JPS52146567A - Production of semiconductor integrated circuits - Google Patents

Production of semiconductor integrated circuits

Info

Publication number
JPS52146567A
JPS52146567A JP6320376A JP6320376A JPS52146567A JP S52146567 A JPS52146567 A JP S52146567A JP 6320376 A JP6320376 A JP 6320376A JP 6320376 A JP6320376 A JP 6320376A JP S52146567 A JPS52146567 A JP S52146567A
Authority
JP
Japan
Prior art keywords
production
integrated circuits
semiconductor integrated
film
polycrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6320376A
Other languages
Japanese (ja)
Inventor
Sokichi Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP6320376A priority Critical patent/JPS52146567A/en
Publication of JPS52146567A publication Critical patent/JPS52146567A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the variation in the threshold voltages of Si gate MOS ICs and stabilize their characteristics by depositing a polycrystalline Si film on a gate oxide film then forming a N-implanted layer at their interface by an ion implantation method.
COPYRIGHT: (C)1977,JPO&Japio
JP6320376A 1976-05-31 1976-05-31 Production of semiconductor integrated circuits Pending JPS52146567A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6320376A JPS52146567A (en) 1976-05-31 1976-05-31 Production of semiconductor integrated circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6320376A JPS52146567A (en) 1976-05-31 1976-05-31 Production of semiconductor integrated circuits

Publications (1)

Publication Number Publication Date
JPS52146567A true JPS52146567A (en) 1977-12-06

Family

ID=13222406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6320376A Pending JPS52146567A (en) 1976-05-31 1976-05-31 Production of semiconductor integrated circuits

Country Status (1)

Country Link
JP (1) JPS52146567A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11204793A (en) * 1997-10-24 1999-07-30 Lsi Logic Corp Electronic device gate oxide hardening method and semiconductor device
JP2008103738A (en) * 1993-09-02 2008-05-01 Renesas Technology Corp Semiconductor device and method of manufacturing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008103738A (en) * 1993-09-02 2008-05-01 Renesas Technology Corp Semiconductor device and method of manufacturing the same
JPH11204793A (en) * 1997-10-24 1999-07-30 Lsi Logic Corp Electronic device gate oxide hardening method and semiconductor device

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