JPS53113234A - Gas plasma etching method - Google Patents

Gas plasma etching method

Info

Publication number
JPS53113234A
JPS53113234A JP2835177A JP2835177A JPS53113234A JP S53113234 A JPS53113234 A JP S53113234A JP 2835177 A JP2835177 A JP 2835177A JP 2835177 A JP2835177 A JP 2835177A JP S53113234 A JPS53113234 A JP S53113234A
Authority
JP
Japan
Prior art keywords
plasma etching
etching method
gas plasma
etching
masking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2835177A
Other languages
Japanese (ja)
Inventor
Kenzo Yanagida
Fumio Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2835177A priority Critical patent/JPS53113234A/en
Publication of JPS53113234A publication Critical patent/JPS53113234A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To accomplish precise formation of desired etching pattern through masking on the side to be etched of a substrate with a resist and entire coating on the other side thereof with a etching-proof material.
COPYRIGHT: (C)1978,JPO&Japio
JP2835177A 1977-03-15 1977-03-15 Gas plasma etching method Pending JPS53113234A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2835177A JPS53113234A (en) 1977-03-15 1977-03-15 Gas plasma etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2835177A JPS53113234A (en) 1977-03-15 1977-03-15 Gas plasma etching method

Publications (1)

Publication Number Publication Date
JPS53113234A true JPS53113234A (en) 1978-10-03

Family

ID=12246173

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2835177A Pending JPS53113234A (en) 1977-03-15 1977-03-15 Gas plasma etching method

Country Status (1)

Country Link
JP (1) JPS53113234A (en)

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