DE29904767U1 - Koordinatenmeßgerät mit einem biegesteifen Meßtisch - Google Patents

Koordinatenmeßgerät mit einem biegesteifen Meßtisch

Info

Publication number
DE29904767U1
DE29904767U1 DE29904767U DE29904767U DE29904767U1 DE 29904767 U1 DE29904767 U1 DE 29904767U1 DE 29904767 U DE29904767 U DE 29904767U DE 29904767 U DE29904767 U DE 29904767U DE 29904767 U1 DE29904767 U1 DE 29904767U1
Authority
DE
Germany
Prior art keywords
rigid
measuring device
coordinate
measuring
coordinate measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29904767U
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Carl Zeiss AG
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss AG filed Critical Carl Zeiss SMT GmbH
Priority to DE29904767U priority Critical patent/DE29904767U1/de
Publication of DE29904767U1 publication Critical patent/DE29904767U1/de
Priority to US09/405,132 priority patent/US6655037B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE29904767U 1999-03-16 1999-03-16 Koordinatenmeßgerät mit einem biegesteifen Meßtisch Expired - Lifetime DE29904767U1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE29904767U DE29904767U1 (de) 1999-03-16 1999-03-16 Koordinatenmeßgerät mit einem biegesteifen Meßtisch
US09/405,132 US6655037B2 (en) 1999-03-16 1999-09-24 Coordinate measuring apparatus having a bending-resistant measuring table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE29904767U DE29904767U1 (de) 1999-03-16 1999-03-16 Koordinatenmeßgerät mit einem biegesteifen Meßtisch

Publications (1)

Publication Number Publication Date
DE29904767U1 true DE29904767U1 (de) 1999-06-02

Family

ID=8070902

Family Applications (1)

Application Number Title Priority Date Filing Date
DE29904767U Expired - Lifetime DE29904767U1 (de) 1999-03-16 1999-03-16 Koordinatenmeßgerät mit einem biegesteifen Meßtisch

Country Status (2)

Country Link
US (1) US6655037B2 (de)
DE (1) DE29904767U1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6640505B1 (en) * 2001-10-25 2003-11-04 Bebotech Corporation Hybrid arched overfilled structure
JP4136363B2 (ja) * 2001-11-29 2008-08-20 キヤノン株式会社 位置決め装置及びそれを用いた露光装置
US7578178B2 (en) * 2007-09-28 2009-08-25 United Technologies Corporation Method of inspecting turbine internal cooling features using non-contact scanners
EP2472216B1 (de) * 2010-12-30 2013-08-14 Hexagon Metrology S.p.A. Koordinatenmessgerät
DE102017113695B3 (de) * 2017-06-21 2018-12-27 Carl Mahr Holding Gmbh Wippenloses Messsystem für ein Messgerät
DE102017113699B3 (de) 2017-06-21 2018-06-28 Carl Mahr Holding Gmbh Messsystem mit einer Kugelführungseinheit für ein Messgerät

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US326925A (en) 1885-09-22 Island
US1157762A (en) 1915-02-17 1915-10-26 Taft Peirce Mfg Co Surface-plate.
US2615479A (en) 1948-06-14 1952-10-28 Roswell D Bearup Woodsawing machine and shaper attachment therefor
US3968712A (en) 1975-05-01 1976-07-13 The Singer Company Fabricated table for stationary power tools
CH608607A5 (de) 1976-02-14 1979-01-15 Bayerische Motoren Werke Ag
JPS5558401A (en) 1978-10-26 1980-05-01 Mitsutoyo Mfg Co Ltd Shape measuring instrument
JPS6435310A (en) 1987-07-31 1989-02-06 Mitutoyo Corp Multidimensional measuring machine
US4763420A (en) 1987-10-06 1988-08-16 Brown & Sharpe Manufacturing Company Base assembly for coordinate measuring machine
GB8808280D0 (en) 1988-04-08 1988-05-11 Lk Tool Co Ltd Machine structure
GB8808281D0 (en) 1988-04-08 1988-05-11 Lk Tool Co Ltd Support structure
US5123317A (en) 1991-03-20 1992-06-23 Ryobi Motor Products Corp. Support structure for a table saw blade assembly
US5257461A (en) 1992-04-27 1993-11-02 Warner & Swasey Coordinate measuring machine construction
IT1279210B1 (it) 1995-05-16 1997-12-04 Dea Spa Dispositivo e metodo di visione per la misura tridimensionale senza contatto.
USD377654S (en) 1995-06-19 1997-01-28 Emerson Electric Co. Motorized table saw
IT1281383B1 (it) 1995-10-06 1998-02-18 Dea Spa Attrezzatura di supporto riconfigurabile, particolarmente per una macchina di misura
US6202316B1 (en) 1998-04-14 2001-03-20 Timothy J. Swift Coordinate measuring machine guideway composite structure and method of manufacture
DE19821274A1 (de) 1998-05-13 1999-11-18 Zeiss Carl Fa Koordinatenmeßgerät in Brückenbauweise
US6188150B1 (en) 1999-06-16 2001-02-13 Euv, Llc Light weight high-stiffness stage platen

Also Published As

Publication number Publication date
US6655037B2 (en) 2003-12-02
US20020189117A1 (en) 2002-12-19

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 19990715

R150 Utility model maintained after payment of first maintenance fee after three years

Effective date: 20020429

R151 Utility model maintained after payment of second maintenance fee after six years

Effective date: 20050415

R152 Utility model maintained after payment of third maintenance fee after eight years

Effective date: 20070330

R071 Expiry of right