JPS6486524A - Patterning method for chromium film - Google Patents
Patterning method for chromium filmInfo
- Publication number
- JPS6486524A JPS6486524A JP24503587A JP24503587A JPS6486524A JP S6486524 A JPS6486524 A JP S6486524A JP 24503587 A JP24503587 A JP 24503587A JP 24503587 A JP24503587 A JP 24503587A JP S6486524 A JPS6486524 A JP S6486524A
- Authority
- JP
- Japan
- Prior art keywords
- etchant
- chromium film
- pattern
- nitric acid
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62245035A JPH077757B2 (ja) | 1987-09-28 | 1987-09-28 | クロム膜のパターニング方法 |
US07/249,905 US5007984A (en) | 1987-09-28 | 1988-09-27 | Method for etching chromium film formed on substrate |
US07/599,782 US5183533A (en) | 1987-09-28 | 1990-10-17 | Method for etching chromium film formed on substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62245035A JPH077757B2 (ja) | 1987-09-28 | 1987-09-28 | クロム膜のパターニング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6486524A true JPS6486524A (en) | 1989-03-31 |
JPH077757B2 JPH077757B2 (ja) | 1995-01-30 |
Family
ID=17127614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62245035A Expired - Lifetime JPH077757B2 (ja) | 1987-09-28 | 1987-09-28 | クロム膜のパターニング方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH077757B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09298202A (ja) * | 1996-04-30 | 1997-11-18 | Nec Corp | 配線パターンの形成方法 |
US6468357B1 (en) | 2000-02-23 | 2002-10-22 | Nec Corporation | Remover for a ruthenium containing metal and use thereof |
US7669629B2 (en) | 2002-02-05 | 2010-03-02 | Mitsubishi Heavy Industries Ltd. | System for fabricating corrugated board |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5568700A (en) * | 1978-11-14 | 1980-05-23 | Philips Nv | Wiring device and method of manufacturing same |
JPS61124589A (ja) * | 1984-11-17 | 1986-06-12 | Daikin Ind Ltd | エツチング剤組成物 |
-
1987
- 1987-09-28 JP JP62245035A patent/JPH077757B2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5568700A (en) * | 1978-11-14 | 1980-05-23 | Philips Nv | Wiring device and method of manufacturing same |
JPS61124589A (ja) * | 1984-11-17 | 1986-06-12 | Daikin Ind Ltd | エツチング剤組成物 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09298202A (ja) * | 1996-04-30 | 1997-11-18 | Nec Corp | 配線パターンの形成方法 |
US6468357B1 (en) | 2000-02-23 | 2002-10-22 | Nec Corporation | Remover for a ruthenium containing metal and use thereof |
US7699084B2 (en) | 2002-01-23 | 2010-04-20 | Mitsubishi Heavy Industries Ltd. | System for fabricating corrugated board |
US7669629B2 (en) | 2002-02-05 | 2010-03-02 | Mitsubishi Heavy Industries Ltd. | System for fabricating corrugated board |
Also Published As
Publication number | Publication date |
---|---|
JPH077757B2 (ja) | 1995-01-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment |
Free format text: PAYMENT UNTIL: 20080130 Year of fee payment: 13 |