JPS6358390B2 - - Google Patents

Info

Publication number
JPS6358390B2
JPS6358390B2 JP56179305A JP17930581A JPS6358390B2 JP S6358390 B2 JPS6358390 B2 JP S6358390B2 JP 56179305 A JP56179305 A JP 56179305A JP 17930581 A JP17930581 A JP 17930581A JP S6358390 B2 JPS6358390 B2 JP S6358390B2
Authority
JP
Japan
Prior art keywords
mesa stripe
conductivity type
layer
laminated
active layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56179305A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5880889A (ja
Inventor
Ikuo Mito
Mitsuhiro Kitamura
Kenichi Kobayashi
Isao Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP17930581A priority Critical patent/JPS5880889A/ja
Publication of JPS5880889A publication Critical patent/JPS5880889A/ja
Publication of JPS6358390B2 publication Critical patent/JPS6358390B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/20Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/223Buried stripe structure
    • H01S5/2232Buried stripe structure with inner confining structure between the active layer and the lower electrode
    • H01S5/2234Buried stripe structure with inner confining structure between the active layer and the lower electrode having a structured substrate surface
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/20Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/223Buried stripe structure
    • H01S5/2237Buried stripe structure with a non-planar active layer

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Semiconductor Lasers (AREA)
JP17930581A 1981-11-09 1981-11-09 半導体レーザの製造方法 Granted JPS5880889A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17930581A JPS5880889A (ja) 1981-11-09 1981-11-09 半導体レーザの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17930581A JPS5880889A (ja) 1981-11-09 1981-11-09 半導体レーザの製造方法

Publications (2)

Publication Number Publication Date
JPS5880889A JPS5880889A (ja) 1983-05-16
JPS6358390B2 true JPS6358390B2 (enrdf_load_stackoverflow) 1988-11-15

Family

ID=16063499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17930581A Granted JPS5880889A (ja) 1981-11-09 1981-11-09 半導体レーザの製造方法

Country Status (1)

Country Link
JP (1) JPS5880889A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58121693A (ja) * 1982-01-12 1983-07-20 Sanyo Electric Co Ltd 半導体レ−ザ
US4937836A (en) * 1983-11-30 1990-06-26 Sharp Kabushiki Kaisha Semiconductor laser device and production method therefor
JPS6184087A (ja) * 1984-10-02 1986-04-28 Agency Of Ind Science & Technol 多重量子井戸半導体レ−ザ及びその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52100885A (en) * 1976-02-19 1977-08-24 Sony Corp Production of semiconductor device by liquid epitaxial growth
JPS5521199A (en) * 1978-07-31 1980-02-15 Rca Corp Semiconductor laser

Also Published As

Publication number Publication date
JPS5880889A (ja) 1983-05-16

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