JPS6410947B2 - - Google Patents

Info

Publication number
JPS6410947B2
JPS6410947B2 JP55035875A JP3587580A JPS6410947B2 JP S6410947 B2 JPS6410947 B2 JP S6410947B2 JP 55035875 A JP55035875 A JP 55035875A JP 3587580 A JP3587580 A JP 3587580A JP S6410947 B2 JPS6410947 B2 JP S6410947B2
Authority
JP
Japan
Prior art keywords
oxide film
thick oxide
film
thick
thin oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55035875A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56133866A (en
Inventor
Akira Takei
Takashi Mitsuida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3587580A priority Critical patent/JPS56133866A/ja
Publication of JPS56133866A publication Critical patent/JPS56133866A/ja
Publication of JPS6410947B2 publication Critical patent/JPS6410947B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Semiconductor Memories (AREA)
JP3587580A 1980-03-21 1980-03-21 Manufacture of semiconductor memory Granted JPS56133866A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3587580A JPS56133866A (en) 1980-03-21 1980-03-21 Manufacture of semiconductor memory

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3587580A JPS56133866A (en) 1980-03-21 1980-03-21 Manufacture of semiconductor memory

Publications (2)

Publication Number Publication Date
JPS56133866A JPS56133866A (en) 1981-10-20
JPS6410947B2 true JPS6410947B2 (enrdf_load_stackoverflow) 1989-02-22

Family

ID=12454163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3587580A Granted JPS56133866A (en) 1980-03-21 1980-03-21 Manufacture of semiconductor memory

Country Status (1)

Country Link
JP (1) JPS56133866A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6151964A (ja) * 1984-08-22 1986-03-14 Nec Corp 半導体装置
JPS6151965A (ja) * 1984-08-22 1986-03-14 Nec Corp 半導体記憶装置

Also Published As

Publication number Publication date
JPS56133866A (en) 1981-10-20

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