JPWO2019049251A1 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JPWO2019049251A1 JPWO2019049251A1 JP2019540192A JP2019540192A JPWO2019049251A1 JP WO2019049251 A1 JPWO2019049251 A1 JP WO2019049251A1 JP 2019540192 A JP2019540192 A JP 2019540192A JP 2019540192 A JP2019540192 A JP 2019540192A JP WO2019049251 A1 JPWO2019049251 A1 JP WO2019049251A1
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 61
- 239000012535 impurity Substances 0.000 claims abstract description 25
- 239000010410 layer Substances 0.000 claims description 175
- 239000002344 surface layer Substances 0.000 claims description 6
- 238000005468 ion implantation Methods 0.000 description 8
- 230000001133 acceleration Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 239000013256 coordination polymer Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 210000004556 brain Anatomy 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000001994 activation Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
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- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
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- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
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- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Thyristors (AREA)
Abstract
Description
図1は、本発明の実施の形態1に係る半導体装置10の構造を示す断面図である。当該半導体装置10は、ライトパンチスルー型のトレンチゲート型IGBTである。
図6は、実施の形態2に係る半導体装置10の構造を示す断面図である。図6においては、図1に示したものと同様の要素には、図1と同一の符号を付している。
Claims (3)
- N−型ドリフト層(1)と、
前記N−型ドリフト層(1)の上面側の表層部に形成されたP型ウェル層(2)と、
前記P型ウェル層(2)の表層部に形成されたN型エミッタ層(3)と、
前記N−型ドリフト層(1)、前記P型ウェル層(2)および前記N型エミッタ層(3)が形成された半導体層の上面側に形成されたゲート電極(5a,5b)と、
前記N−型ドリフト層(1)の下面側に形成されたN型バッファ層(6)と、
前記N型バッファ層(6)の下面側に形成されたP型コレクタ層(7)と、
前記N型バッファ層(6)内に部分的に形成され、不純物濃度が前記N型バッファ層(6)の不純物濃度よりも高く、且つ、前記P型コレクタ層(7)の不純物濃度以上の不純物濃度を有するN++型層(8)と、
を備えることを特徴とする半導体装置(10)。 - 前記N++型層(8)は、前記N型エミッタ層(3)の真下の領域を避けるように配設されている、
請求項1に記載の半導体装置(10)。 - 前記半導体装置(10)は、
絶縁膜を介して前記ゲート電極(5a)に対向する前記N型エミッタ層(3)を有するセルと、
絶縁膜を介して前記ゲート電極(5b)に対向する前記N型エミッタ層(3)を有しないダミーセルと、
を含み、
前記N++型層(8)は、前記ダミーセル内のみに形成されている、
請求項1に記載の半導体装置(10)。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2017/032213 WO2019049251A1 (ja) | 2017-09-07 | 2017-09-07 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
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JPWO2019049251A1 true JPWO2019049251A1 (ja) | 2019-12-12 |
JP6739659B2 JP6739659B2 (ja) | 2020-08-12 |
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JP2019540192A Active JP6739659B2 (ja) | 2017-09-07 | 2017-09-07 | 半導体装置 |
Country Status (5)
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US (1) | US11069769B2 (ja) |
JP (1) | JP6739659B2 (ja) |
CN (1) | CN111066148B (ja) |
DE (1) | DE112017008011T5 (ja) |
WO (1) | WO2019049251A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7290973B2 (ja) * | 2019-03-27 | 2023-06-14 | ローム株式会社 | 半導体装置 |
JP2022155345A (ja) * | 2021-03-30 | 2022-10-13 | 有限会社Mtec | パワー半導体及びその製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3081739B2 (ja) * | 1992-10-20 | 2000-08-28 | 三菱電機株式会社 | 絶縁ゲート型半導体装置及びその製造方法 |
JP3352592B2 (ja) * | 1996-05-16 | 2002-12-03 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
JP4750933B2 (ja) * | 2000-09-28 | 2011-08-17 | 株式会社東芝 | 薄型パンチスルー型パワーデバイス |
JP4229033B2 (ja) * | 2004-09-17 | 2009-02-25 | 株式会社デンソー | 絶縁ゲート型バイポーラトランジスタの製造方法 |
JP2006173297A (ja) | 2004-12-15 | 2006-06-29 | Denso Corp | Igbt |
US8507352B2 (en) * | 2008-12-10 | 2013-08-13 | Denso Corporation | Method of manufacturing semiconductor device including insulated gate bipolar transistor and diode |
JP2014103376A (ja) * | 2012-09-24 | 2014-06-05 | Toshiba Corp | 半導体装置 |
-
2017
- 2017-09-07 US US16/619,430 patent/US11069769B2/en active Active
- 2017-09-07 JP JP2019540192A patent/JP6739659B2/ja active Active
- 2017-09-07 DE DE112017008011.8T patent/DE112017008011T5/de active Pending
- 2017-09-07 CN CN201780094516.9A patent/CN111066148B/zh active Active
- 2017-09-07 WO PCT/JP2017/032213 patent/WO2019049251A1/ja active Application Filing
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Publication number | Publication date |
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US20200373382A1 (en) | 2020-11-26 |
CN111066148B (zh) | 2023-10-13 |
CN111066148A (zh) | 2020-04-24 |
US11069769B2 (en) | 2021-07-20 |
WO2019049251A1 (ja) | 2019-03-14 |
JP6739659B2 (ja) | 2020-08-12 |
DE112017008011T5 (de) | 2020-07-09 |
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