JPS56133866A - Manufacture of semiconductor memory - Google Patents
Manufacture of semiconductor memoryInfo
- Publication number
- JPS56133866A JPS56133866A JP3587580A JP3587580A JPS56133866A JP S56133866 A JPS56133866 A JP S56133866A JP 3587580 A JP3587580 A JP 3587580A JP 3587580 A JP3587580 A JP 3587580A JP S56133866 A JPS56133866 A JP S56133866A
- Authority
- JP
- Japan
- Prior art keywords
- drain region
- oxide film
- substrate
- bit line
- contact area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
Landscapes
- Semiconductor Memories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3587580A JPS56133866A (en) | 1980-03-21 | 1980-03-21 | Manufacture of semiconductor memory |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3587580A JPS56133866A (en) | 1980-03-21 | 1980-03-21 | Manufacture of semiconductor memory |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56133866A true JPS56133866A (en) | 1981-10-20 |
JPS6410947B2 JPS6410947B2 (ja) | 1989-02-22 |
Family
ID=12454163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3587580A Granted JPS56133866A (en) | 1980-03-21 | 1980-03-21 | Manufacture of semiconductor memory |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56133866A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6151964A (ja) * | 1984-08-22 | 1986-03-14 | Nec Corp | 半導体装置 |
JPS6151965A (ja) * | 1984-08-22 | 1986-03-14 | Nec Corp | 半導体記憶装置 |
-
1980
- 1980-03-21 JP JP3587580A patent/JPS56133866A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6151964A (ja) * | 1984-08-22 | 1986-03-14 | Nec Corp | 半導体装置 |
JPS6151965A (ja) * | 1984-08-22 | 1986-03-14 | Nec Corp | 半導体記憶装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6410947B2 (ja) | 1989-02-22 |
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