JPS6469029A - Semiconductor integrated circuit - Google Patents
Semiconductor integrated circuitInfo
- Publication number
- JPS6469029A JPS6469029A JP22761487A JP22761487A JPS6469029A JP S6469029 A JPS6469029 A JP S6469029A JP 22761487 A JP22761487 A JP 22761487A JP 22761487 A JP22761487 A JP 22761487A JP S6469029 A JPS6469029 A JP S6469029A
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline silicon
- silicon layer
- section
- layer
- crossing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
- Laser Beam Processing (AREA)
- Techniques For Improving Reliability Of Storages (AREA)
- Read Only Memory (AREA)
Abstract
PURPOSE:To prevent the generation of a short circuit by forming a polycrystalline silicon layer, crossing the stepped section of an insulating film. CONSTITUTION:A polycrystalline silicon layer 10 shapes a fuse section in specified width and length, crossing a stepped section formed by a polycrystalline silicon layer 9 and an inter-layer insulating film 3, and a pair of electrodes consisting of Al films 5-1, 5-2 are ohmic-connected at both ends of the layer 10. When a section between the Al films 5-1, 5-2 is opened, the polycrystalline silicon layer 10 is fusion-cut by laser beams in a section passing on the polycrystalline silicon layer 9. Accordingly, silicon melted at the time of cutting by laser beams is not scattered uniformly, and probability in which a short circuit is generated due to the residue of melted silicon is lowered by the effect of the stepped section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22761487A JPS6469029A (en) | 1987-09-10 | 1987-09-10 | Semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22761487A JPS6469029A (en) | 1987-09-10 | 1987-09-10 | Semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6469029A true JPS6469029A (en) | 1989-03-15 |
Family
ID=16863694
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22761487A Pending JPS6469029A (en) | 1987-09-10 | 1987-09-10 | Semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6469029A (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52149482A (en) * | 1976-06-04 | 1977-12-12 | Bosch Gmbh Robert | Device for isolating conductive path on ic |
JPS59163859A (en) * | 1983-03-09 | 1984-09-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS6084837A (en) * | 1983-10-17 | 1985-05-14 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS60136333A (en) * | 1983-12-26 | 1985-07-19 | Oki Electric Ind Co Ltd | Laser fuse device |
JPS63246844A (en) * | 1987-04-02 | 1988-10-13 | Matsushita Electronics Corp | Semiconductor fuse |
-
1987
- 1987-09-10 JP JP22761487A patent/JPS6469029A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52149482A (en) * | 1976-06-04 | 1977-12-12 | Bosch Gmbh Robert | Device for isolating conductive path on ic |
JPS59163859A (en) * | 1983-03-09 | 1984-09-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS6084837A (en) * | 1983-10-17 | 1985-05-14 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS60136333A (en) * | 1983-12-26 | 1985-07-19 | Oki Electric Ind Co Ltd | Laser fuse device |
JPS63246844A (en) * | 1987-04-02 | 1988-10-13 | Matsushita Electronics Corp | Semiconductor fuse |
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