JPWO2013099063A1 - 基板熱処理装置 - Google Patents
基板熱処理装置 Download PDFInfo
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
- H05B3/0038—Heating devices using lamps for industrial applications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4585—Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
- H05B3/0038—Heating devices using lamps for industrial applications
- H05B3/0047—Heating devices using lamps for industrial applications for semiconductor manufacture
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
- H05B3/009—Heating devices using lamps heating devices not specially adapted for a particular application
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Abstract
Description
基板を載置可能な第1の基板載置部と開口部とが設けられたC字型のサセプタと、
基板を載置可能な第2の基板載置部と前記サセプタを支持するサセプタ支持部とが設けられた基板ステージと、
前記基板ステージの上方であって前記第2の基板載置部と対向する位置に放熱面を備え、前記第2の基板載置部に載置された基板を前記放熱面からの熱で加熱する加熱手段と、
前記第2の基板載置部が前記放熱面に対して所定の離間位置になるよう、前記基板ステージを移動させる移動手段と、
基板受け入れ位置で前記サセプタの下面と当接して当該サセプタを前記サセプタ支持部から離間した状態で支持するリフト部と、
前記サセプタ支持部とは別体に形成されるとともに当該サセプタ支持部に係合され、前記サセプタ支持部に前記サセプタが支持された状態で前記サセプタが環状となるように前記サセプタの開口部を補完する補完部と、を備え、
前記第2の基板載置部に基板が載置され、前記第2の基板載置部が前記放熱面に対して所定の離間位置に位置する際に、前記サセプタは前記補完部とで環状を形成し、前記基板を包囲していることを特徴とする。
環状の円周方向に開口部が設けられたC字型の形状部と、前記C字型の形状部の内側に設けられ、基板を載置可能な爪部と、を有するサセプタと、
基板を載置可能な載置部と前記サセプタを支持するサセプタ支持部とが設けられた基板ステージと、
前記基板ステージの上方であって前記載置部と対向する位置に放熱面を備え、前記載置部に載置された基板を前記放熱面からの熱で加熱する加熱手段と、
前記載置部が前記放熱面に対して所定の離間位置になるよう、前記基板ステージを移動させる移動手段と、
基板受け入れ位置で前記サセプタの下面と当接して当該サセプタを前記サセプタ支持部から離間した状態で支持するリフト部と、
前記サセプタ支持部とは別体に形成されるとともに当該サセプタ支持部に係合され、前記サセプタ支持部に前記サセプタが支持された状態で前記サセプタが環状となるように前記サセプタの開口部を補完する補完部と、を備え、
前記載置部の周辺部には、前記爪部と係合する窪み部が形成されており、
前記載置部に基板が載置され、前記載置部が前記放熱面に対して所定の離間位置に位置する際に、前記サセプタは前記補完部とで環状を形成し、前記基板を包囲していることを特徴とする。
Claims (6)
- 真空処理室内で基板を加熱処理する基板熱処理装置であって、
基板を載置可能な第1の基板載置部と開口部とが設けられたC字型のサセプタと、
基板を載置可能な第2の基板載置部と前記サセプタを支持するサセプタ支持部とが設けられた基板ステージと、
前記基板ステージの上方であって前記第2の基板載置部と対向する位置に放熱面を備え、前記第2の基板載置部に載置された基板を前記放熱面からの熱で加熱する加熱手段と、
前記第2の基板載置部が前記放熱面に対して所定の離間位置になるよう、前記基板ステージを移動させる移動手段と、
基板受け入れ位置で前記サセプタの下面と当接して当該サセプタを前記サセプタ支持部から離間した状態で支持するリフト部と、
前記サセプタ支持部とは別体に形成されるとともに当該サセプタ支持部に係合され、前記サセプタ支持部に前記サセプタが支持された状態で前記サセプタが環状となるように前記サセプタの開口部を補完する補完部と、を備え、
前記第2の基板載置部に基板が載置され、前記第2の基板載置部が前記放熱面に対して所定の離間位置に位置する際に、前記サセプタは前記補完部とで環状を形成し、前記基板を包囲していることを特徴とする基板熱処理装置。 - 前記移動手段によって前記基板ステージが前記放熱面に対して接近する方向に移動した際に、前記サセプタは、前記リフト部から離間して前記サセプタ支持部に支持されることを特徴とする請求項1に記載の基板熱処理装置。
- 前記サセプタが前記サセプタ支持部に保持されたとき、前記第1の基板載置部で載置されていた前記基板は前記第2の基板載置部で支持されることを特徴とする請求項1または2に記載の基板熱処理装置。
- 前記移動手段が前記基板ステージを前記放熱面から離間する方向に移動させたとき、前記リフト部は前記サセプタの下面と当接し、前記基板ステージに対して前記サセプタを上方の位置に支持することを特徴とする請求項1乃至3のいずれか1項に記載の基板熱処理装置。
