JPS6419748A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6419748A JPS6419748A JP17634487A JP17634487A JPS6419748A JP S6419748 A JPS6419748 A JP S6419748A JP 17634487 A JP17634487 A JP 17634487A JP 17634487 A JP17634487 A JP 17634487A JP S6419748 A JPS6419748 A JP S6419748A
- Authority
- JP
- Japan
- Prior art keywords
- film
- relieved
- leaving
- residue
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To form excellent Cu containing Al film patterns leaving no residue during an etching process by a method wherein, a Cu containing Al film is heat treated after a forming process and before a patterning process. CONSTITUTION:A Cu containing Al film 2 in thickness of 1mum is formed on a semiconductor substrate 1 by sputtering process. First, the segregation of Cu in the Al film 2 is relieved by heat treatment in N2 atmosphere at 400 deg.C for 30 minutes to form a Cu containing relieved Al film 3. Second, photoresist pattern film 4 are formed on the film 3. Finally, the Al film 3 is selectively etched by reactive etching process using a gas containing CCl4. Through said dryetching processes, the Cu containing Al film 3 can be etched leaving no residue at all.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17634487A JPS6419748A (en) | 1987-07-14 | 1987-07-14 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17634487A JPS6419748A (en) | 1987-07-14 | 1987-07-14 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6419748A true JPS6419748A (en) | 1989-01-23 |
Family
ID=16011949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17634487A Pending JPS6419748A (en) | 1987-07-14 | 1987-07-14 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6419748A (en) |
-
1987
- 1987-07-14 JP JP17634487A patent/JPS6419748A/en active Pending
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