JPWO2015046521A1 - 感光性樹脂組成物、感光性エレメント、半導体装置及びレジストパターンの形成方法 - Google Patents
感光性樹脂組成物、感光性エレメント、半導体装置及びレジストパターンの形成方法 Download PDFInfo
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- JPWO2015046521A1 JPWO2015046521A1 JP2015539431A JP2015539431A JPWO2015046521A1 JP WO2015046521 A1 JPWO2015046521 A1 JP WO2015046521A1 JP 2015539431 A JP2015539431 A JP 2015539431A JP 2015539431 A JP2015539431 A JP 2015539431A JP WO2015046521 A1 JPWO2015046521 A1 JP WO2015046521A1
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- photosensitive
- photosensitive resin
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- 239000011342 resin composition Substances 0.000 title claims abstract description 92
- 238000000034 method Methods 0.000 title description 24
- 239000004065 semiconductor Substances 0.000 title description 15
- -1 acryloyloxy group Chemical group 0.000 claims abstract description 99
- 239000002245 particle Substances 0.000 claims abstract description 36
- 239000011256 inorganic filler Substances 0.000 claims abstract description 33
- 229910003475 inorganic filler Inorganic materials 0.000 claims abstract description 33
- 229920005989 resin Polymers 0.000 claims abstract description 31
- 239000011347 resin Substances 0.000 claims abstract description 31
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 28
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000002253 acid Substances 0.000 claims abstract description 15
- 150000007824 aliphatic compounds Chemical class 0.000 claims abstract description 12
- 125000000524 functional group Chemical group 0.000 claims abstract description 10
- 150000001875 compounds Chemical class 0.000 claims description 45
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 26
- 238000010438 heat treatment Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 13
- 239000000377 silicon dioxide Substances 0.000 claims description 11
- 125000004183 alkoxy alkyl group Chemical group 0.000 claims description 8
- 125000003118 aryl group Chemical group 0.000 claims description 7
- 125000000623 heterocyclic group Chemical group 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 125000002723 alicyclic group Chemical group 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 5
- 206010034972 Photosensitivity reaction Diseases 0.000 claims description 3
- 230000036211 photosensitivity Effects 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 35
- 125000000217 alkyl group Chemical group 0.000 description 18
- 125000004432 carbon atom Chemical group C* 0.000 description 17
- 238000000576 coating method Methods 0.000 description 17
- 239000011229 interlayer Substances 0.000 description 14
- 239000011248 coating agent Substances 0.000 description 13