- 前記第1の基板載置部に前記基板が載置された際に、前記サセプタの上面より低い位置に前記基板の上面が配置されるように前記サセプタの上面は形成されていることを特徴とする請求項1乃至4のいずれか1項に記載の基板熱処理装置。
- 前記サセプタと前記補完部とは、各々同一の材料で形成されていることを特徴とする請求項1乃至5のいずれか1項に記載の基板熱処理装置。
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Application Number | Priority Date | Filing Date | Title |
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JP2011286544 | 2011-12-27 | ||
JP2011286544 | 2011-12-27 | ||
PCT/JP2012/006057 WO2013099063A1 (ja) | 2011-12-27 | 2012-09-24 | 基板熱処理装置 |
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JPWO2013099063A1 true JPWO2013099063A1 (ja) | 2015-04-30 |
JP5969506B2 JP5969506B2 (ja) | 2016-08-17 |
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US (1) | US9603195B2 (ja) |
JP (1) | JP5969506B2 (ja) |
CN (1) | CN104040691B (ja) |
WO (1) | WO2013099063A1 (ja) |
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JP6230437B2 (ja) | 2014-02-04 | 2017-11-15 | 東京エレクトロン株式会社 | 温度測定方法及びプラズマ処理システム |
JP6530377B2 (ja) * | 2014-03-24 | 2019-06-12 | キヤノンアネルバ株式会社 | 半導体基板の凹部の角部を丸める方法及び装置 |
JP2017224644A (ja) * | 2016-06-13 | 2017-12-21 | 株式会社アルバック | 搬送装置 |
JP6833548B2 (ja) * | 2016-06-30 | 2021-02-24 | キヤノン株式会社 | 搬送システム、搬送方法、パターン形成装置、及び物品の製造方法 |
JP6618876B2 (ja) * | 2016-09-26 | 2019-12-11 | 株式会社ニューフレアテクノロジー | 基板処理装置、搬送方法およびサセプタ |
KR102204253B1 (ko) * | 2017-03-23 | 2021-01-18 | 가부시키가이샤 코쿠사이 엘렉트릭 | 발열체, 기판 처리 장치 및 반도체 장치의 제조 방법 |
CN108060406B (zh) * | 2018-01-29 | 2023-09-08 | 北京北方华创微电子装备有限公司 | 遮挡压盘组件、半导体加工装置和方法 |
KR102500219B1 (ko) * | 2018-05-12 | 2023-02-14 | 어플라이드 머티어리얼스, 인코포레이티드 | 통합된 셔터 개라지를 갖는 사전-세정 챔버 |
JP7345289B2 (ja) * | 2019-06-18 | 2023-09-15 | 東京エレクトロン株式会社 | 基板処理装置、基板処理システム及び基板搬送方法 |
US20220157572A1 (en) * | 2020-11-18 | 2022-05-19 | Applied Materials, Inc. | Deposition ring for thin substrate handling via edge clamping |
CN114164418A (zh) * | 2021-11-29 | 2022-03-11 | 深圳优普莱等离子体技术有限公司 | 一种用于化学气相沉积的微波等离子体反应腔及设备 |
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- 2012-09-24 CN CN201280066626.1A patent/CN104040691B/zh active Active
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JP2001210597A (ja) * | 2000-01-28 | 2001-08-03 | Hitachi Kokusai Electric Inc | 半導体製造装置及び半導体装置の製造方法 |
JP4288309B2 (ja) * | 2007-09-03 | 2009-07-01 | キヤノンアネルバ株式会社 | 基板熱処理装置及び基板の熱処理方法 |
JP2009135228A (ja) * | 2007-11-29 | 2009-06-18 | Nuflare Technology Inc | 気相成長装置および気相成長方法 |
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CN104040691B (zh) | 2016-09-07 |
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US20140308028A1 (en) | 2014-10-16 |
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