7254177B2 (ja) 2018-11-14 2019-11-13 粒子検出のためのラジアル偏光子
JP2023031193A Active JP7438424B2 (ja) 2018-11-14 2023-03-01 粒子検出のためのシステム及び方法

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Country Status (6)

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US (1) US10942135B2 (zh)
JP (2) JP7254177B2 (zh)
KR (1) KR102518212B1 (zh)
CN (2) CN115060730A (zh)
TW (1) TWI809209B (zh)
WO (1) WO2020102266A1 (zh)

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US11264200B1 (en) * 2020-09-23 2022-03-01 Fei Company Lamella alignment based on a reconstructed volume
US11879853B2 (en) 2021-02-19 2024-01-23 Kla Corporation Continuous degenerate elliptical retarder for sensitive particle detection

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