JPWO2018211898A1 - 保管システム - Google Patents
保管システム Download PDFInfo
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- JPWO2018211898A1 JPWO2018211898A1 JP2019519139A JP2019519139A JPWO2018211898A1 JP WO2018211898 A1 JPWO2018211898 A1 JP WO2018211898A1 JP 2019519139 A JP2019519139 A JP 2019519139A JP 2019519139 A JP2019519139 A JP 2019519139A JP WO2018211898 A1 JPWO2018211898 A1 JP WO2018211898A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0464—Storage devices mechanical with access from above
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Abstract
Description
[第1実施形態]
[保管システムの構成]
[走行レール及びラックユニットの構成]
[ラックユニットの載置面の位置関係]
[保管システムにおける台車の動作例]
[作用及び効果]
[第2実施形態]
[保管システムの構成]
[台車の動作]
[作用及び効果]
[変形例]
Claims (6)
- 第1方向に延在する複数の第1レール及び前記第1方向に直交する第2方向に延在する複数の第2レールを有し、複数の前記第1レール及び複数の前記第2レールが同一の平面上に格子状に配置されることにより、互いに隣り合う1対の前記第1レールと互いに隣り合う1対の前記第2レールとによって囲まれた領域を縦横に複数形成する走行レールと、
前記走行レールを前記第1方向及び前記第2方向のそれぞれの方向に走行する走行部、並びに、物品の保持及び昇降を行う移載部を有する台車と、
前記走行レールの下側に設けられ、前記物品が載置される保管部と、を備え、
前記台車は、前記保管部に対し、前記物品の受け渡しを行い、
前記保管部は、互いに隣接する複数のラックユニットを有し、
複数の前記ラックユニットのそれぞれは、前記物品が載置される載置部材を含むと共に前記載置部材が前記領域の直下に位置するように設けられ、且つ、前記走行レールに対して着脱可能である、保管システム。 - 複数の前記ラックユニットのそれぞれは、前記走行レールから着脱可能に吊り下げられ且つ前記載置部材を支持する支持部材を含む、請求項1に記載の保管システム。
- 複数の前記ラックユニットのうちの少なくとも1つは、前記載置部材において前記物品が載置される複数の載置部が1列に並ぶように形成されており、複数の前記載置部が1列に並ぶ方向が前記第1方向又は前記第2方向に平行となるように設けられる、請求項2に記載の保管システム。
- 複数の前記領域のそれぞれは、前記物品が上下方向に通過し得る大きさを有する開口領域を形成しており、
前記台車は、
前記物品を前記走行レールよりも上側で保持して走行し、
前記載置部材に対し、前記開口領域を介して前記物品の受け渡しを行う、請求項1〜3のいずれか一項に記載の保管システム。 - 複数の前記支持部材のそれぞれは、前記第1レールと前記第2レールとの交差部分から吊り下げられ、
前記台車は、前記物品を前記走行レールよりも下側で保持した状態で、当該物品を複数の前記支持部材の間を通過させて走行する、請求項2又は3に記載の保管システム。 - 前記載置部材は、互いに間隔を空けて設けられた1対の梁状部材である、請求項1〜5のいずれか一項に記載の保管システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017100262 | 2017-05-19 | ||
JP2017100262 | 2017-05-19 | ||
PCT/JP2018/015894 WO2018211898A1 (ja) | 2017-05-19 | 2018-04-17 | 保管システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2018211898A1 true JPWO2018211898A1 (ja) | 2020-01-16 |
JP6705556B2 JP6705556B2 (ja) | 2020-06-03 |
Family
ID=64273552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019519139A Active JP6705556B2 (ja) | 2017-05-19 | 2018-04-17 | 保管システム |
Country Status (8)
Country | Link |
---|---|
US (1) | US11171027B2 (ja) |
EP (1) | EP3637459B1 (ja) |
JP (1) | JP6705556B2 (ja) |
KR (1) | KR102302099B1 (ja) |
CN (1) | CN110603632B (ja) |
IL (1) | IL270597B (ja) |
TW (1) | TWI734915B (ja) |
WO (1) | WO2018211898A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220047367A (ko) * | 2019-09-18 | 2022-04-15 | 무라다기카이가부시끼가이샤 | 반송 시스템 및 보관부 |
US20220384229A1 (en) * | 2019-11-07 | 2022-12-01 | Murata Machinery, Ltd., | Transport system and grid system |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10109887A (ja) * | 1996-09-30 | 1998-04-28 | Murata Mach Ltd | ワーク搬送システム |
JP2008056450A (ja) * | 2006-09-01 | 2008-03-13 | Asyst Technologies Japan Inc | 被搬送物保管システム |
JP2008162778A (ja) * | 2006-12-28 | 2008-07-17 | Asyst Technologies Japan Inc | 被搬送物の保管装置 |
JP2008247561A (ja) * | 2007-03-30 | 2008-10-16 | Asyst Technologies Japan Inc | 保管装置 |
JP2009137740A (ja) * | 2007-12-10 | 2009-06-25 | Murata Mach Ltd | 天井バッファとその移設方法 |
