JPS647623A - Cleaning method for si surface by dry type - Google Patents

Cleaning method for si surface by dry type

Info

Publication number
JPS647623A
JPS647623A JP16122287A JP16122287A JPS647623A JP S647623 A JPS647623 A JP S647623A JP 16122287 A JP16122287 A JP 16122287A JP 16122287 A JP16122287 A JP 16122287A JP S647623 A JPS647623 A JP S647623A
Authority
JP
Japan
Prior art keywords
generated
gas
ultraviolet light
substrate
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16122287A
Other languages
English (en)
Other versions
JPH0630354B2 (ja
Inventor
Shigeyuki Sugito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP16122287A priority Critical patent/JPH0630354B2/ja
Publication of JPS647623A publication Critical patent/JPS647623A/ja
Publication of JPH0630354B2 publication Critical patent/JPH0630354B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP16122287A 1987-06-30 1987-06-30 Ｓｉ表面の乾式による洗浄方法 Expired - Lifetime JPH0630354B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16122287A JPH0630354B2 (ja) 1987-06-30 1987-06-30 Ｓｉ表面の乾式による洗浄方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16122287A JPH0630354B2 (ja) 1987-06-30 1987-06-30 Ｓｉ表面の乾式による洗浄方法

Publications (2)

Publication Number Publication Date
JPS647623A true JPS647623A (en) 1989-01-11
JPH0630354B2 JPH0630354B2 (ja) 1994-04-20

Family

ID=15730945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16122287A Expired - Lifetime JPH0630354B2 (ja) 1987-06-30 1987-06-30 Ｓｉ表面の乾式による洗浄方法

Country Status (1)

Country Link
JP (1) JPH0630354B2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01293618A (ja) * 1988-05-23 1989-11-27 Mitsubishi Electric Corp プラズマエッチング方法
JPH08300366A (ja) * 1995-05-01 1996-11-19 Bridgestone Corp 加硫金型の清浄方法
JPH08300367A (ja) * 1995-05-02 1996-11-19 Bridgestone Corp 加硫金型の清浄方法
CN106748794A (zh) * 2017-01-12 2017-05-31 山东德普化工科技有限公司 一种二（三氯甲基）碳酸酯的合成装置与方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01293618A (ja) * 1988-05-23 1989-11-27 Mitsubishi Electric Corp プラズマエッチング方法
JPH08300366A (ja) * 1995-05-01 1996-11-19 Bridgestone Corp 加硫金型の清浄方法
JPH08300367A (ja) * 1995-05-02 1996-11-19 Bridgestone Corp 加硫金型の清浄方法
CN106748794A (zh) * 2017-01-12 2017-05-31 山东德普化工科技有限公司 一种二（三氯甲基）碳酸酯的合成装置与方法

Also Published As

Publication number Publication date
JPH0630354B2 (ja) 1994-04-20

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