JPS5285489A - Semiconductor reactance element - Google Patents
Semiconductor reactance elementInfo
- Publication number
- JPS5285489A JPS5285489A JP154776A JP154776A JPS5285489A JP S5285489 A JPS5285489 A JP S5285489A JP 154776 A JP154776 A JP 154776A JP 154776 A JP154776 A JP 154776A JP S5285489 A JPS5285489 A JP S5285489A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- reactance element
- reactance
- depressions
- slopes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
Abstract
PURPOSE:A monolithic circuit including reactance is realized by using the slopes of the depressions or grooves formed in a silicon crystal substrate by anisotropic etching.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP154776A JPS5285489A (en) | 1976-01-09 | 1976-01-09 | Semiconductor reactance element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP154776A JPS5285489A (en) | 1976-01-09 | 1976-01-09 | Semiconductor reactance element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5285489A true JPS5285489A (en) | 1977-07-15 |
Family
ID=11504537
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP154776A Pending JPS5285489A (en) | 1976-01-09 | 1976-01-09 | Semiconductor reactance element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5285489A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0653414A (en) * | 1992-07-31 | 1994-02-25 | Mitsubishi Electric Corp | Microwave integrated circuit |
JP2009124112A (en) * | 2007-10-24 | 2009-06-04 | Denso Corp | Semiconductor device and method of manufacturing the same |
JP2019537268A (en) * | 2016-11-24 | 2019-12-19 | ムラタ インテグレイテッド パッシブ ソリューションズ | Integrated electronic components suitable for broadband bias |
-
1976
- 1976-01-09 JP JP154776A patent/JPS5285489A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0653414A (en) * | 1992-07-31 | 1994-02-25 | Mitsubishi Electric Corp | Microwave integrated circuit |
JP2009124112A (en) * | 2007-10-24 | 2009-06-04 | Denso Corp | Semiconductor device and method of manufacturing the same |
JP4600563B2 (en) * | 2007-10-24 | 2010-12-15 | 株式会社デンソー | Semiconductor device and manufacturing method thereof |
JP2019537268A (en) * | 2016-11-24 | 2019-12-19 | ムラタ インテグレイテッド パッシブ ソリューションズ | Integrated electronic components suitable for broadband bias |
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