JPWO2009078415A1 - Ｘ線検査装置および方法 - Google Patents

Ｘ線検査装置および方法 Download PDF

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Publication number
JPWO2009078415A1
JPWO2009078415A1 JP2009546271A JP2009546271A JPWO2009078415A1 JP WO2009078415 A1 JPWO2009078415 A1 JP WO2009078415A1 JP 2009546271 A JP2009546271 A JP 2009546271A JP 2009546271 A JP2009546271 A JP 2009546271A JP WO2009078415 A1 JPWO2009078415 A1 JP WO2009078415A1
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ray
workpiece
imaging surface
camera
central axis
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Japanese (ja)
Inventor
和人 小泉
和人 小泉
達郎 若松
達郎 若松
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株式会社ユニハイトシステム
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/044—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using laminography or tomosynthesis

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2009546271A 2007-12-17 2008-12-16 Ｘ線検査装置および方法 Withdrawn JPWO2009078415A1 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007324831 2007-12-17
JP2007324831 2007-12-17
PCT/JP2008/072886 WO2009078415A1 (fr) 2007-12-17 2008-12-16 Appareil d'examen aux rayons x et procédé

Publications (1)

Publication Number Publication Date
JPWO2009078415A1 true JPWO2009078415A1 (ja) 2011-04-28

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ID=40795530

Family Applications (1)

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JP2009546271A Withdrawn JPWO2009078415A1 (ja) 2007-12-17 2008-12-16 Ｘ線検査装置および方法

Country Status (2)

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JP (1) JPWO2009078415A1 (fr)
WO (1) WO2009078415A1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5444718B2 (ja) * 2009-01-08 2014-03-19 オムロン株式会社 検査方法、検査装置および検査用プログラム
JP2011149738A (ja) * 2010-01-19 2011-08-04 Saki Corp:Kk 補正用治具を用いた検査装置の補正方法、補正用治具を搭載した検査装置
WO2013021413A1 (fr) * 2011-08-05 2013-02-14 株式会社島津製作所 Dispositif de radiographie
JP2013061257A (ja) * 2011-09-14 2013-04-04 Omron Corp Ｘ線検査装置、ｘ線検査装置の制御方法、ｘ線検査装置を制御するためのプログラム、および、当該プログラムを格納した記録媒体
KR101181845B1 (ko) * 2011-12-22 2012-09-11 주식회사 쎄크 Ｓｍｔ 인라인용 자동 엑스선 검사장치
JP5912553B2 (ja) 2012-01-12 2016-04-27 ヤマハ発動機株式会社 プリント基板の複合検査装置
CN102706909A (zh) * 2012-06-17 2012-10-03 无锡市优耐特石化装备有限公司 一种薄壁容器环缝周向检测装置
JP2014190702A (ja) * 2013-03-26 2014-10-06 Nec Corp 検査装置、検査方法及び検査プログラム
KR101467478B1 (ko) * 2013-09-13 2014-12-01 (주)시스트 X선을 이용한 회로소자의 촬영장치 및 방법
GB2534509B (en) 2013-10-21 2020-04-08 Yxlon Int Gmbh Method for rotating a test object in an X-ray inspection system
KR101654825B1 (ko) * 2014-07-08 2016-09-22 (주)자비스 기판의 밀집 검사 부위의 엑스레이 검사 방법
GB2558605B8 (en) 2017-01-09 2022-02-23 Caresoft Global Holdings Ltd Methodology to extract 3D CAD from CT Scan Output
JP6708857B2 (ja) * 2017-10-17 2020-06-10 日本装置開発株式会社 Ｘ線検査装置
JP7224598B2 (ja) * 2019-02-07 2023-02-20 リョーエイ株式会社 傾斜ｘ線検査方法、傾斜ｘ線検査装置及びその精度評価方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5259012A (en) * 1990-08-30 1993-11-02 Four Pi Systems Corporation Laminography system and method with electromagnetically directed multipath radiation source
JPH05157708A (ja) * 1991-12-10 1993-06-25 Toshiba Corp ラミノグラフ
US5687209A (en) * 1995-04-11 1997-11-11 Hewlett-Packard Co. Automatic warp compensation for laminographic circuit board inspection
JPH08327563A (ja) * 1995-06-02 1996-12-13 Toshiba Corp ラミノグラフ
JP2000329710A (ja) * 1999-05-17 2000-11-30 Shimadzu Corp 放射線断層撮影装置、及び、これを用いた物体検査装置
DE10044169A1 (de) * 2000-09-07 2002-03-21 Daimler Chrysler Ag Verfahren zur zerstörungsfreien Wandstärkenprüfung
US6748046B2 (en) * 2000-12-06 2004-06-08 Teradyne, Inc. Off-center tomosynthesis
JP2002296204A (ja) * 2001-03-30 2002-10-09 Matsushita Electric Ind Co Ltd Ｘ線検査装置及び方法
JP4129572B2 (ja) * 2002-05-27 2008-08-06 独立行政法人産業技術総合研究所 傾斜三次元ｘ線ｃｔ画像の再構成方法
JP2004212200A (ja) * 2002-12-27 2004-07-29 Akira Teraoka Ｘ線検査装置、及び該ｘ線検査装置の使用方法
JP4155866B2 (ja) * 2003-05-08 2008-09-24 株式会社日立国際電気 Ｘ線断層撮像装置
JP4386812B2 (ja) * 2003-08-27 2009-12-16 パナソニック株式会社 Ｘ線検査装置

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Publication number Publication date
WO2009078415A1 (fr) 2009-06-25

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