JPS6435310A - Multidimensional measuring machine - Google Patents

Multidimensional measuring machine

Info

Publication number
JPS6435310A
JPS6435310A JP62192335A JP19233587A JPS6435310A JP S6435310 A JPS6435310 A JP S6435310A JP 62192335 A JP62192335 A JP 62192335A JP 19233587 A JP19233587 A JP 19233587A JP S6435310 A JPS6435310 A JP S6435310A
Authority
JP
Japan
Prior art keywords
traverse
controls
axial
air bearing
guide part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62192335A
Other languages
English (en)
Other versions
JPH0439011B2 (ja
Inventor
Wasaku Tezuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Original Assignee
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp, Mitsutoyo Kiko Co Ltd filed Critical Mitutoyo Corp
Priority to JP62192335A priority Critical patent/JPS6435310A/ja
Priority to US07/180,765 priority patent/US4852267A/en
Priority to DE3815198A priority patent/DE3815198C2/de
Priority to GB8810730A priority patent/GB2207505B/en
Priority to BR8802502A priority patent/BR8802502A/pt
Publication of JPS6435310A publication Critical patent/JPS6435310A/ja
Publication of JPH0439011B2 publication Critical patent/JPH0439011B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0009—Guiding surfaces; Arrangements compensating for non-linearity there-of
JP62192335A 1987-07-31 1987-07-31 Multidimensional measuring machine Granted JPS6435310A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP62192335A JPS6435310A (en) 1987-07-31 1987-07-31 Multidimensional measuring machine
US07/180,765 US4852267A (en) 1987-07-31 1988-04-12 Coordinate measuring machine having a guide section for a column of a measuring member support body
DE3815198A DE3815198C2 (de) 1987-07-31 1988-05-04 Koordinatenmeßgerät
GB8810730A GB2207505B (en) 1987-07-31 1988-05-06 Coordinate measuring machine
BR8802502A BR8802502A (pt) 1987-07-31 1988-05-18 Maquina de medicao de coordenadas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62192335A JPS6435310A (en) 1987-07-31 1987-07-31 Multidimensional measuring machine

Publications (2)

Publication Number Publication Date
JPS6435310A true JPS6435310A (en) 1989-02-06
JPH0439011B2 JPH0439011B2 (ja) 1992-06-26

Family

ID=16289571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62192335A Granted JPS6435310A (en) 1987-07-31 1987-07-31 Multidimensional measuring machine

Country Status (5)

Country Link
US (1) US4852267A (ja)
JP (1) JPS6435310A (ja)
BR (1) BR8802502A (ja)
DE (1) DE3815198C2 (ja)
GB (1) GB2207505B (ja)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002361852A (ja) * 2001-06-07 2002-12-18 Dainippon Printing Co Ltd パターン形成装置
JP2003191462A (ja) * 2001-12-27 2003-07-08 Seiko Epson Corp 描画装置、並びにこれを用いた液晶表示装置の製造方法、有機ｅｌ装置の製造方法、電子放出装置の製造方法、ｐｄｐ装置の製造方法、電気泳動表示装置の製造方法、カラーフィルタの製造方法、有機ｅｌの製造方法、スペーサ形成方法、金属配線形成方法、レンズ形成方法、レジスト形成方法および光拡散体形成方法
JP2006287098A (ja) * 2005-04-04 2006-10-19 Nsk Ltd 位置決め装置
JP2016142542A (ja) * 2015-01-30 2016-08-08 株式会社東京精密 三次元座標測定装置
JP2016145822A (ja) * 2015-01-30 2016-08-12 株式会社東京精密 三次元座標測定装置
JP2016145824A (ja) * 2015-01-30 2016-08-12 株式会社東京精密 三次元座標測定装置
JP2017075962A (ja) * 2015-01-30 2017-04-20 株式会社東京精密 三次元座標測定装置
CN110537076A (zh) * 2017-04-19 2019-12-03 瑞尼斯豪公司 支承布置
JP2021092590A (ja) * 2021-03-16 2021-06-17 株式会社東京精密 三次元座標測定装置

