JPS5483771A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5483771A JPS5483771A JP15197077A JP15197077A JPS5483771A JP S5483771 A JPS5483771 A JP S5483771A JP 15197077 A JP15197077 A JP 15197077A JP 15197077 A JP15197077 A JP 15197077A JP S5483771 A JPS5483771 A JP S5483771A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- break
- substrate
- upper edge
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To prevent a break by forming a taper after the formation of a highly- precise thin film pattern.
CONSTITUTION: On field oxidized film 2 on substrate 1, poly Si wiring 3 is formed. Substrate 1 of the corresponding condtitution is covered with synthetic rubber photo resist 4 and an O2-plasma treatment is done to expose the upper edge of layer 3. Next, it is processed at 150° for 30 minutes in N2 and then, the upper edge of layer 3 is etched by a solution of fluoric acid, nitric acid, and water acetic acid. Resist 4 is removed, phosphorus is diffused to layer 3, and the corner is rounded; and then, Al is vapor-deposited and the wiring layer is formed, so that no break will be made.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15197077A JPS5483771A (en) | 1977-12-16 | 1977-12-16 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15197077A JPS5483771A (en) | 1977-12-16 | 1977-12-16 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5483771A true JPS5483771A (en) | 1979-07-04 |
Family
ID=15530191
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15197077A Pending JPS5483771A (en) | 1977-12-16 | 1977-12-16 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5483771A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59123234A (en) * | 1982-12-28 | 1984-07-17 | Tohoku Metal Ind Ltd | Microscopic processing method |
-
1977
- 1977-12-16 JP JP15197077A patent/JPS5483771A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59123234A (en) * | 1982-12-28 | 1984-07-17 | Tohoku Metal Ind Ltd | Microscopic processing method |
JPH0479130B2 (en) * | 1982-12-28 | 1992-12-15 | Tokin Corp |
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