US20100278622A1 (en) * | 2009-04-30 | 2010-11-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Automated Materials Handling System Having Multiple Categories of Overhead Buffers |
WO2015174181A1 (ja) * | 2014-05-14 | 2015-11-19 | 村田機械株式会社 | 搬送システム及び搬送方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
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US4088232A (en) * | 1974-04-01 | 1978-05-09 | Clark Equipment Co. | Apparatus with storage cells disposed adjacent vertical shafts having covers and a lift means movable thereabove |
TW200630284A (en) * | 2005-02-25 | 2006-09-01 | Murata Machinery Ltd | A storage management system |
US7850412B2 (en) | 2006-09-25 | 2010-12-14 | Bec Companies, Inc. | Overhead boat storage system |
JP5429570B2 (ja) * | 2010-03-08 | 2014-02-26 | 株式会社ダイフク | 物品搬送設備 |
JP5229363B2 (ja) * | 2010-11-04 | 2013-07-03 | 村田機械株式会社 | 搬送システム及び搬送方法 |
JP5729415B2 (ja) * | 2010-11-04 | 2015-06-03 | 村田機械株式会社 | 搬送システム及び搬送方法 |
US9385019B2 (en) | 2012-06-21 | 2016-07-05 | Globalfoundries Inc. | Overhead substrate handling and storage system |
GB201404870D0 (en) * | 2014-03-18 | 2014-04-30 | Ocado Ltd | Robotic service device and handling method |
JP2015174181A (ja) | 2014-03-14 | 2015-10-05 | 牧野フライス精機株式会社 | 工作機械の固定部材 |
WO2016039023A1 (ja) * | 2014-09-10 | 2016-03-17 | 村田機械株式会社 | 一時保管システムと、これを用いた搬送システム、及び一時保管方法 |
-
2018
- 2018-04-17 EP EP18801638.0A patent/EP3637459B1/en active Active
- 2018-04-17 KR KR1020197032416A patent/KR102302099B1/ko active IP Right Grant
- 2018-04-17 JP JP2019519139A patent/JP6705556B2/ja active Active
- 2018-04-17 WO PCT/JP2018/015894 patent/WO2018211898A1/ja active Application Filing
- 2018-04-17 US US16/612,924 patent/US11171027B2/en active Active
- 2018-04-17 CN CN201880029757.XA patent/CN110603632B/zh active Active
- 2018-05-14 TW TW107116305A patent/TWI734915B/zh active
-
2019
- 2019-11-12 IL IL270597A patent/IL270597B/en unknown
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10109887A (ja) * | 1996-09-30 | 1998-04-28 | Murata Mach Ltd | ワーク搬送システム |
JP2008056450A (ja) * | 2006-09-01 | 2008-03-13 | Asyst Technologies Japan Inc | 被搬送物保管システム |
JP2008162778A (ja) * | 2006-12-28 | 2008-07-17 | Asyst Technologies Japan Inc | 被搬送物の保管装置 |
JP2008247561A (ja) * | 2007-03-30 | 2008-10-16 | Asyst Technologies Japan Inc | 保管装置 |
JP2009137740A (ja) * | 2007-12-10 | 2009-06-25 | Murata Mach Ltd | 天井バッファとその移設方法 |
US20100278622A1 (en) * | 2009-04-30 | 2010-11-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Automated Materials Handling System Having Multiple Categories of Overhead Buffers |
WO2015174181A1 (ja) * | 2014-05-14 | 2015-11-19 | 村田機械株式会社 | 搬送システム及び搬送方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2018211898A1 (ja) | 2018-11-22 |
CN110603632B (zh) | 2023-03-14 |
EP3637459B1 (en) | 2021-12-22 |
CN110603632A (zh) | 2019-12-20 |
US11171027B2 (en) | 2021-11-09 |
TWI734915B (zh) | 2021-08-01 |
EP3637459A4 (en) | 2021-01-20 |
KR102302099B1 (ko) | 2021-09-13 |
EP3637459A1 (en) | 2020-04-15 |
JP6705556B2 (ja) | 2020-06-03 |
IL270597B (en) | 2022-06-01 |
TW201900532A (zh) | 2019-01-01 |
US20200203203A1 (en) | 2020-06-25 |
KR20190137124A (ko) | 2019-12-10 |
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