JPWO2019239672A1 - 保管棚 - Google Patents
保管棚 Download PDFInfo
- Publication number
- JPWO2019239672A1 JPWO2019239672A1 JP2020525273A JP2020525273A JPWO2019239672A1 JP WO2019239672 A1 JPWO2019239672 A1 JP WO2019239672A1 JP 2020525273 A JP2020525273 A JP 2020525273A JP 2020525273 A JP2020525273 A JP 2020525273A JP WO2019239672 A1 JPWO2019239672 A1 JP WO2019239672A1
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- JP
- Japan
- Prior art keywords
- supply
- pipe
- shelf board
- supply pipe
- shelf
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/14—Stack holders or separators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Liquid Crystal (AREA)
- Centrifugal Separators (AREA)
- Valve-Gear Or Valve Arrangements (AREA)
Abstract
Description
上記実施形態では、一つの棚板20に一つの供給ノズル31が設けられている構成の保管棚1を例に挙げて説明したが、一つの棚板20に複数の供給ノズルと複数の供給管とが設けられる構成の保管棚1であってもよい。例えば、図5に示されるように、変形例1に係る保管棚1の棚板20には、三つの供給ノズル31,131,231と、当該三つの供給ノズル31,131,231のそれぞれにガスを供給する三つの供給管33,133,233が設けられてもよい。Z方向から見た平面視において、三つの供給管33,133,233は、平面的に重ならないように配置されている。
上記変形例1では、三つの供給ノズル31,131,231を配置する場合、三つの供給ノズル31,131,231にそれぞれ接続される可撓性の供給管33,133,233を設ける例を挙げて説明したが、これに限定されない。例えば、図6に示されるように、変形例2に係る保管棚1の棚板20には、三つの供給ノズル31,131,231と、供給ノズル31にガスを供給する供給管33と、二つの供給ノズル131,231にガスを供給する供給管133が設けられてもよい。Z方向から見た平面視において、二つの供給管33,133は、平面的に重ならないように配置されている。
上記実施形態では、供給管33の一端33aを供給ノズル31の接続部31bに直接接続する例を挙げて説明したが、任意の角度(例えば、90度)に曲がるエルボ継手を介して接続してもよい。これにより、可撓性の供給管33では対応できないような配置にも対応することが可能になる。
Claims (6)
- 本体フレームと、前記本体フレームに弾性体を介して取り付けられる棚板と、を備え、被格納物が格納される容器を保管する保管棚であって、
前記棚板に設けられ、前記容器にガスを供給する供給ノズルと、
前記供給ノズルに連通する一端と、前記棚板とは別体の支持部によって支持されると共に前記容器に供給するガスの供給源に接続されている主管に連通する他端と、を有する供給管と、を備え、
前記供給管は、前記一端から前記他端までの間の少なくとも一部に可撓性のある可撓部を有している、保管棚。 - 前記支持部は、前記本体フレームである、請求項1記載の保管棚。
- 前記棚板は、平面視において矩形形状を有しており、
前記供給ノズルは、前記棚板の一のコーナー部に配置されており、
前記供給管の他端は、前記棚板の一のコーナー部の対角に相当する他のコーナー部に配置されている、請求項1又は2記載の保管棚。 - 前記供給管は、前記一端の軸方向と前記他端の軸方向とが互いに直交すると共に、前記一端と前記他端との間に曲線部を有している、請求項1〜3の何れか一項記載の保管棚。
- 前記供給管は、水平方向に沿って配置されている、請求項1〜4の何れか一項記載の保管棚。
- 前記本体フレームに支持されると共に、前記主管と前記供給管の他端との間に設けられるフィルタを更に備える、請求項1又は2記載の保管棚。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018114816 | 2018-06-15 | ||
JP2018114816 | 2018-06-15 | ||
PCT/JP2019/012222 WO2019239672A1 (ja) | 2018-06-15 | 2019-03-22 | 保管棚 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2019239672A1 true JPWO2019239672A1 (ja) | 2021-04-22 |
JP6984748B2 JP6984748B2 (ja) | 2021-12-22 |
Family
ID=68842876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020525273A Active JP6984748B2 (ja) | 2018-06-15 | 2019-03-22 | 保管棚 |
Country Status (9)
Country | Link |
---|---|
