JPS6359531B2 - - Google Patents

Info

Publication number
JPS6359531B2
JPS6359531B2 JP55176673A JP17667380A JPS6359531B2 JP S6359531 B2 JPS6359531 B2 JP S6359531B2 JP 55176673 A JP55176673 A JP 55176673A JP 17667380 A JP17667380 A JP 17667380A JP S6359531 B2 JPS6359531 B2 JP S6359531B2
Authority
JP
Japan
Prior art keywords
region
film
substrate
etching
depth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55176673A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57100733A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP55176673A priority Critical patent/JPS57100733A/ja
Publication of JPS57100733A publication Critical patent/JPS57100733A/ja
Publication of JPS6359531B2 publication Critical patent/JPS6359531B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Weting (AREA)
JP55176673A 1980-12-15 1980-12-15 Etching method for semiconductor substrate Granted JPS57100733A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55176673A JPS57100733A (en) 1980-12-15 1980-12-15 Etching method for semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55176673A JPS57100733A (en) 1980-12-15 1980-12-15 Etching method for semiconductor substrate

Publications (2)

Publication Number Publication Date
JPS57100733A JPS57100733A (en) 1982-06-23
JPS6359531B2 true JPS6359531B2 (show.php) 1988-11-21

Family

ID=16017713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55176673A Granted JPS57100733A (en) 1980-12-15 1980-12-15 Etching method for semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS57100733A (show.php)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6328067A (ja) * 1986-07-22 1988-02-05 Sony Corp 半導体装置の製造方法
JP3205103B2 (ja) * 1993-01-07 2001-09-04 松下電器産業株式会社 半導体装置の製造方法
DE10104324A1 (de) * 2001-01-24 2002-08-01 Siemens Ag Verfahren zum Ätz-Strukturieren der Oberfläche eines Bauteils
DE10104323A1 (de) * 2001-01-24 2002-08-01 Siemens Ag Verfahren zum Herstellen einer Rille mit einer Engstelle in der Oberfläche eines Bauteils und Bauteil

Also Published As

Publication number Publication date
JPS57100733A (en) 1982-06-23

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