- 229920003986 novolac Polymers 0.000 description 12
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 11
- 238000009826 distribution Methods 0.000 description 10
- 239000000203 mixture Substances 0.000 description 10
- 239000002904 solvent Substances 0.000 description 10
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 8
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical group OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 8
- 239000007864 aqueous solution Substances 0.000 description 8
- 230000007423 decrease Effects 0.000 description 8
- 229910000077 silane Inorganic materials 0.000 description 8
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 7
- 125000000962 organic group Chemical group 0.000 description 7
- 230000001681 protective effect Effects 0.000 description 7
- 125000004203 4-hydroxyphenyl group Chemical group [H]OC1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 6
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 6
- 238000009413 insulation Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- 239000004593 Epoxy Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 239000011164 primary particle Substances 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 5
- HDYFAPRLDWYIBU-UHFFFAOYSA-N 1-silylprop-2-en-1-one Chemical compound [SiH3]C(=O)C=C HDYFAPRLDWYIBU-UHFFFAOYSA-N 0.000 description 4
- WMYINDVYGQKYMI-UHFFFAOYSA-N 2-[2,2-bis(hydroxymethyl)butoxymethyl]-2-ethylpropane-1,3-diol Chemical compound CCC(CO)(CO)COCC(CC)(CO)CO WMYINDVYGQKYMI-UHFFFAOYSA-N 0.000 description 4
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical class OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 4
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical class C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 125000005843 halogen group Chemical group 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 229920006254 polymer film Polymers 0.000 description 4
- NEBBLNDVSSWJLL-UHFFFAOYSA-N 2,3-bis(2-methylprop-2-enoyloxy)propyl 2-methylprop-2-enoate Chemical class CC(=C)C(=O)OCC(OC(=O)C(C)=C)COC(=O)C(C)=C NEBBLNDVSSWJLL-UHFFFAOYSA-N 0.000 description 3
- PUGOMSLRUSTQGV-UHFFFAOYSA-N 2,3-di(prop-2-enoyloxy)propyl prop-2-enoate Chemical class C=CC(=O)OCC(OC(=O)C=C)COC(=O)C=C PUGOMSLRUSTQGV-UHFFFAOYSA-N 0.000 description 3
- HOZMLTCHTRHKRK-UHFFFAOYSA-N 2-methyl-1-silylprop-2-en-1-one Chemical compound CC(=C)C([SiH3])=O HOZMLTCHTRHKRK-UHFFFAOYSA-N 0.000 description 3