US (1) | US11990356B2 (ja) |
EP (1) | EP3809454B1 (ja) |
JP (1) | JP6984748B2 (ja) |
KR (1) | KR102453738B1 (ja) |
CN (1) | CN112262465B (ja) |
IL (1) | IL279318A (ja) |
SG (1) | SG11202012260RA (ja) |
TW (1) | TWI816810B (ja) |
WO (1) | WO2019239672A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116868325A (zh) * | 2021-02-24 | 2023-10-10 | 村田机械株式会社 | 清洗装置 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0192240U (ja) * | 1987-12-10 | 1989-06-16 | ||
JP2001338971A (ja) * | 2000-05-29 | 2001-12-07 | Zenkyo Kasei Kogyo Kk | ウェハー保管装置 |
JP2005166952A (ja) * | 2003-12-02 | 2005-06-23 | Asyst Shinko Inc | 保管庫 |
JP2010182747A (ja) * | 2009-02-03 | 2010-08-19 | Dan Takuma:Kk | 保管システムおよび保管方法 |
JP2013139319A (ja) * | 2012-01-04 | 2013-07-18 | Daifuku Co Ltd | 物品保管設備 |
WO2014126106A1 (ja) * | 2013-02-12 | 2014-08-21 | 村田機械株式会社 | 保管棚 |
WO2014174606A1 (ja) * | 2013-04-24 | 2014-10-30 | 株式会社日立システムズ | コンテナ型データセンター |
JP2016050684A (ja) * | 2014-08-29 | 2016-04-11 | シャープ株式会社 | 空気調和機および圧縮機 |
WO2017022330A1 (ja) * | 2015-08-04 | 2017-02-09 | 村田機械株式会社 | パージ装置、パージストッカ、及びパージガスの供給方法 |
JP2017227216A (ja) * | 2016-06-21 | 2017-12-28 | 株式会社荏原製作所 | 給水装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
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EP0582018B1 (en) | 1992-08-04 | 1995-10-18 | International Business Machines Corporation | Pressurized interface apparatus for transferring a semiconductor wafer between a pressurized sealable transportable container and a processing equipment |
DE19813684C2 (de) * | 1998-03-27 | 2001-08-16 | Brooks Automation Gmbh | Einrichtung zur Aufnahme von Transportbehältern an einer Be- und Entladestation |
US7930061B2 (en) * | 2002-08-31 | 2011-04-19 | Applied Materials, Inc. | Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback |
JP4898740B2 (ja) * | 2008-05-12 | 2012-03-21 | 信越ポリマー株式会社 | バルブ機構及び基板収納容器 |
US20100227059A1 (en) * | 2009-03-04 | 2010-09-09 | Tokyo Electron Limited | Film deposition apparatus, film deposition method, and computer readable storage medium |
JP5440871B2 (ja) * | 2010-08-20 | 2014-03-12 | 株式会社ダイフク | 容器保管設備 |
JP5557061B2 (ja) | 2012-01-04 | 2014-07-23 | 株式会社ダイフク | 物品保管設備 |
JP5892113B2 (ja) * | 2013-06-26 | 2016-03-23 | 株式会社ダイフク | 物品保管設備 |
JP2015126203A (ja) | 2013-12-27 | 2015-07-06 | 東京エレクトロン株式会社 | 基板受け渡し装置及び基板受け渡し方法 |
JP2015142104A (ja) * | 2014-01-30 | 2015-08-03 | 村田機械株式会社 | パージ装置、パージストッカ、及び容器 |
US20170243776A1 (en) * | 2014-02-27 | 2017-08-24 | Murata Machinery, Ltd. | Purge Device and Purge Method |
JP6241693B2 (ja) | 2014-09-25 | 2017-12-06 | 村田機械株式会社 | パージ装置及びパージ方法 |
