JPS5342560A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5342560A
JPS5342560A JP11775476A JP11775476A JPS5342560A JP S5342560 A JPS5342560 A JP S5342560A JP 11775476 A JP11775476 A JP 11775476A JP 11775476 A JP11775476 A JP 11775476A JP S5342560 A JPS5342560 A JP S5342560A
Authority
JP
Japan
Prior art keywords
substrate
production
semiconductor device
windows
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11775476A
Other languages
Japanese (ja)
Inventor
Tadanaka Yoneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11775476A priority Critical patent/JPS5342560A/en
Publication of JPS5342560A publication Critical patent/JPS5342560A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE: To obtain high density LSI of high breakdown voltage between drains and substrate and high gm of load MOS transistors by depositing a SiO2 film and photosensitive resin on a Si substrate, opening windows therein, softening the resin through heating to reduce the size of the windows thereafter forming each region through implanting impurity ions.
COPYRIGHT: (C)1978,JPO&Japio
JP11775476A 1976-09-29 1976-09-29 Production of semiconductor device Pending JPS5342560A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11775476A JPS5342560A (en) 1976-09-29 1976-09-29 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11775476A JPS5342560A (en) 1976-09-29 1976-09-29 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5342560A true JPS5342560A (en) 1978-04-18

Family

ID=14719484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11775476A Pending JPS5342560A (en) 1976-09-29 1976-09-29 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5342560A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56137650A (en) * 1980-03-28 1981-10-27 Nec Corp Manufacture of semiconductor device
JPS5736845A (en) * 1980-08-15 1982-02-27 Seiko Epson Corp Manufacture of selectively oxidized mask
US4916802A (en) * 1983-12-27 1990-04-17 Ngk Insulators, Ltd. Method for producing a magnetic head core

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56137650A (en) * 1980-03-28 1981-10-27 Nec Corp Manufacture of semiconductor device
JPS5736845A (en) * 1980-08-15 1982-02-27 Seiko Epson Corp Manufacture of selectively oxidized mask
US4916802A (en) * 1983-12-27 1990-04-17 Ngk Insulators, Ltd. Method for producing a magnetic head core

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