- MECNWXGGNCJFQJ-UHFFFAOYSA-N 3-piperidin-1-ylpropane-1,2-diol Chemical compound OCC(O)CN1CCCCC1 MECNWXGGNCJFQJ-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 239000006087 Silane Coupling Agent Substances 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- JUDXBRVLWDGRBC-UHFFFAOYSA-N [2-(hydroxymethyl)-3-(2-methylprop-2-enoyloxy)-2-(2-methylprop-2-enoyloxymethyl)propyl] 2-methylprop-2-enoate Chemical class CC(=C)C(=O)OCC(CO)(COC(=O)C(C)=C)COC(=O)C(C)=C JUDXBRVLWDGRBC-UHFFFAOYSA-N 0.000 description 3
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical class C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 3
- 125000002947 alkylene group Chemical group 0.000 description 3
- 125000001118 alkylidene group Chemical group 0.000 description 3
- 230000003197 catalytic effect Effects 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229910021485 fumed silica Inorganic materials 0.000 description 3
- VPVSTMAPERLKKM-UHFFFAOYSA-N glycoluril Chemical compound N1C(=O)NC2NC(=O)NC21 VPVSTMAPERLKKM-UHFFFAOYSA-N 0.000 description 3
- 150000002430 hydrocarbons Chemical group 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 150000002989 phenols Chemical class 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 2
- OGRAOKJKVGDSFR-UHFFFAOYSA-N 2,3,5-trimethylphenol Chemical compound CC1=CC(C)=C(C)C(O)=C1 OGRAOKJKVGDSFR-UHFFFAOYSA-N 0.000 description 2
- QWBBPBRQALCEIZ-UHFFFAOYSA-N 2,3-dimethylphenol Chemical compound CC1=CC=CC(O)=C1C QWBBPBRQALCEIZ-UHFFFAOYSA-N 0.000 description 2
- NKTOLZVEWDHZMU-UHFFFAOYSA-N 2,5-xylenol Chemical compound CC1=CC=C(C)C(O)=C1 NKTOLZVEWDHZMU-UHFFFAOYSA-N 0.000 description 2
- NXXYKOUNUYWIHA-UHFFFAOYSA-N 2,6-Dimethylphenol Chemical compound CC1=CC=CC(C)=C1O NXXYKOUNUYWIHA-UHFFFAOYSA-N 0.000 description 2
- FZXRXKLUIMKDEL-UHFFFAOYSA-N 2-Methylpropyl propanoate Chemical compound CCC(=O)OCC(C)C FZXRXKLUIMKDEL-UHFFFAOYSA-N 0.000 description 2
- GJYCVCVHRSWLNY-UHFFFAOYSA-N 2-butylphenol Chemical compound CCCCC1=CC=CC=C1O GJYCVCVHRSWLNY-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- YCOXTKKNXUZSKD-UHFFFAOYSA-N 3,4-xylenol Chemical compound CC1=CC=C(O)C=C1C YCOXTKKNXUZSKD-UHFFFAOYSA-N 0.000 description 2
- TUAMRELNJMMDMT-UHFFFAOYSA-N 3,5-xylenol Chemical compound CC1=CC(C)=CC(O)=C1 TUAMRELNJMMDMT-UHFFFAOYSA-N 0.000 description 2
- HMNKTRSOROOSPP-UHFFFAOYSA-N 3-Ethylphenol Chemical compound CCC1=CC=CC(O)=C1 HMNKTRSOROOSPP-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- HXDOZKJGKXYMEW-UHFFFAOYSA-N 4-ethylphenol Chemical compound CCC1=CC=C(O)C=C1 HXDOZKJGKXYMEW-UHFFFAOYSA-N 0.000 description 2
- HCFAJYNVAYBARA-UHFFFAOYSA-N 4-heptanone Chemical compound CCCC(=O)CCC HCFAJYNVAYBARA-UHFFFAOYSA-N 0.000 description 2
- KSMGAOMUPSQGTB-UHFFFAOYSA-N 9,10-dibutoxyanthracene Chemical compound C1=CC=C2C(OCCCC)=C(C=CC=C3)C3=C(OCCCC)C2=C1 KSMGAOMUPSQGTB-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical class C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- XRMBQHTWUBGQDN-UHFFFAOYSA-N [2-[2,2-bis(prop-2-enoyloxymethyl)butoxymethyl]-2-(prop-2-enoyloxymethyl)butyl] prop-2-enoate Chemical class C=CC(=O)OCC(COC(=O)C=C)(CC)COCC(CC)(COC(=O)C=C)COC(=O)C=C XRMBQHTWUBGQDN-UHFFFAOYSA-N 0.000 description 2
