JPH069019Y2 - Ｃｖｄ装置 - Google Patents

Ｃｖｄ装置

Info

Publication number
JPH069019Y2
JPH069019Y2 JP1986168513U JP16851386U JPH069019Y2 JP H069019 Y2 JPH069019 Y2 JP H069019Y2 JP 1986168513 U JP1986168513 U JP 1986168513U JP 16851386 U JP16851386 U JP 16851386U JP H069019 Y2 JPH069019 Y2 JP H069019Y2
Authority
JP
Japan
Prior art keywords
chamber
film forming
film
substrate
high vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986168513U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6373363U (enrdf_load_stackoverflow
Inventor
一秀 足立
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1986168513U priority Critical patent/JPH069019Y2/ja
Publication of JPS6373363U publication Critical patent/JPS6373363U/ja
Application granted granted Critical
Publication of JPH069019Y2 publication Critical patent/JPH069019Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1986168513U 1986-10-31 1986-10-31 Ｃｖｄ装置 Expired - Lifetime JPH069019Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986168513U JPH069019Y2 (ja) 1986-10-31 1986-10-31 Ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986168513U JPH069019Y2 (ja) 1986-10-31 1986-10-31 Ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS6373363U JPS6373363U (enrdf_load_stackoverflow) 1988-05-16
JPH069019Y2 true JPH069019Y2 (ja) 1994-03-09

Family

ID=31101454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986168513U Expired - Lifetime JPH069019Y2 (ja) 1986-10-31 1986-10-31 Ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH069019Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825226A (ja) * 1982-07-19 1983-02-15 Shunpei Yamazaki プラズマ気相反応装置
JPS5941470A (ja) * 1982-08-31 1984-03-07 Shimadzu Corp 多室形薄膜作成装置

Also Published As

Publication number Publication date
JPS6373363U (enrdf_load_stackoverflow) 1988-05-16

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