JPS522289A - Method of manufacturing insulation gate-type semiconductor integration circuit device - Google Patents

Method of manufacturing insulation gate-type semiconductor integration circuit device

Info

Publication number
JPS522289A
JPS522289A JP7671275A JP7671275A JPS522289A JP S522289 A JPS522289 A JP S522289A JP 7671275 A JP7671275 A JP 7671275A JP 7671275 A JP7671275 A JP 7671275A JP S522289 A JPS522289 A JP S522289A
Authority
JP
Japan
Prior art keywords
gate
type semiconductor
circuit device
integration circuit
insulation gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7671275A
Other languages
Japanese (ja)
Inventor
Isao Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7671275A priority Critical patent/JPS522289A/en
Publication of JPS522289A publication Critical patent/JPS522289A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To eliminate the contamination of gate-forming oxide film, to enhance the gate breakdown voltage and to prevent the development of VLS phenomenon (abnormal growth of multicrystalline Si) by forming a multicrystalline Si wiring pattern on a Si gate MOS IC, and then forming gate-forming oxide film and a gate electrode.
COPYRIGHT: (C)1977,JPO&Japio
JP7671275A 1975-06-24 1975-06-24 Method of manufacturing insulation gate-type semiconductor integration circuit device Pending JPS522289A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7671275A JPS522289A (en) 1975-06-24 1975-06-24 Method of manufacturing insulation gate-type semiconductor integration circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7671275A JPS522289A (en) 1975-06-24 1975-06-24 Method of manufacturing insulation gate-type semiconductor integration circuit device

Publications (1)

Publication Number Publication Date
JPS522289A true JPS522289A (en) 1977-01-08

Family

ID=13613143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7671275A Pending JPS522289A (en) 1975-06-24 1975-06-24 Method of manufacturing insulation gate-type semiconductor integration circuit device

Country Status (1)

Country Link
JP (1) JPS522289A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53147473A (en) * 1977-05-27 1978-12-22 Mitsubishi Electric Corp Production of mis type semiconductor device
JPS572519A (en) * 1980-06-05 1982-01-07 Nec Corp Manufacture of semiconductor device
JPS6089873A (en) * 1983-10-21 1985-05-20 Sony Corp Error correcting method
JPS61129777A (en) * 1984-11-28 1986-06-17 Nec Corp Optical disc processing device
JPS62273775A (en) * 1986-05-21 1987-11-27 Toshiba Corp Semiconductor device and manufacture thereof
JPS63144466A (en) * 1986-12-05 1988-06-16 Nec Corp Error correction device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53147473A (en) * 1977-05-27 1978-12-22 Mitsubishi Electric Corp Production of mis type semiconductor device
JPS572519A (en) * 1980-06-05 1982-01-07 Nec Corp Manufacture of semiconductor device
JPS6089873A (en) * 1983-10-21 1985-05-20 Sony Corp Error correcting method
JPS61129777A (en) * 1984-11-28 1986-06-17 Nec Corp Optical disc processing device
JPS62273775A (en) * 1986-05-21 1987-11-27 Toshiba Corp Semiconductor device and manufacture thereof
JPS63144466A (en) * 1986-12-05 1988-06-16 Nec Corp Error correction device

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