- KGBBDBRJXGILTQ-UHFFFAOYSA-N [3-(2-methylprop-2-enoyloxy)-2,2-bis(2-methylprop-2-enoyloxymethyl)propyl] 2-methylprop-2-enoate Chemical class CC(=C)C(=O)OCC(COC(=O)C(C)=C)(COC(=O)C(C)=C)COC(=O)C(C)=C KGBBDBRJXGILTQ-UHFFFAOYSA-N 0.000 description 2
- KNSXNCFKSZZHEA-UHFFFAOYSA-N [3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical class C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C KNSXNCFKSZZHEA-UHFFFAOYSA-N 0.000 description 2
- NOKSMMGULAYSTD-UHFFFAOYSA-N [SiH4].N=C=O Chemical compound [SiH4].N=C=O NOKSMMGULAYSTD-UHFFFAOYSA-N 0.000 description 2
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 2
- 150000001299 aldehydes Chemical class 0.000 description 2
- 150000001346 alkyl aryl ethers Chemical class 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 2
- 238000007611 bar coating method Methods 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- HUMNYLRZRPPJDN-UHFFFAOYSA-N benzaldehyde Chemical compound O=CC1=CC=CC=C1 HUMNYLRZRPPJDN-UHFFFAOYSA-N 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- IJOOHPMOJXWVHK-UHFFFAOYSA-N chlorotrimethylsilane Chemical compound C[Si](C)(C)Cl IJOOHPMOJXWVHK-UHFFFAOYSA-N 0.000 description 2
- 229930003836 cresol Natural products 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 125000000753 cycloalkyl group Chemical group 0.000 description 2
- 125000005520 diaryliodonium group Chemical group 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 125000001153 fluoro group Chemical group F* 0.000 description 2
- 125000001188 haloalkyl group Chemical group 0.000 description 2
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 2
- NGAZZOYFWWSOGK-UHFFFAOYSA-N heptan-3-one Chemical compound CCCCC(=O)CC NGAZZOYFWWSOGK-UHFFFAOYSA-N 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- MLFHJEHSLIIPHL-UHFFFAOYSA-N isoamyl acetate Chemical compound CC(C)CCOC(C)=O MLFHJEHSLIIPHL-UHFFFAOYSA-N 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 2
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 2
- 125000001820 oxy group Chemical group [*:1]O[*:2] 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 2
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 2
- PGMYKACGEOXYJE-UHFFFAOYSA-N pentyl acetate Chemical compound CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
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- 229920000728 polyester Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- YKYONYBAUNKHLG-UHFFFAOYSA-N propyl acetate Chemical compound CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 2