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3841488A1 (de) * 1988-12-09 1990-06-13 Zeiss Carl Fa Koordinatenmessgeraet mit einem oder mehreren fuehrungselementen aus aluminium
US4882847A (en) * 1989-02-03 1989-11-28 The Warner And Swasey Company Coordinate measuring machine with improved carriage way arrangement
US4958438A (en) * 1989-03-30 1990-09-25 The Warner & Swasey Company Rotary table for a coordinate measuring machine and method of determining the axis of table rotation
EP0400208A1 (en) * 1989-05-30 1990-12-05 THE WARNER & SWASEY COMPANY Way bearing arrangement for a horizontal arm coordinate measuring machine
US5177875A (en) * 1990-08-20 1993-01-12 Automatic Handling, Inc. Measuring machine
CA2053405C (en) * 1991-10-11 1999-12-14 Viktor Zakrajsek Motion control system
US5173613A (en) * 1991-04-22 1992-12-22 Warner & Swasey Co. Sheffield Measurement Div. Coordinate measuring machine with improved table support
GB2263338B (en) * 1992-01-08 1995-06-14 Rank Taylor Hobson Ltd Metrological apparatus
US5257461A (en) * 1992-04-27 1993-11-02 Warner & Swasey Coordinate measuring machine construction
JP2959679B2 (ja) * 1996-11-15 1999-10-06 ポハング アイロン アンド スティール シーオー．，エルティーディー． 厚さ測定機及び厚さ測定方法
JP3806894B2 (ja) * 1998-11-26 2006-08-09 日立ビアメカニクス株式会社 プリント基板加工機
DE29904767U1 (de) 1999-03-16 1999-06-02 Zeiss Carl Fa Koordinatenmeßgerät mit einem biegesteifen Meßtisch
JP2004317243A (ja) * 2003-04-15 2004-11-11 Mitsutoyo Corp 測定機
JP4722400B2 (ja) * 2004-01-26 2011-07-13 株式会社ミツトヨ ガイドレールの支持装置、ガイドレール装置、駆動装置および測定機
JP2005299784A (ja) * 2004-04-09 2005-10-27 Mitsutoyo Corp スライダ装置および測定機
CN102645190A (zh) * 2012-04-13 2012-08-22 苏州怡信光电科技有限公司 用于测量异形件的三坐标测量仪
DE102013210821A1 (de) * 2013-06-10 2014-12-11 Carl Zeiss Industrielle Messtechnik Gmbh Koordinatenmessgerät
KR101595729B1 (ko) * 2013-12-30 2016-02-19 코오롱인더스트리 주식회사 방탄소재 및 그의 제조방법
DE102016101695B4 (de) 2015-02-02 2020-10-01 Jenoptik Optical Systems Gmbh Positioniervorrichtung mit einer über Luftlager lateral verschiebbaren und ausgerichteten Halteplatte
CN112050767A (zh) * 2020-08-28 2020-12-08 南京昆程仕科技有限公司 一种面向教育版的微型坐标测量机

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1393035A (en) * 1971-07-09 1975-05-07 Olivetti & Co Spa Precision measuring apparatus with aerostatic bearings
SU1151060A1 (ru) * 1984-02-13 1985-11-23 Вильнюсский Филиал Экспериментального Научно-Исследовательского Института Металлорежущих Станков Координатна измерительна машина
US4630381A (en) * 1984-07-24 1986-12-23 Mitutoyo Mfg. Co., Ltd. Coordinate measuring instrument
BR8604536A (pt) * 1985-01-22 1987-07-14 Mitutoyo Mfg Co Ltd Instrumento para medicao de coordenadas
DE3542766C2 (de) * 1985-12-04 1994-08-11 Mauser Werke Oberndorf Meßmaschine
US4610089A (en) * 1985-12-05 1986-09-09 The Warner & Swasey Company Bridge type coordinate measuring machine
US4682418A (en) * 1986-07-07 1987-07-28 The Warner & Swasey Company Coordinate measuring machine

