JPS5352379A - Production of dielectric isolated ic substrate - Google Patents

Production of dielectric isolated ic substrate

Info

Publication number
JPS5352379A
JPS5352379A JP12723176A JP12723176A JPS5352379A JP S5352379 A JPS5352379 A JP S5352379A JP 12723176 A JP12723176 A JP 12723176A JP 12723176 A JP12723176 A JP 12723176A JP S5352379 A JPS5352379 A JP S5352379A
Authority
JP
Japan
Prior art keywords
substrate
production
dielectric isolated
reduction
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12723176A
Other languages
Japanese (ja)
Inventor
Yushi Kase
Tsukasa Masuda
Sadao Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12723176A priority Critical patent/JPS5352379A/en
Publication of JPS5352379A publication Critical patent/JPS5352379A/en
Pending legal-status Critical Current

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  • Element Separation (AREA)

Abstract

PURPOSE: The reduction in the variation in the thickness of single crystal silicon island form regions as well as the reduction in the thickness itself thereof are made possible.
COPYRIGHT: (C)1978,JPO&Japio
JP12723176A 1976-10-25 1976-10-25 Production of dielectric isolated ic substrate Pending JPS5352379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12723176A JPS5352379A (en) 1976-10-25 1976-10-25 Production of dielectric isolated ic substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12723176A JPS5352379A (en) 1976-10-25 1976-10-25 Production of dielectric isolated ic substrate

Publications (1)

Publication Number Publication Date
JPS5352379A true JPS5352379A (en) 1978-05-12

Family

ID=14954961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12723176A Pending JPS5352379A (en) 1976-10-25 1976-10-25 Production of dielectric isolated ic substrate

Country Status (1)

Country Link
JP (1) JPS5352379A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05226464A (en) * 1992-02-10 1993-09-03 Mitsubishi Materials Corp Manufacture of joined dielectric isolation wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05226464A (en) * 1992-02-10 1993-09-03 Mitsubishi Materials Corp Manufacture of joined dielectric isolation wafer

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