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
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- 238000004528 spin coating Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- TXDNPSYEJHXKMK-UHFFFAOYSA-N sulfanylsilane Chemical compound S[SiH3] TXDNPSYEJHXKMK-UHFFFAOYSA-N 0.000 description 2
- 125000000472 sulfonyl group Chemical group *S(*)(=O)=O 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000004580 weight loss Effects 0.000 description 2
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- NLSXASIDNWDYMI-UHFFFAOYSA-N triphenylsilanol Chemical compound C=1C=CC=CC=1[Si](C=1C=CC=CC=1)(O)C1=CC=CC=C1 NLSXASIDNWDYMI-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/38—Treatment before imagewise removal, e.g. prebaking
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
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- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/064—Photoresists
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1258—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by using a substrate provided with a shape pattern, e.g. grooves, banks, resist pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/285—Permanent coating compositions
- H05K3/287—Photosensitive compositions
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0209—Inorganic, non-metallic particles
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
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Abstract
Description
本実施形態の感光性樹脂組成物は、(A)成分:フェノール性水酸基を有する樹脂、(B)成分:アクリロイルオキシ基、メタクリロイルオキシ基、グリシジルオキシ基及び水酸基から選択される1種以上の官能基を、2つ以上有する脂肪族化合物、(C)成分:光感応性酸発生剤、ならびに(D)成分:平均粒子径が100nm以下の無機フィラーを含有する。
(A)成分であるフェノール性水酸基を有する樹脂としては、特に限定されないが、アルカリ水溶液に可溶な樹脂であることが好ましく、ノボラック樹脂が特に好ましい。該ノボラック樹脂は、例えば、フェノール類とアルデヒド類とを触媒の存在下で、縮合させることにより得られる。
(B)成分:アクリロイルオキシ基、メタクリロイルオキシ基、グリシジルオキシ基及び水酸基から選択される1種以上の官能基を、2つ以上有する脂肪族化合物は、上記官能基を3つ以上有する脂肪族化合物であることが好ましい。上記官能基数の上限は、特に制限はないが、例えば、12個である。(B)成分の具体例としては、一般式(7)〜(10)で表される化合物が挙げられる。なお、「脂肪族化合物」とは、主骨格が脂肪族骨格であり、芳香環又は複素環を含まないものをいう。
(C)成分である光感応性酸発生剤は、活性光線等の照射によって酸を発生する化合物であり、発生した酸の触媒効果により(B)成分同士が架橋するだけではなく、(B)成分が(A)成分のフェノール性水酸基とも反応し、現像液に対する組成物の溶解性が大幅に低下する。
オニウム塩化合物としては、例えば、ヨードニウム塩、スルホニウム塩、ホスホニウム塩、ジアゾニウム塩及びピリジニウム塩が挙げられる。好ましいオニウム塩化合物の具体例としては、ジフェニルヨードニウムトリフルオロメタンスルホネート、ジフェニルヨードニウムp−トルエンスルホネート、ジフェニルヨードニウムヘキサフルオロアンチモネート、ジフェニルヨードニウムヘキサフルオロホスフェート、ジフェニルヨードニウムテトラフルオロボレート等のジアリールヨードニウム塩;トリフェニルスルホニウムトリフルオロメタンスルホネート、トリフェニルスルホニウムp−トルエンスルホネート、トリフェニルスルホニウムヘキサフルオロアンチモネート等のトリアリールスルホニウム塩;4−t−ブチルフェニル−ジフェニルスルホニウムトリフルオロメタンスルホネート;4−t−ブチルフェニル−ジフェニルスルホニウムp−トルエンスルホネート;4,7−ジ−n−ブトキシナフチルテトラヒドロチオフェニウムトリフルオロメタンスルホネートなどが挙げられる。
