JPS6373363U - - Google Patents

Info

Publication number
JPS6373363U
JPS6373363U JP16851386U JP16851386U JPS6373363U JP S6373363 U JPS6373363 U JP S6373363U JP 16851386 U JP16851386 U JP 16851386U JP 16851386 U JP16851386 U JP 16851386U JP S6373363 U JPS6373363 U JP S6373363U
Authority
JP
Japan
Prior art keywords
substrate
chamber
high vacuum
vacuum evacuation
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16851386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH069019Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986168513U priority Critical patent/JPH069019Y2/ja
Publication of JPS6373363U publication Critical patent/JPS6373363U/ja
Application granted granted Critical
Publication of JPH069019Y2 publication Critical patent/JPH069019Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1986168513U 1986-10-31 1986-10-31 Ｃｖｄ装置 Expired - Lifetime JPH069019Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986168513U JPH069019Y2 (ja) 1986-10-31 1986-10-31 Ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986168513U JPH069019Y2 (ja) 1986-10-31 1986-10-31 Ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS6373363U true JPS6373363U (enrdf_load_stackoverflow) 1988-05-16
JPH069019Y2 JPH069019Y2 (ja) 1994-03-09

Family

ID=31101454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986168513U Expired - Lifetime JPH069019Y2 (ja) 1986-10-31 1986-10-31 Ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH069019Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825226A (ja) * 1982-07-19 1983-02-15 Shunpei Yamazaki プラズマ気相反応装置
JPS5941470A (ja) * 1982-08-31 1984-03-07 Shimadzu Corp 多室形薄膜作成装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825226A (ja) * 1982-07-19 1983-02-15 Shunpei Yamazaki プラズマ気相反応装置
JPS5941470A (ja) * 1982-08-31 1984-03-07 Shimadzu Corp 多室形薄膜作成装置

Also Published As

Publication number Publication date
JPH069019Y2 (ja) 1994-03-09

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