JPS51148355A - Single crystal semiconductor base plate - Google Patents
Single crystal semiconductor base plateInfo
- Publication number
- JPS51148355A JPS51148355A JP7258275A JP7258275A JPS51148355A JP S51148355 A JPS51148355 A JP S51148355A JP 7258275 A JP7258275 A JP 7258275A JP 7258275 A JP7258275 A JP 7258275A JP S51148355 A JPS51148355 A JP S51148355A
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- single crystal
- crystal semiconductor
- semiconductor base
- semiconductors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent the generation of slip lines and to improve the reverse directional bias specific characteristics by doing the mirror grinding of a back face where a semiconductor element is not formed and giving a mechanical damage as well in the manufacturing process of Si semiconductors.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7258275A JPS51148355A (en) | 1975-06-14 | 1975-06-14 | Single crystal semiconductor base plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7258275A JPS51148355A (en) | 1975-06-14 | 1975-06-14 | Single crystal semiconductor base plate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51148355A true JPS51148355A (en) | 1976-12-20 |
Family
ID=13493503
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7258275A Pending JPS51148355A (en) | 1975-06-14 | 1975-06-14 | Single crystal semiconductor base plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51148355A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54110783A (en) * | 1978-02-20 | 1979-08-30 | Hitachi Ltd | Semiconductor substrate and its manufacture |
JPS5681934A (en) * | 1979-12-10 | 1981-07-04 | Hitachi Ltd | Formation of semiconductor element |
JPS586140A (en) * | 1981-07-03 | 1983-01-13 | Nec Corp | Manufacture of silicon wafer |
JPS6047427A (en) * | 1983-08-26 | 1985-03-14 | Komatsu Denshi Kinzoku Kk | Bsd-imparted semiconductor substrate |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5028753A (en) * | 1973-07-13 | 1975-03-24 | ||
JPS5051665A (en) * | 1973-09-07 | 1975-05-08 |
-
1975
- 1975-06-14 JP JP7258275A patent/JPS51148355A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5028753A (en) * | 1973-07-13 | 1975-03-24 | ||
JPS5051665A (en) * | 1973-09-07 | 1975-05-08 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54110783A (en) * | 1978-02-20 | 1979-08-30 | Hitachi Ltd | Semiconductor substrate and its manufacture |
JPS5681934A (en) * | 1979-12-10 | 1981-07-04 | Hitachi Ltd | Formation of semiconductor element |
JPS586140A (en) * | 1981-07-03 | 1983-01-13 | Nec Corp | Manufacture of silicon wafer |
JPS6047427A (en) * | 1983-08-26 | 1985-03-14 | Komatsu Denshi Kinzoku Kk | Bsd-imparted semiconductor substrate |
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