スルホンイミド化合物の具体例としては、N−(トリフルオロメチルスルホニルオキシ)スクシンイミド、N−(トリフルオロメチルスルホニルオキシ)フタルイミド、N−(トリフルオロメチルスルホニルオキシ)ジフェニルマレイミド、N−(トリフルオロメチルスルホニルオキシ)ビシクロ[2.2.1]ヘプト−5−エン−2,3−ジカルボキシイミド、N−(トリフルオロメチルスルホニルオキシ)ナフタルイミド、N−(p−トルエンスルホニルオキシ)−1,8−ナフタルイミド及びN−(10−カンファースルホニルオキシ)−1,8−ナフタルイミドが挙げられる。
本実施形態の感光性樹脂組成物中に、(D)成分として、平均粒子径が100nm以下の無機フィラーを含有することにより、(D)成分の含有量に応じて、樹脂パターン形成後の感光層を加熱して得られた硬化膜の熱膨張係数を低減できる。感光性樹脂組成物の露光波長領域(例えば、300〜450nm)での光散乱を抑える、つまり該露光波長領域での透過率の低下を抑制するという観点で、感光性樹脂組成物中に分散した(D)成分の平均粒子径は80nm以下であることが好ましく、50nm以下であることがより好ましく、30nm以下であることが更に好ましい。(D)成分における平均粒子径の下限は特に限定されないが、例えば、5nm以上とすることができる。
本実施形態の感光性樹脂組成物は、(E)成分として、芳香環、複素環及び脂環からなる群から選ばれる少なくとも1種を有し、かつ、メチロール基又はアルコキシアルキル基を有する化合物を含有していてもよい。ここで、芳香環とは、芳香族性を有する炭化水素基(例えば、炭素原子数が6〜10の炭化水素基)を意味し、例えば、ベンゼン環及びナフタレン環が挙げられる。複素環とは、窒素原子、酸素原子、硫黄原子等を少なくとも1つ有する環状基(例えば、炭素原子数が3〜10の環状基)を意味し、例えば、ピリジン環、イミダゾール環、ピロリジノン環、オキサゾリジノン環、イミダゾリジノン環及びピリミジノン環が挙げられる。また、脂環とは、芳香族性を有しない環状炭化水素基(例えば、炭素原子数が3〜10の環状炭化水素基)を意味し、例えば、シクロプロパン環、シクロブタン環、シクロペンタン環及びシクロヘキサン環が挙げられる。アルコキシアルキル基とは、アルキル基が酸素原子を介してアルキル基に結合した基を意味する。また、2つのアルキル基は互いに異なってもよく、例えば、炭素原子数が1〜10であるアルキル基である。
本実施形態の感光性樹脂組成物は、必要に応じて、(F)成分として増感剤を更に含有していてもよい。(F)成分を含有することにより、感光性樹脂組成物の感度を向上させることができる。増感剤としては、例えば、9,10−ジブトキシアントラセンが挙げられる。また、(F)成分は1種単独又は2種以上を混合して使用することができる。
本実施形態の感光性樹脂組成物には、感光性樹脂組成物の取り扱い性を向上させたり、粘度及び保存安定性を調節したりするために、(G)成分として、更に溶剤を含有することができる。(G)成分は、有機溶剤であることが好ましい。該有機溶剤の種類は、上記性能を発揮できるものであれば特に制限はないが、例えば、エチレングリコールモノメチルエーテルアセテート、エチレングリコールモノエチルエーテルアセテート等のエチレングリコールモノアルキルエーテルアセテート;プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノプロピルエーテル、プロピレングリコールモノブチルエーテル等のプロピレングリコールモノアルキルエーテル;プロピレングリコールジメチルエーテル、プロピレングリコールジエチルエーテル、プロピレングリコールジプロピルエーテル、プロピレングリコールジブチルエーテル等のプロピレングリコールジアルキルエーテル;プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート、プロピレングリコールモノプロピルエーテルアセテート、プロピレングリコールモノブチルエーテルアセテート等のプロピレングリコールモノアルキルエーテルアセテート;エチルセロソルブ、ブチルセロソルブ等のセロソルブ;ブチルカルビトール等のカルビトール;乳酸メチル、乳酸エチル、乳酸n−プロピル、乳酸イソプロピル等の乳酸エステル;酢酸エチル、酢酸n−プロピル、酢酸イソプロピル、酢酸n−ブチル、酢酸イソブチル、酢酸n−アミル、酢酸イソアミル、プロピオン酸イソプロピル、プロピオン酸n−ブチル、プロピオン酸イソブチル等の脂肪族カルボン酸エステル;3−メトキシプロピオン酸メチル、3−メトキシプロピオン酸エチル、3−エトキシプロピオン酸メチル、3−エトキシプロピオン酸エチル、ピルビン酸メチル、ピルビン酸エチル等のエステル;トルエン、キシレン等の芳香族炭化水素;2−ブタノン、2−ヘプタノン、3−ヘプタノン、4−ヘプタノン、シクロヘキサノン等のケトン;N,N−ジメチルホルムアミド、N−メチルアセトアミド、N,N−ジメチルアセトアミド、N−メチルピロリドン等のアミド;γ−ブチロラクトン等のラクトンなどが挙げられる。上記有機溶剤は、1種単独又は2種以上を混合して使用することができる。
本実施形態の感光性樹脂組成物は、(H)成分としてシランカップリング剤を含有していてもよい。(H)成分を含有することにより、樹脂パターン形成後の感光層と基材との密着強度を向上させることができる。
次に、本実施形態の感光性エレメントについて説明する。
次に、本実施形態のレジストパターンの形成方法を説明する。
本実施形態の感光性樹脂組成物を含む硬化物は、例えば、半導体素子の表面保護膜又は層間絶縁膜、あるいは多層プリント配線板におけるソルダーレジスト及び/又は層間絶縁膜として好適に用いることができる。図1は、本実施形態の感光性樹脂組成物の硬化物をソルダーレジスト及び/又は層間絶縁材料として含む多層プリント配線板の製造方法を示す図である。図1(f)に示す多層プリント配線板100Aは表面及び内部に配線パターンを有する。多層プリント配線板100Aは、銅張積層体、層間絶縁材料、金属箔等を積層するとともにエッチング法又はセミアディティブ法によって配線パターンを適宜形成することによって得られる。以下、多層プリント配線板100Aの製造方法を図1に基づいて簡単に説明する。
ノボラック樹脂(A−1〜A−3)100質量部に対し、グリシジル基を有する化合物(B−1)、アクリロイル基を有する化合物(B−2)、光感応性酸発生剤(C−1)、無機フィラー(無機フィラー1〜無機フィラー3)、アルコキシアルキル基を有する化合物(E−1)、増感剤(F−1)及び溶剤(G−1)を表1に示した所定量にて配合し、感光性樹脂組成物を得た。
