JPWO2015194590A1 - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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- JPWO2015194590A1 JPWO2015194590A1 JP2016529402A JP2016529402A JPWO2015194590A1 JP WO2015194590 A1 JPWO2015194590 A1 JP WO2015194590A1 JP 2016529402 A JP2016529402 A JP 2016529402A JP 2016529402 A JP2016529402 A JP 2016529402A JP WO2015194590 A1 JPWO2015194590 A1 JP WO2015194590A1
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
Abstract
Description
[先行技術文献]
[特許文献]
[特許文献1]特開平7−226521号公報
[特許文献2]特開2003−224281号公報
[特許文献3]特開2009−218496号公報
Claims (13)
- 第1導電型の半導体基板に設けられた第1導電型のドリフト層と、
前記ドリフト層の表面側に設けられた第2導電型の表面側領域と、
前記表面側領域の表面側に設けられ、厚さが自然酸化膜よりも薄い絶縁膜層と、
前記絶縁膜層の表面側に設けられた金属層とを備える半導体装置。 - 前記表面側領域を取り囲むように、前記ドリフト層の表面側に選択的に形成され、前記表面側領域と離間して形成された第2導電型の複数のガードリング層をさらに備え、
前記複数のガードリング層の表面側に前記絶縁膜層が設けられる請求項1に記載の半導体装置。 - 前記表面側領域はアノード層である、請求項1または2に記載の半導体装置。
- 前記表面側領域は、複数のゲート電極間における第2導電型のコンタクト領域である、請求項1または2に記載の半導体装置。
- 前記半導体装置の外周近傍の少なくとも一部に設けられる外側電極と前記複数のゲート電極に電気的に接続する金属電極との間に、前記絶縁膜層をさらに有する
請求項4に記載の半導体装置。 - 前記絶縁膜層の厚さは、1Å以上6Å以下である、請求項1から5のいずれかまたは2に記載の半導体装置。
- 前記絶縁膜層は、前記半導体基板と前記絶縁膜層との界面において、自然酸化膜よりもSi‐H結合を多く含む、請求項1から6のいずれか一項に記載の半導体装置。
- 前記絶縁膜層は窒素を含有しない、請求項1から7のいずれか一項に記載の半導体装置。
- 前記絶縁膜層は、アルミニウム酸化物とシリコン酸化物とを含む混成膜である、請求項1から8のいずれか一項に記載の半導体装置。
- 第1導電型の半導体基板の表面側に、表面側領域、熱酸化膜、および層間絶縁膜をそれぞれ選択的に形成する表面構造形成工程と、
選択的に形成された前記層間絶縁膜の開口部において露出する前記半導体基板の表面に、自然酸化膜よりも薄い絶縁膜層を形成する絶縁膜層形成工程と
を備える半導体装置の製造方法。 - 前記絶縁膜層形成工程は、露出する前記半導体基板の表面を、アンモニア水、過酸化水素水、および純水の混合溶液に晒すことを含む請求項10の半導体装置の製造方法。
- 前記混合溶液におけるアンモニア水の濃度に応じて、前記絶縁膜層の厚さを調整する請求項11に記載の半導体装置の製造方法。
- 前記混合溶液におけるアンモニア水の濃度は、1ppm以上150000ppm以下である請求項12に記載の半導体装置の製造方法。
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JP2015033862 | 2015-02-24 | ||
PCT/JP2015/067468 WO2015194590A1 (ja) | 2014-06-18 | 2015-06-17 | 半導体装置および半導体装置の製造方法 |
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JP (1) | JP6455514B2 (ja) |
CN (1) | CN105814693B (ja) |
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CN108269742A (zh) * | 2016-12-30 | 2018-07-10 | 无锡昌德微电子股份有限公司 | 一种超快恢复二极管结构的实现方法 |
JP6854654B2 (ja) | 2017-01-26 | 2021-04-07 | ローム株式会社 | 半導体装置 |
JP7190256B2 (ja) * | 2018-02-09 | 2022-12-15 | ローム株式会社 | 半導体装置 |
KR102183959B1 (ko) * | 2019-04-26 | 2020-11-27 | 홍익대학교 산학협력단 | 항복전압 특성이 개선된 쇼트키 장벽 다이오드 및 그 제조방법 |
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US10050133B2 (en) | 2018-08-14 |
WO2015194590A1 (ja) | 2015-12-23 |
DE112015000204T5 (de) | 2016-08-25 |
CN105814693A (zh) | 2016-07-27 |
CN105814693B (zh) | 2019-05-03 |
US20160300936A1 (en) | 2016-10-13 |
JP6455514B2 (ja) | 2019-01-23 |
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