JPS5343481A - Mirror surface etching method of sapphire substrate crystal - Google Patents

Mirror surface etching method of sapphire substrate crystal

Info

Publication number
JPS5343481A
JPS5343481A JP11865676A JP11865676A JPS5343481A JP S5343481 A JPS5343481 A JP S5343481A JP 11865676 A JP11865676 A JP 11865676A JP 11865676 A JP11865676 A JP 11865676A JP S5343481 A JPS5343481 A JP S5343481A
Authority
JP
Japan
Prior art keywords
mirror surface
etching method
sapphire substrate
surface etching
substrate crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11865676A
Other languages
Japanese (ja)
Inventor
Yoshimasa Oki
Yasuo Shimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11865676A priority Critical patent/JPS5343481A/en
Publication of JPS5343481A publication Critical patent/JPS5343481A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To obtain mirror surfaces free from etch pits and grooves by maintaining a solution comprising mixing of phosphoric acid and sulfuric acid at 3:1 at 250 to 300°C and etching sapphire crystals.
COPYRIGHT: (C)1978,JPO&Japio
JP11865676A 1976-10-01 1976-10-01 Mirror surface etching method of sapphire substrate crystal Pending JPS5343481A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11865676A JPS5343481A (en) 1976-10-01 1976-10-01 Mirror surface etching method of sapphire substrate crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11865676A JPS5343481A (en) 1976-10-01 1976-10-01 Mirror surface etching method of sapphire substrate crystal

Publications (1)

Publication Number Publication Date
JPS5343481A true JPS5343481A (en) 1978-04-19

Family

ID=14741955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11865676A Pending JPS5343481A (en) 1976-10-01 1976-10-01 Mirror surface etching method of sapphire substrate crystal

Country Status (1)

Country Link
JP (1) JPS5343481A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004363502A (en) * 2003-06-06 2004-12-24 Nec Electronics Corp Manufacturing method of semiconductor device
US7045223B2 (en) 2003-09-23 2006-05-16 Saint-Gobain Ceramics & Plastics, Inc. Spinel articles and methods for forming same
US7326477B2 (en) 2003-09-23 2008-02-05 Saint-Gobain Ceramics & Plastics, Inc. Spinel boules, wafers, and methods for fabricating same
US7919815B1 (en) 2005-02-24 2011-04-05 Saint-Gobain Ceramics & Plastics, Inc. Spinel wafers and methods of preparation

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004363502A (en) * 2003-06-06 2004-12-24 Nec Electronics Corp Manufacturing method of semiconductor device
US7718532B2 (en) 2003-06-06 2010-05-18 Nec Electronics Corporation Method of forming a high-k film on a semiconductor device
US7045223B2 (en) 2003-09-23 2006-05-16 Saint-Gobain Ceramics & Plastics, Inc. Spinel articles and methods for forming same
US7326477B2 (en) 2003-09-23 2008-02-05 Saint-Gobain Ceramics & Plastics, Inc. Spinel boules, wafers, and methods for fabricating same
US7919815B1 (en) 2005-02-24 2011-04-05 Saint-Gobain Ceramics & Plastics, Inc. Spinel wafers and methods of preparation

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