JPS6464225A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS6464225A
JPS6464225A JP21919987A JP21919987A JPS6464225A JP S6464225 A JPS6464225 A JP S6464225A JP 21919987 A JP21919987 A JP 21919987A JP 21919987 A JP21919987 A JP 21919987A JP S6464225 A JPS6464225 A JP S6464225A
Authority
JP
Japan
Prior art keywords
substrate member
etching
semiconductor substrate
crystal face
etchant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21919987A
Other languages
English (en)
Inventor
Takeyuki Yao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP21919987A priority Critical patent/JPS6464225A/ja
Publication of JPS6464225A publication Critical patent/JPS6464225A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Weting (AREA)
JP21919987A 1987-09-03 1987-09-03 Manufacture of semiconductor device Pending JPS6464225A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21919987A JPS6464225A (en) 1987-09-03 1987-09-03 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21919987A JPS6464225A (en) 1987-09-03 1987-09-03 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6464225A true JPS6464225A (en) 1989-03-10

Family

ID=16731758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21919987A Pending JPS6464225A (en) 1987-09-03 1987-09-03 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6464225A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0298971A (ja) * 1988-10-05 1990-04-11 Nippon Denso Co Ltd 半導体圧力センサ
JP2005327770A (ja) * 2004-05-12 2005-11-24 Shindengen Electric Mfg Co Ltd 半導体装置及びその製造方法
JP2021025966A (ja) * 2019-08-08 2021-02-22 ローム株式会社 Ｍｅｍｓセンサ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0298971A (ja) * 1988-10-05 1990-04-11 Nippon Denso Co Ltd 半導体圧力センサ
JP2005327770A (ja) * 2004-05-12 2005-11-24 Shindengen Electric Mfg Co Ltd 半導体装置及びその製造方法
JP2021025966A (ja) * 2019-08-08 2021-02-22 ローム株式会社 Ｍｅｍｓセンサ

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