JPS51148366A - Pattern formation method - Google Patents

Pattern formation method

Info

Publication number
JPS51148366A
JPS51148366A JP7257675A JP7257675A JPS51148366A JP S51148366 A JPS51148366 A JP S51148366A JP 7257675 A JP7257675 A JP 7257675A JP 7257675 A JP7257675 A JP 7257675A JP S51148366 A JPS51148366 A JP S51148366A
Authority
JP
Japan
Prior art keywords
formation method
pattern formation
rise
accuracy
done
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7257675A
Other languages
Japanese (ja)
Other versions
JPS5414471B2 (en
Inventor
Kenzo Yanagida
Toshihiro Ishizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7257675A priority Critical patent/JPS51148366A/en
Publication of JPS51148366A publication Critical patent/JPS51148366A/en
Publication of JPS5414471B2 publication Critical patent/JPS5414471B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To rise the accuracy of a thin plate pattern using an etched mask with gas plasma or the reverse method when an ion etching is done.
COPYRIGHT: (C)1976,JPO&Japio
JP7257675A 1975-06-14 1975-06-14 Pattern formation method Granted JPS51148366A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7257675A JPS51148366A (en) 1975-06-14 1975-06-14 Pattern formation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7257675A JPS51148366A (en) 1975-06-14 1975-06-14 Pattern formation method

Publications (2)

Publication Number Publication Date
JPS51148366A true JPS51148366A (en) 1976-12-20
JPS5414471B2 JPS5414471B2 (en) 1979-06-07

Family

ID=13493335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7257675A Granted JPS51148366A (en) 1975-06-14 1975-06-14 Pattern formation method

Country Status (1)

Country Link
JP (1) JPS51148366A (en)

Also Published As

Publication number Publication date
JPS5414471B2 (en) 1979-06-07

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