JP6425132B2 (ja) * | 2015-02-05 | 2018-11-21 | 村田機械株式会社 | パージ機能を備えた装置前自動倉庫とパージ方法 |
JP2016178133A (ja) * | 2015-03-19 | 2016-10-06 | シンフォニアテクノロジー株式会社 | ドア開閉装置、搬送装置、ソータ装置、収納容器のドッキング方法 |
JP6455404B2 (ja) * | 2015-11-17 | 2019-01-23 | 株式会社ダイフク | 容器搬送設備 |
KR101852323B1 (ko) * | 2016-07-05 | 2018-04-26 | 로체 시스템즈(주) | 퍼지 모듈 지그 및 이를 포함한 퍼지 모듈 |
JP6817757B2 (ja) * | 2016-09-16 | 2021-01-20 | 東京エレクトロン株式会社 | 基板処理装置及び基板移送方法 |
JP7090513B2 (ja) * | 2018-09-06 | 2022-06-24 | 東京エレクトロン株式会社 | 基板処理装置及びパージ方法 |
-
2019
- 2019-03-22 CN CN201980038913.3A patent/CN112262465B/zh active Active
- 2019-03-22 WO PCT/JP2019/012222 patent/WO2019239672A1/ja active Application Filing
- 2019-03-22 JP JP2020525273A patent/JP6984748B2/ja active Active
- 2019-03-22 SG SG11202012260RA patent/SG11202012260RA/en unknown
- 2019-03-22 EP EP19819693.3A patent/EP3809454B1/en active Active
- 2019-03-22 KR KR1020217000188A patent/KR102453738B1/ko active IP Right Grant
- 2019-03-22 US US16/973,448 patent/US11990356B2/en active Active
- 2019-06-05 TW TW108119549A patent/TWI816810B/zh active
-
2020
- 2020-12-09 IL IL279318A patent/IL279318A/en unknown
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0192240U (ja) * | 1987-12-10 | 1989-06-16 | ||
JP2001338971A (ja) * | 2000-05-29 | 2001-12-07 | Zenkyo Kasei Kogyo Kk | ウェハー保管装置 |
JP2005166952A (ja) * | 2003-12-02 | 2005-06-23 | Asyst Shinko Inc | 保管庫 |
JP2010182747A (ja) * | 2009-02-03 | 2010-08-19 | Dan Takuma:Kk | 保管システムおよび保管方法 |
JP2013139319A (ja) * | 2012-01-04 | 2013-07-18 | Daifuku Co Ltd | 物品保管設備 |
WO2014126106A1 (ja) * | 2013-02-12 | 2014-08-21 | 村田機械株式会社 | 保管棚 |
WO2014174606A1 (ja) * | 2013-04-24 | 2014-10-30 | 株式会社日立システムズ | コンテナ型データセンター |
JP2016050684A (ja) * | 2014-08-29 | 2016-04-11 | シャープ株式会社 | 空気調和機および圧縮機 |
WO2017022330A1 (ja) * | 2015-08-04 | 2017-02-09 | 村田機械株式会社 | パージ装置、パージストッカ、及びパージガスの供給方法 |
JP2017227216A (ja) * | 2016-06-21 | 2017-12-28 | 株式会社荏原製作所 | 給水装置 |
Also Published As
Publication number | Publication date |
---|---|
US20210257239A1 (en) | 2021-08-19 |
EP3809454A4 (en) | 2022-02-23 |
CN112262465A (zh) | 2021-01-22 |
CN112262465B (zh) | 2024-03-26 |
TW202002134A (zh) | 2020-01-01 |
EP3809454A1 (en) | 2021-04-21 |
IL279318A (en) | 2021-01-31 |
WO2019239672A1 (ja) | 2019-12-19 |
KR20210016607A (ko) | 2021-02-16 |
KR102453738B1 (ko) | 2022-10-12 |
EP3809454B1 (en) | 2023-05-03 |
SG11202012260RA (en) | 2021-01-28 |
JP6984748B2 (ja) | 2021-12-22 |
TWI816810B (zh) | 2023-10-01 |
US11990356B2 (en) | 2024-05-21 |
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