上記感光性樹脂組成物をポリエチレンテレフタレートフィルム(帝人デュポンフィルム(株)製、製品名:ピューレックスA53)(支持体)上に、感光性樹脂組成物の厚みが均一になるように塗布し、90℃の熱風対流式乾燥機で10分間乾燥して、乾燥後の感光層の厚さが25μmである感光性エレメントを作製した。
上記感光性樹脂組成物をメチルエチルケトンで1000倍(体積比)に希釈し、サブミクロン粒子アナライザ(ベックマン・コールター(株)製、商品名:N5)を用いて、国際標準規格ISO13321に準拠して、屈折率1.38で測定し、粒度分布における積算値50%(体積基準)での粒子径を、感光性樹脂組成物中に分散した無機フィラーの平均粒子径とした。
上記感光性エレメントの透過率を紫外可視分光光度計((株)日立製作所製、商品名:U−3310)により25μm膜厚における波長365nm(i線)の透過率を測定した。
上記感光性エレメントを6インチのシリコンウエハーに、100℃のヒートロールを用いて、0.4MPaの圧着圧力、1.0m/分のロール速度でラミネートを行った。作製した塗膜に、i線ステッパー(キヤノン(株)製、商品名:FPA−3000iW)を用いてi線(365nm)で、マスクを介して、縮小投影露光を行った。マスクとしては、露光部及び未露光部の幅が1:1となるようなパターンを、2μm:2μm〜30μm:30μmまで1μm刻みで有するものを用いた。また、露光量は、100〜3000mJ/cm2の範囲で、100mJ/cm2ずつ変化させながら縮小投影露光を行った。
実施例1〜7及び比較例1〜3の感光性樹脂組成物をポリエチレンテレフタレートフィルム(帝人デュポンフィルム(株)製、製品名:ピューレックスA53)(支持体)上に、感光性樹脂組成物の厚みが均一になるように塗布し、90℃の熱風対流式乾燥機で10分間乾燥して、乾燥後の感光層の厚さが40μmである感光性エレメントを作製した。次いで、高圧水銀灯を有する露光機((株)オーク製作所製、商品名:EXM−1201)を用いて、照射エネルギー量が3000mJ/cm2となるように感光層を露光した。露光された感光層をホットプレート上にて65℃で2分間、次いで95℃で8分間加熱し、熱風対流式乾燥機にて180℃で60分間加熱処理をして、硬化膜を得た。熱機械的分析装置(セイコーインスツルメンツ(株)製、商品名:TMA/SS6000)を用いて、昇温速度5℃/分で温度を上昇させたときの該硬化膜の熱膨張量を測定し、その曲線から得られる変曲点をガラス転移温度Tgとして求めた。また熱膨張係数は、引張り荷重5gにおける40℃〜150℃までの熱膨張量から算出した。熱重量減少温度は、示差熱熱重量同時測定装置(セイコーインスツルメンツ(株)製、商品名:TG/DTA6300)を用いて、空気下、昇温速度10℃/分の条件により測定し、重量が3%減少した温度とした。評価結果を表1に示す。
A−2:クレゾールノボラック樹脂(旭有機材工業(株)製、商品名:TR4020G)
A−3:クレゾールノボラック樹脂(旭有機材工業(株)製、商品名:TR4080G)
B−1:トリメチロールプロパントリグリシジルエーテル(新日鉄住金化学(株)製、商品名:ZX−1542、下記式(14)参照)
C−1:トリアリールスルホニウム塩(サンアプロ(株)製、商品名:CPI−101A)
無機フィラー1:3−メタクリロイルオキシプロピルトリメトキシシランでカップリング処理した、平均一次粒子径が15nmであるゾルゲルシリカ
無機フィラー2:3−メタクリロイルオキシプロピルトリメトキシシランでカップリング処理した、平均一次粒子径が45nmであるゾルゲルシリカ
無機フィラー3:3−メタクリロイルオキシプロピルトリメトキシシランでカップリング処理した、平均一次粒子径が120nmであるゾルゲルシリカ
E−1:グリコールウリル誘導体((株)三和ケミカル製、商品名:MX−270)
F−1:9,10−ジブトキシアントラセン(川崎化成工業(株)製、商品名:DBA)
G−1:メチルエチルケトン(和光純薬工業(株)製、商品名:2−ブタノン)
Claims (9)
- (A)成分:フェノール性水酸基を有する樹脂、
(B)成分:アクリロイルオキシ基、メタクリロイルオキシ基、グリシジルオキシ基及び水酸基から選択される1種以上の官能基を、2つ以上有する脂肪族化合物、
(C)成分:光感応性酸発生剤、及び
(D)成分:平均粒子径が100nm以下である無機フィラー、
を含有する感光性樹脂組成物。 - 前記(B)成分が、アクリロイルオキシ基、メタクリロイルオキシ基、グリシジルオキシ基及び水酸基から選択される1種以上の官能基を、3つ以上有する脂肪族化合物である、請求項1に記載の感光性樹脂組成物。
- (E)成分:芳香環、複素環及び脂環からなる群から選ばれる少なくとも1種を有し、かつ、メチロール基又はアルコキシアルキル基を有する化合物を更に含有する、請求項1又は2に記載の感光性樹脂組成物。
- 前記(A)成分100質量部に対して、前記(B)成分を20〜70質量部含有する、請求項1〜3のいずれか一項に記載の感光性樹脂組成物。
- 前記(D)成分が、シリカである、請求項1〜4のいずれか一項に記載の感光性樹脂組成物。
- 支持体と、該支持体上に設けられる感光層とを備え、
前記感光層は、請求項1〜5のいずれか一項に記載の感光性樹脂組成物を用いて形成される、感光性エレメント。 - 請求項1〜5のいずれか一項に記載の感光性樹脂組成物の硬化物。
- 請求項1〜5のいずれか一項に記載の感光性樹脂組成物を基材上に塗布し、前記感光性樹脂組成物を乾燥して感光層を形成する工程と、
前記感光層を所定のパターンに露光し、露光後加熱処理を行う工程と、
加熱処理後の感光層を現像し、得られた樹脂パターンを加熱処理する工程と、を含む、レジストパターンの形成方法。 - 基板上に、請求項6に記載の感光性エレメントの感光層を形成する工程と、
前記感光層を所定のパターンに露光し、露光後加熱処理を行う工程と、
加熱処理後の感光層を現像し、得られた樹脂パターンを加熱処理する工程と、を含む、レジストパターンの形成方法。
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