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002361852A (ja) * 2001-06-07 2002-12-18 Dainippon Printing Co Ltd パターン形成装置
JP2003191462A (ja) * 2001-12-27 2003-07-08 Seiko Epson Corp 描画装置、並びにこれを用いた液晶表示装置の製造方法、有機ｅｌ装置の製造方法、電子放出装置の製造方法、ｐｄｐ装置の製造方法、電気泳動表示装置の製造方法、カラーフィルタの製造方法、有機ｅｌの製造方法、スペーサ形成方法、金属配線形成方法、レンズ形成方法、レジスト形成方法および光拡散体形成方法
JP2006287098A (ja) * 2005-04-04 2006-10-19 Nsk Ltd 位置決め装置
JP2019015746A (ja) * 2015-01-30 2019-01-31 株式会社東京精密 三次元座標測定装置
JP2019035764A (ja) * 2015-01-30 2019-03-07 株式会社東京精密 三次元座標測定装置
JP2016145824A (ja) * 2015-01-30 2016-08-12 株式会社東京精密 三次元座標測定装置
JP2017075962A (ja) * 2015-01-30 2017-04-20 株式会社東京精密 三次元座標測定装置
JP2017207500A (ja) * 2015-01-30 2017-11-24 株式会社東京精密 三次元座標測定装置
JP2018017738A (ja) * 2015-01-30 2018-02-01 株式会社東京精密 三次元座標測定装置
US9921049B2 (en) 2015-01-30 2018-03-20 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measurement apparatus
JP2018087822A (ja) * 2015-01-30 2018-06-07 株式会社東京精密 三次元座標測定装置
JP2018124288A (ja) * 2015-01-30 2018-08-09 株式会社東京精密 三次元座標測定装置
JP2016142542A (ja) * 2015-01-30 2016-08-08 株式会社東京精密 三次元座標測定装置
JP2019035777A (ja) * 2015-01-30 2019-03-07 株式会社東京精密 三次元座標測定装置
JP2016145822A (ja) * 2015-01-30 2016-08-12 株式会社東京精密 三次元座標測定装置
JP2019056713A (ja) * 2015-01-30 2019-04-11 株式会社東京精密 三次元座標測定装置
JP2019070666A (ja) * 2015-01-30 2019-05-09 株式会社東京精密 三次元座標測定装置
JP2019124707A (ja) * 2015-01-30 2019-07-25 株式会社東京精密 三次元座標測定装置
EP3527931A1 (en) 2015-01-30 2019-08-21 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measurement apparatus
US11067382B2 (en) 2015-01-30 2021-07-20 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measurement apparatus
US10663283B2 (en) 2015-01-30 2020-05-26 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measurement apparatus
JP2021043219A (ja) * 2015-01-30 2021-03-18 株式会社東京精密 三次元座標測定装置
US11060836B2 (en) 2017-04-19 2021-07-13 Renishaw Plc Bearing arrangement
CN110537076A (zh) * 2017-04-19 2019-12-03 瑞尼斯豪公司 支承布置
CN110537076B (zh) * 2017-04-19 2021-09-03 瑞尼斯豪公司 支承布置
JP2021092590A (ja) * 2021-03-16 2021-06-17 株式会社東京精密 三次元座標測定装置

Also Published As

Publication number Publication date
US4852267A (en) 1989-08-01
BR8802502A (pt) 1989-02-14
GB2207505A (en) 1989-02-01
JPH0439011B2 (ja) 1992-06-26
GB8810730D0 (en) 1988-06-08
DE3815198A1 (de) 1989-02-09
GB2207505B (en) 1991-04-03
DE3815198C2 (de) 1997-07-31

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